| Patent | Date |
|---|
Pellicle Membrane For A Lithographic Apparatus
App 20220276553 - NIKIPELOV; Andrey ; et al. | 2022-09-01 |
Lithographic apparatus comprising an object with an upper layer having improved resistance to peeling off
Grant 11,143,975 - Nikipelov , et al. October 12, 2 | 2021-10-12 |
Component for use in a patterning device environment
Grant 11,048,180 - Nikipelov , et al. June 29, 2 | 2021-06-29 |
A Lithographic Apparatus Comprising An Object With An Upper Layer Having Improved Resistance To Peeling Off
App 20210132517 - NIKIPELOV; Andrey ; et al. | 2021-05-06 |
Sensor mark and a method of manufacturing a sensor mark
Grant 10,976,196 - Klugkist , et al. April 13, 2 | 2021-04-13 |
Radiation sensor apparatus
Grant 10,900,829 - Banine , et al. January 26, 2 | 2021-01-26 |
Lithographic method
Grant 10,884,339 - Engelen , et al. January 5, 2 | 2021-01-05 |
Imprint lithography apparatus and method
Grant 10,712,678 - Kruijt-Stegeman , et al. | 2020-07-14 |
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane
Grant 10,698,312 - Van Zwol , et al. | 2020-06-30 |
Suppression filter, radiation collector and radiation source for a lithographic apparatus; method of determining a separation distance between at least two reflective surface levels of a suppression filter
Grant 10,678,140 - Banine , et al. | 2020-06-09 |
Component for Use in a Patterning Device Environment
App 20200096880 - NIKIPELOV; Andrey ; et al. | 2020-03-26 |
Beam delivery apparatus and method
Grant 10,580,545 - Banine , et al. | 2020-03-03 |
Sensor Mark And A Method Of Manufacturing A Sensor Mark
App 20200064183 - KLUGKIST; Joost Andre ; et al. | 2020-02-27 |
Metrology methods, radiation source, metrology apparatus and device manufacturing method
Grant 10,555,407 - Polyakov , et al. Fe | 2020-02-04 |
Radiation Sensor Apparatus
App 20190353521 - Banine; Vadim Yevgenyevich ; et al. | 2019-11-21 |
Graphene spectral purity filter
Grant 10,481,510 - Yakunin , et al. Nov | 2019-11-19 |
Lithographic Method
App 20190302625 - ENGELEN; Wouter Joep ; et al. | 2019-10-03 |
Radiation sensor apparatus
Grant 10,422,691 - Banine , et al. Sept | 2019-09-24 |
Metrology Methods, Radiation Source, Metrology Apparatus and Device Manufacturing Method
App 20190246480 - POLYAKOV; Alexey Olegovich ; et al. | 2019-08-08 |
Methods and apparatus for optical metrology
Grant 10,362,665 - Smorenburg , et al. July 23, 2 | 2019-07-23 |
Metrology methods, radiation source, metrology apparatus and device manufacturing method
Grant 10,342,108 - Polyakov , et al. | 2019-07-02 |
Membranes For Use Within A Lithographic Apparatus And A Lithographic Apparatus Comprising Such A Membrane
App 20190146332 - VAN ZWOL; Pieter-Jan ; et al. | 2019-05-16 |
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane
Grant 10,228,615 - Nikipelov , et al. | 2019-03-12 |
Methods and Apparatus for Optical Metrology
App 20180368243 - SMORENBURG; Petrus Wilhelmus ; et al. | 2018-12-20 |
Electron injector and free electron laser
Grant 10,103,508 - Nikipelov , et al. October 16, 2 | 2018-10-16 |
Pellicle For Reticle And Multilayer Mirror
App 20180259846 - YAKUNIN; Andrei Mikhailovich ; et al. | 2018-09-13 |
Suppression Filter, Radiation Collector And Radiation Source For A Lithographic Apparatus; Method Of Determining A Separation Distance Between At Least Two Reflective Surface Levels Of A Suppression Filter
App 20180246414 - BANINE; Vadim Yevgenyevich ; et al. | 2018-08-30 |
Metrology Methods, Radiation Source, Metrology Apparatus and Device Manufacturing Method
