| Patent | Date |
|---|
Drive-through order point
Grant 10,796,611 - Barnes October 6, 2 | 2020-10-06 |
Digital display mounting and lift bracket
Grant 9,951,903 - Barnes April 24, 2 | 2018-04-24 |
Drive-Through Order Point
App 20180090036 - Barnes; Michael S. | 2018-03-29 |
Mobile wireless order point and pick-up station
Grant 9,916,566 - Barnes March 13, 2 | 2018-03-13 |
Digital Display Mounting and Lift Bracket
App 20180023756 - Barnes; Michael S. | 2018-01-25 |
Mobile Wireless Order Point And Pick-Up Station
App 20180012209 - Barnes; Michael S. | 2018-01-11 |
Display enclosure with passive cooling system
Grant 9,857,618 - Barnes January 2, 2 | 2018-01-02 |
Apparatus and methods for transporting and processing substrates
Grant 9,524,896 - Bluck , et al. December 20, 2 | 2016-12-20 |
Manual switch system for outputting multimedia content to a digital sign
Grant 9,508,310 - Barnes November 29, 2 | 2016-11-29 |
Display Enclosure with Passive Cooling System
App 20160345464 - Barnes; Michael S. | 2016-11-24 |
Switch system for outputting multimedia content to a digital sign
Grant 9,430,090 - Barnes August 30, 2 | 2016-08-30 |
System and method for dual-sided sputter etch of substrates
Grant 9,165,587 - Barnes , et al. October 20, 2 | 2015-10-20 |
Processing tool with combined sputter and evaporation deposition sources
Grant 9,157,145 - Eristoff , et al. October 13, 2 | 2015-10-13 |
System and method for processing substrates with detachable mask
Grant 8,795,466 - Barnes , et al. August 5, 2 | 2014-08-05 |
System and method for dual-sided sputter etch of substrates
Grant 8,784,622 - Barnes , et al. July 22, 2 | 2014-07-22 |
Process for optimization of island to trench ratio in patterned media
Grant 8,715,515 - Nguyen , et al. May 6, 2 | 2014-05-06 |
Switch System for Outputting Multimedia Content to a Digital Sign
App 20140043296 - Barnes; Michael S. | 2014-02-13 |
Manual Switch System for Outputting Multimedia Content to a Digital Sign
App 20140043302 - Barnes; Michael S. | 2014-02-13 |
System And Method For Commercial Fabrication Of Patterned Media
App 20130098761 - Fairbairn; Kevin P. ; et al. | 2013-04-25 |
System and method for commercial fabrication of patterned media
Grant 8,349,196 - Fairbairn , et al. January 8, 2 | 2013-01-08 |
Apparatus and methods for transporting and processing substrates
Grant 8,303,764 - Bluck , et al. November 6, 2 | 2012-11-06 |
Apparatus and methods for transporting and processing substrates
Grant 8,293,066 - Bluck , et al. October 23, 2 | 2012-10-23 |
Menu Display Cabinet
App 20120224116 - Barnes; Michael S. | 2012-09-06 |
System And Method For Commercial Fabrication Of Patterned Media
App 20120090992 - Fairbairn; Kevin P. ; et al. | 2012-04-19 |
Evaporative system for solar cell fabrication
Grant 8,087,380 - Bluck , et al. January 3, 2 | 2012-01-03 |
Vented Menu Display Cabinet
App 20110216263 - Barnes; Michael S. | 2011-09-08 |
Apparatus And Methods For Transporting And Processing Substrates
App 20110158773 - BLUCK; Terry ; et al. | 2011-06-30 |
Evaporative System For Solar Cell Fabrication
App 20110104847 - BLUCK; Terry ; et al. | 2011-05-05 |
Apparatus and methods for transporting and processing substrates
Grant 7,901,539 - Bluck , et al. March 8, 2 | 2011-03-08 |
Combination awning bracket and light support system
Grant 7,861,990 - Barnes January 4, 2 | 2011-01-04 |
Process For Optimization Of Island To Trench Ratio In Patterned Media
App 20100237042 - Nguyen; Houng T. ; et al. | 2010-09-23 |
Processing Tool With Combined Sputter And Evaporation Deposition Sources
App 20100024731 - ERISTOFF; D. Guy ; et al. | 2010-02-04 |
System And Method For Processing Substrates With Detachable Mask
App 20100003768 - BARNES; Michael S. ; et al. | 2010-01-07 |
