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Patent applications and USPTO patent grants for Barreiro; Jean.The latest application filed is for "rf plasma reactor having a distribution chamber with at least one grid".
Patent | Date |
---|---|
RF plasma reactor having a distribution chamber with at least one grid Grant 9,045,828 - Turlot , et al. June 2, 2 | 2015-06-02 |
RF Plasma Reactor Having a Distribution Chamber with at Least One Grid App 20080093341 - Turlot; Emmanuel ;   et al. | 2008-04-24 |
RF plasma reactor having a distribution chamber with at least one grid Grant 7,306,829 - Turlot , et al. December 11, 2 | 2007-12-11 |
RF plasma reactor App 20030070761 - Turlot, Emmanuel ;   et al. | 2003-04-17 |
Design of gas injection for the electrode in a capacitively coupled RF plasma reactor Grant 6,502,530 - Turlot , et al. January 7, 2 | 2003-01-07 |
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