App 20180220518 - POLYAKOV; Alexey Olegovich ; et al. | 2018-08-02 |
Lithographic apparatus
Grant 10,031,422 - Nikipelov , et al. July 24, 2 | 2018-07-24 |
Lithographic apparatus, spectral purity filter and device manufacturing method
Grant 10,001,709 - Banine , et al. June 19, 2 | 2018-06-19 |
Method and apparatus for generating radiation
Grant 9,986,628 - Loopstra , et al. May 29, 2 | 2018-05-29 |
Lithographic apparatus and device manufacturing method
Grant 9,964,858 - De Smit , et al. May 8, 2 | 2018-05-08 |
Imprint lithography
Grant 9,927,699 - Wuister , et al. March 27, 2 | 2018-03-27 |
Lithographic Method
App 20180081278 - NIKIPELOV; Andrey Alexandrovich ; et al. | 2018-03-22 |
Radiation Sensor Apparatus
App 20180058928 - BANINE; Vadim Yevgenyevich ; et al. | 2018-03-01 |
Optical element comprising oriented carbon nanotube sheet and lithographic apparatus comprising such optical element
Grant 9,897,930 - Sjmaenok , et al. February 20, 2 | 2018-02-20 |
Lithographic method
Grant 9,823,572 - Nikipelov , et al. November 21, 2 | 2017-11-21 |
Electron Injector and Free Electron Laser
App 20170264071 - NIKIPELOV; Andrey Alexandrovich ; et al. | 2017-09-14 |
Spectral purity filter
Grant 9,726,989 - Soer , et al. August 8, 2 | 2017-08-08 |
Electron injector and free electron laser
Grant 9,728,931 - Nikipelov , et al. August 8, 2 | 2017-08-08 |
Membranes For Use Within A Lithographic Apparatus And A Lithographic Apparatus Comprising Such A Membrane
App 20170205704 - NIKIPELOV; Andrey Alexandrovich ; et al. | 2017-07-20 |
Lithographic Apparatus, Spectral Purity Filter and Device Manufacturing Method
App 20170160646 - BANINE; Vadim Yevgenyevich ; et al. | 2017-06-08 |
Lithographic apparatus, programmable patterning device and lithographic method
Grant 9,645,502 - De Jager , et al. May 9, 2 | 2017-05-09 |
Radiation source
Grant 9,632,419 - Van Schoot , et al. April 25, 2 | 2017-04-25 |
Lithographic apparatus and method of manufacturing a device
Grant 9,606,445 - Banine , et al. March 28, 2 | 2017-03-28 |
Lithographic apparatus, spectral purity filter and device manufacturing method
Grant 9,594,306 - Banine , et al. March 14, 2 | 2017-03-14 |
Pellicle For Reticle And Multilayer Mirror
App 20170017150 - YAKUNIN; Andrei Mikhailovich ; et al. | 2017-01-19 |
Radiation source, lithographic apparatus, and device manufacturing method
Grant 9,529,283 - Yakunin , et al. December 27, 2 | 2016-12-27 |
Methods of providing patterned epitaxy templates for self-assemblable block copolymers for use in device lithography
Grant 9,513,553 - Wuister , et al. December 6, 2 | 2016-12-06 |
Methods and apparatus for inspection of articles, EUV lithography reticles, lithography apparatus and method of manufacturing devices
Grant 9,488,922 - Vainer , et al. November 8, 2 | 2016-11-08 |
Pellicle for reticle and multilayer mirror
Grant 9,482,960 - Yakunin , et al. November 1, 2 | 2016-11-01 |
Electron Injector And Free Electron Laser
App 20160301180 - NIKIPELOV; Andrey Alexandrovich ; et al. | 2016-10-13 |
Method and apparatus for generating radiation
Grant 9,442,380 - Badie , et al. September 13, 2 | 2016-09-13 |
Radiation system and lithographic apparatus
Grant 9,411,250 - Banine , et al. August 9, 2 | 2016-08-09 |
Source-collector device, lithographic apparatus, and device manufacturing method
Grant 9,411,238 - Yakunin , et al. August 9, 2 | 2016-08-09 |
Beam Delivery Apparatus And Method
App 20160225477 - BANINE; Vadim Yevgenyevich ; et al. | 2016-08-04 |
Lithographic apparatus and method
Grant 9,395,630 - Yakunin , et al. July 19, 2 | 2016-07-19 |
