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Patent applications and USPTO patent grants for Bantien; Frank.The latest application filed is for "method of manufacturing sensor".
Patent | Date |
---|---|
Method of manufacturing sensor Grant 5,616,523 - Benz , et al. April 1, 1 | 1997-04-01 |
Silicon chip for use in a force-detection sensor Grant 5,600,074 - Marek , et al. February 4, 1 | 1997-02-04 |
Capacitive accelerometer sensor and method for its manufacture Grant 5,569,852 - Marek , et al. October 29, 1 | 1996-10-29 |
Method for manufacturing micro-mechanical components using selective anodization of silicon Grant 5,542,558 - Benz , et al. August 6, 1 | 1996-08-06 |
Mass-flow sensor Grant 5,452,610 - Kleinhans , et al. September 26, 1 | 1995-09-26 |
Method of assembling micromechanical sensors Grant 5,273,939 - Becker , et al. December 28, 1 | 1993-12-28 |
Sensor Grant 5,259,247 - Bantien November 9, 1 | 1993-11-09 |
Acceleration and vibration sensor and method of making the same Grant 5,151,763 - Marek , et al. September 29, 1 | 1992-09-29 |
Micromechanical tilt sensor Grant 5,148,604 - Bantien September 22, 1 | 1992-09-22 |
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