Apparatus And Methods For Transporting And Processing Substrates
App 20090191030 - Bluck; Terry ; et al. | 2009-07-30 |
Method And Apparatus For Chamber Cleaning By In-situ Plasma Excitation
App 20090159104 - Huang; Judy ; et al. | 2009-06-25 |
Low Cost High Conductance Chamber
App 20090151872 - Samir; Tugrul ; et al. | 2009-06-18 |
System And Method For Dual-sided Sputter Etch Of Substrates
App 20090145881 - Barnes; Michael S. ; et al. | 2009-06-11 |
System And Method For Commercial Fabrication Of Patterned Media
App 20090145879 - Fairbairn; Kevin P. ; et al. | 2009-06-11 |
System And Method For Dual-sided Sputter Etch Of Substrates
App 20090145752 - Barnes; Michael S. ; et al. | 2009-06-11 |
Apparatus And Methods For Transporting And Processing Substrates
App 20090078374 - Bluck; Terry ; et al. | 2009-03-26 |
Method And System For Vapor Phase Application Of Lubricant In Disk Media Manufacturing Process
App 20090047417 - Barnes; Michael S. ; et al. | 2009-02-19 |
Power Source Arrangement For Multiple-Target Sputtering System
App 20080202924 - Bluck; Terry ; et al. | 2008-08-28 |
Combination Awning Bracket and Light Support System
App 20080067304 - Barnes; Michael S. | 2008-03-20 |
Apparatus and methods for transporting and processing substrates
App 20080066678 - Bluck; Terry ; et al. | 2008-03-20 |
Component awning and light support system
Grant 7,311,290 - Barnes December 25, 2 | 2007-12-25 |
Bonded multi-layer RF window
App 20070079936 - Li; Maocheng ; et al. | 2007-04-12 |
Methods and apparatus for stripping
App 20070051471 - Kawaguchi; Mark N. ; et al. | 2007-03-08 |
Ashable layers for reducing critical dimensions of integrated circuit features
Grant 7,105,442 - Shan , et al. September 12, 2 | 2006-09-12 |
Tandem etch chamber plasma processing system
Grant 6,962,644 - Paterson , et al. November 8, 2 | 2005-11-08 |
Externally excited torroidal plasma source with magnetic control of ion distribution
Grant 6,939,434 - Collins , et al. September 6, 2 | 2005-09-06 |
Monitoring substrate processing by detecting reflectively diffracted light
Grant 6,849,151 - Barnes , et al. February 1, 2 | 2005-02-01 |
Inductively coupled plasma downstream strip module
App 20040149223 - Collison, Wenli Z. ; et al. | 2004-08-05 |
Electrically operated compressor capacity control system with integral pressure sensors
Grant 6,732,541 - Urbank , et al. May 11, 2 | 2004-05-11 |
Adjustable dual frequency voltage dividing plasma reactor
Grant 6,706,138 - Barnes , et al. March 16, 2 | 2004-03-16 |
Inductively coupled plasma downstream strip module
Grant 6,692,649 - Collison , et al. February 17, 2 | 2004-02-17 |
Monitoring substrate processing by detecting reflectively diffracted light
App 20040026368 - Barnes, Michael S. ; et al. | 2004-02-12 |
Externally excited torroidal plasma source with magnetic control of ion distribution
App 20030226641 - Collins, Kenneth S. ; et al. | 2003-12-11 |
Ashable layers for reducing critical dimensions of integrated circuit features
App 20030219988 - Shan, Hongqing ; et al. | 2003-11-27 |
Tandem etch chamber plasma processing system
App 20030176074 - Paterson, Alexander ; et al. | 2003-09-18 |
Adjustable dual frequency voltage dividing plasma reactor
App 20030037881 - Barnes, Michael S. ; et al. | 2003-02-27 |
Method and device for compensating wafer bias in a plasma processing chamber
Grant 6,361,645 - Schoepp , et al. March 26, 2 | 2002-03-26 |
Inductively coupled plasma downstream strip module
App 20010023741 - Collison, Wenli Z. ; et al. | 2001-09-27 |
Plasma device including a powered non-magnetic metal member between a plasma AC excitation source and the plasma
Grant 6,280,563 - Baldwin, Jr. , et al. August 28, 2 | 2001-08-28 |
Inductively coupled plasma downstream strip module