Imprint Lithography Apparatus And Method
App 20160195823 - KRUIJT-STEGEMAN; Yvonne Wendela ; et al. | 2016-07-07 |
Grazing incidence reflectors, lithographic apparatus, methods for manufacturing a grazing incidence reflector and methods for manufacturing a device
Grant 9,377,695 - Yakunin , et al. June 28, 2 | 2016-06-28 |
Imprint lithography method and imprintable medium
Grant 9,372,399 - Van Der Mark , et al. June 21, 2 | 2016-06-21 |
Module and method for producing extreme ultraviolet radiation
Grant 9,363,879 - Van Empel , et al. June 7, 2 | 2016-06-07 |
Arrangement for use in a projection exposure tool for microlithography having a reflective optical element
Grant 9,354,529 - Ehm , et al. May 31, 2 | 2016-05-31 |
Lithographic Method
App 20160147161 - NIKIPELOV; Andrey Alexandrovich ; et al. | 2016-05-26 |
Lithographic apparatus, programmable patterning device and lithographic method
Grant 9,335,638 - De Jager , et al. May 10, 2 | 2016-05-10 |
Lithographic apparatus
Grant 9,307,624 - Glushkov , et al. April 5, 2 | 2016-04-05 |
Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device
Grant 9,298,110 - Steinhoff , et al. March 29, 2 | 2016-03-29 |
Mirror, lithographic apparatus and device manufacturing method
Grant 9,285,690 - Banine , et al. March 15, 2 | 2016-03-15 |
Imprint lithography method and apparatus
Grant 9,278,466 - Wuister , et al. March 8, 2 | 2016-03-08 |
Methods of providing patterned templates for self-assemblable block copolymers for use in device lithography
Grant 9,229,324 - Singh , et al. January 5, 2 | 2016-01-05 |
Radiation source with a debris mitigation system, lithographic apparatus with a debris mitigation system, method for preventing debris from depositing on collector mirror, and device manufacturing method
Grant 9,207,548 - Banine , et al. December 8, 2 | 2015-12-08 |
Lithographic apparatus comprising a support for holding an object, and a support for use therein
Grant 9,195,150 - Cadee , et al. November 24, 2 | 2015-11-24 |
Spectral purity filter, radiation source, lithographic apparatus, and device manufacturing method
Grant 9,195,144 - Jak , et al. November 24, 2 | 2015-11-24 |
Lithographic Apparatus And Device Manufacturing Method
App 20150331334 - DE SMIT; Joannes Theodoor ; et al. | 2015-11-19 |
Method and Apparatus for Generating Radiation
App 20150296602 - Loopstra; Erik Roelof ; et al. | 2015-10-15 |
Lithographic Apparatus
App 20150286145 - Nikipelov; Andrey ; et al. | 2015-10-08 |
Method and Apparatus for Generating Radiation
App 20150268559 - Badie; Ramin ; et al. | 2015-09-24 |
Object inspection systems and methods
Grant 9,122,178 - Ivanov , et al. September 1, 2 | 2015-09-01 |
Imprint lithography apparatus
Grant 9,116,423 - Jeunink , et al. August 25, 2 | 2015-08-25 |
Lithographic apparatus and device manufacturing method
Grant 9,110,389 - De Smit , et al. August 18, 2 | 2015-08-18 |
Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filter
Grant 9,097,982 - Banine , et al. August 4, 2 | 2015-08-04 |
Source collector, lithographic apparatus and device manufacturing method
Grant 9,091,944 - Loopstra , et al. July 28, 2 | 2015-07-28 |
EUV multilayer mirror with interlayer and lithographic apparatus using the mirror
Grant 9,082,521 - Glushkov , et al. July 14, 2 | 2015-07-14 |
Lithographic Apparatus and Method of Manufacturing a Device
App 20150192861 - Banine; Vadim Yevgenyevich ; et al. | 2015-07-09 |
Spectral purity filters for use in a lithographic apparatus
Grant 9,041,912 - Soer , et al. May 26, 2 | 2015-05-26 |
Imprint Lithography Method And Apparatus
App 20150136324 - WUISTER; Sander Frederik ; et al. | 2015-05-21 |
Method and apparatus for treatment of self-assemblable polymer layers for use in lithography
Grant 9,011,978 - Koole , et al. April 21, 2 | 2015-04-21 |
Module And Method For Producing Extreme Ultraviolet Radiation
App 20150077729 - VAN EMPEL; Tjarko Adriaan Rudolf ; et al. | 2015-03-19 |
Imprint lithography method and apparatus
Grant 8,961,801 - Wuister , et al. February 24, 2 | 2015-02-24 |
Methods Of Providing Patterned Epitaxy Templates For Self-assemblable Block Copolymers For Use In Device Lithography
App 20150050599 - Wuister; Sander Frederik ; et al. | 2015-02-19 |
Methods Of Providing Patterned Templates For Self-assemblable Block Copolymers For Use In Device Lithography
App 20150034594 - Singh; Harmeet ; et al. | 2015-02-05 |
Radiation source, lithographic apparatus and device manufacturing method
Grant 8,946,661 - Loopstra , et al. February 3, 2 | 2015-02-03 |
Lithographic Apparatus Comprising a Support for Holding an Object, and a Support for Use therein
App 20150002832 - Cadee; Theodorus Petrus Maria ; et al. | 2015-01-01 |
Source-collector Device, Lithographic Apparatus, And Device Manufacturing Method
App 20140375974 - Yakunin; Andrei Mikhailovich ; et al. | 2014-12-25 |
Module and method for producing extreme ultraviolet radiation
Grant 8,901,521 - Van Empel , et al. December 2, 2 | 2014-12-02 |
Apparatus for Monitoring a Lithographic Patterning Device
App 20140340663 - Scaccabarozzi; Luigi ; et al. | 2014-11-20 |
Radiation Source
App 20140253894 - Van Schoot; Jan Bernard Plechelmus ; et al. | 2014-09-11 |
Inspection method and apparatus
Grant 8,830,455 - Den Boef , et al. September 9, 2 | 2014-09-09 |
Radiation source and lithographic apparatus
Grant 8,755,032 - Yakunin , et al. June 17, 2 | 2014-06-17 |
Lithographic Apparatus, Programmable Patterning Device And Lithographic Method
App 20140160452 - De Jager; Pieter Willem Herman ; et al. | 2014-06-12 |
Pellicle For Reticle And Multilayer Mirror
App 20140160455 - YAKUNIN; Andrei Mikhailovich ; et al. | 2014-06-12 |
Radiation source with cleaning apparatus
Grant 8,742,381 - Banine , et al. June 3, 2 | 2014-06-03 |
Methods and Apparatus for Inspection of Articles, EUV Lithography Reticles, Lithography Apparatus and Method of Manufacturing Devices
App 20140146297 - Vainer; Yuri ; et al. | 2014-05-29 |
Radiation source, lithographic apparatus and device manufacturing method
Grant 8,685,632 - Kempen , et al. April 1, 2 | 2014-04-01 |
Lithographic Apparatus, Spectral Purity Filter and Device Manufacturing Method
App 20140085619 - Banine; Vadim Yevgenyevich ; et al. | 2014-03-27 |
Grazing Incidence Reflectors, Lithographic Apparatus, Methods for Manufacturing a Grazing Incidence Reflector and Methods for Manufacturing a Device
App 20140078486 - Yakunin; Andrei Mikhailovich ; et al. | 2014-03-20 |
Lithographic Apparatus, Programmable Patterning Device And Lithographic Method
App 20140071421 - De Jager; Pieter Willem Herman ; et al. | 2014-03-13 |
Lithographic Apparatus, Programmable Patterning Device And Lithographic Method
App 20140055764 - DE JAGER; Pieter Willem Herman ; et al. | 2014-02-27 |
Electrostatic Clamp Apparatus And Lithographic Apparatus
App 20140002805 - Banine; Vadim Yevgenyevich ; et al. | 2014-01-02 |
Thermal conditioning system for thermal conditioning a part of a lithographic apparatus and a thermal conditioning method
Grant 8,610,089 - Donders , et al. December 17, 2 | 2013-12-17 |