Grant 6,203,657 - Collison , et al. March 20, 2 | 2001-03-20 |
Method and apparatus for pressure control in vacuum processors
Grant 6,142,163 - McMillin , et al. November 7, 2 | 2000-11-07 |
Inductively coupled planar source for substantially uniform plasma flux
Grant 6,027,603 - Holland , et al. February 22, 2 | 2000-02-22 |
Method of and apparatus for igniting a plasma in an r.f. plasma processor
Grant 5,982,099 - Barnes , et al. November 9, 1 | 1999-11-09 |
Method of and apparatus for electronically controlling r.f. energy supplied to a vacuum plasma processor and memory for same
Grant 5,892,198 - Barnes , et al. April 6, 1 | 1999-04-06 |
Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors
Grant 5,847,918 - Shufflebotham , et al. December 8, 1 | 1998-12-08 |
Method and apparatus for pressure control in vacuum processors
Grant 5,803,107 - Kaveh , et al. September 8, 1 | 1998-09-08 |
Vacuum plasma processor having coil with minimum magnetic field in its center
Grant 5,800,619 - Holland , et al. September 1, 1 | 1998-09-01 |
Apparatus for controlling matching network of a vacuum plasma processor and memory for same
Grant 5,793,162 - Barnes , et al. August 11, 1 | 1998-08-11 |
Method and apparatus for pressure control in vacuum processors
Grant 5,758,680 - Kaveh , et al. June 2, 1 | 1998-06-02 |
Inductively coupled source for deriving substantially uniform plasma flux
Grant 5,759,280 - Holland , et al. June 2, 1 | 1998-06-02 |
Method of and apparatus for controlling reactive impedances of a matching network connected between an RF source and an RF plasma processor
Grant 5,689,215 - Richardson , et al. November 18, 1 | 1997-11-18 |
Method of in situ cleaning a vacuum plasma processing chamber
Grant 5,679,215 - Barnes , et al. October 21, 1 | 1997-10-21 |
Vacuum plasma processing wherein workpiece position is detected prior to chuck being activated
Grant 5,670,066 - Barnes , et al. September 23, 1 | 1997-09-23 |
Guard ring electrostatic chuck
Grant 5,612,851 - Barnes , et al. March 18, 1 | 1997-03-18 |
Electrostatic chuck with reference electrode
Grant 5,561,585 - Barnes , et al. October 1, 1 | 1996-10-01 |
Method of reducing particulates in a plasma tool through steady state flows
Grant 5,543,184 - Barnes , et al. August 6, 1 | 1996-08-06 |
Method of making electrostatic chuck with oxide insulator
Grant 5,535,507 - Barnes , et al. July 16, 1 | 1996-07-16 |
Method and apparatus for reducing particulates in a plasma tool through steady state flows
Grant 5,518,547 - Barnes , et al. May 21, 1 | 1996-05-21 |
Etching of silicon dioxide selectively to silicon nitride and polysilicon
Grant 5,505,816 - Barnes , et al. April 9, 1 | 1996-04-09 |
Electrostatic chuck with reference electrode
Grant 5,467,249 - Barnes , et al. November 14, 1 | 1995-11-14 |
Guard ring electrostatic chuck
Grant 5,463,525 - Barnes , et al. October 31, 1 | 1995-10-31 |
Gettering of particles during plasma processing
Grant 5,433,258 - Barnes , et al. July 18, 1 | 1995-07-18 |
Apparatus for gettering of particles during plasma processing
Grant 5,332,441 - Barnes , et al. July 26, 1 | 1994-07-26 |
Selective fluorocarbon-based RIE process utilizing a nitrogen additive
Grant 5,284,549 - Barnes , et al. February 8, 1 | 1994-02-08 |
Optimized helical resonator for plasma processing
Grant 5,241,245 - Barnes , et al. August 31, 1 | 1993-08-31 |
Ceramic electrostatic wafer chuck
Grant 5,207,437 - Barnes , et al. May 4, 1 | 1993-05-04 |
Plasma wafer processing tool having closed electron cyclotron resonance
Grant 5,189,446 - Barnes , et al. February 23, 1 | 1993-02-23 |
Apparatus for depositing material into high aspect ratio holes
Grant 5,178,739 - Barnes , et al. January 12, 1 | 1993-01-12 |
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