Radiation Source, Lithographic Apparatus And Device Manufacturing Method
App 20130327955 - Loopstra; Erik Roelof ; et al. | 2013-12-12 |
Ex-situ removal of deposition on an optical element
Grant 8,598,550 - Banine , et al. December 3, 2 | 2013-12-03 |
Lithographic Apparatus And Device Manufacturing Method
App 20130287968 - Ivanov; Vladimir Vitalevich ; et al. | 2013-10-31 |
Imprint lithography
Grant 8,529,823 - Den Boef , et al. September 10, 2 | 2013-09-10 |
Lithographic apparatus, programmable patterning device and lithographic method
Grant 8,531,648 - De Jager , et al. September 10, 2 | 2013-09-10 |
Radiation source and lithographic apparatus
Grant 8,507,882 - Swinkels , et al. August 13, 2 | 2013-08-13 |
Lithographic apparatus and device manufacturing method
Grant 8,493,548 - Ivanov , et al. July 23, 2 | 2013-07-23 |
Radiation Source With Cleaning Apparatus
App 20130161542 - BANINE; Vadim Yevgenyevich ; et al. | 2013-06-27 |
Imprint lithography
Grant 8,454,849 - Wuister , et al. June 4, 2 | 2013-06-04 |
System and method for detecting at least one contamination species in a lithographic apparatus
Grant 8,445,873 - Banine , et al. May 21, 2 | 2013-05-21 |
Imprint Lithography Method And Imprintable Medium
App 20130120725 - Van Der Mark; Martinus Bernardus ; et al. | 2013-05-16 |
Components for EUV Lithographic Apparatus, EUV Lithographic Apparatus Including Such Components and Method for Manufacturing Such Components
App 20130114059 - Jak; Martin Jacobus Johan ; et al. | 2013-05-09 |
Radiation source and lithographic apparatus
Grant 8,431,916 - Loopstra , et al. April 30, 2 | 2013-04-30 |
Lithographic Apparatus And Method
App 20130088699 - Yakunin; Andrei Mikhailovich ; et al. | 2013-04-11 |
Radiation source, lithographic apparatus and device manufacturing method
Grant 8,416,391 - Banine , et al. April 9, 2 | 2013-04-09 |
Arrangement For Use In A Projection Exposure Tool For Microlithography Having A Reflective Optical Element
App 20130077064 - Ehm; Dirk Heinrich ; et al. | 2013-03-28 |
Source module, radiation source and lithographic apparatus
Grant 8,405,055 - Labetski , et al. March 26, 2 | 2013-03-26 |
Method of detecting a particle and a lithographic apparatus
Grant 8,405,825 - Scaccabarozzi , et al. March 26, 2 | 2013-03-26 |
Method for removing a deposition on an uncapped multilayer mirror of a lithographic apparatus, lithographic apparatus and device manufacturing method
Grant 8,405,051 - Banine , et al. March 26, 2 | 2013-03-26 |
System For Removing Contaminant Particles, Lithographic Apparatus, Method For Removing Contaminant Particles And Method For Manufacturing A Device
App 20130070218 - Ivanov; Vladimir Vitalevich ; et al. | 2013-03-21 |
Spectral purity filters for use in a lithographic apparatus
Grant 8,390,788 - Soer , et al. March 5, 2 | 2013-03-05 |
Spectral Purity Filter
App 20130038926 - Soer; Wouter Anthon ; et al. | 2013-02-14 |
Radiation source, lithographic apparatus and device manufacturing method
Grant 8,373,846 - Loopstra , et al. February 12, 2 | 2013-02-12 |
Lithographic apparatus and device manufacturing method
Grant 8,363,208 - De Smit , et al. January 29, 2 | 2013-01-29 |
Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method
Grant 8,362,444 - Ivanov , et al. January 29, 2 | 2013-01-29 |
EUV Radiation Source and EUV Radiation Generation Method
App 20130015373 - Yakunin; Andrei Mikhailovich ; et al. | 2013-01-17 |
Spectral Purity Filters for Use in a Lithographic Apparatus
App 20130010363 - Soer; Wouter Anthon ; et al. | 2013-01-10 |
Lithographic Apparatus And Spectral Purity Filter
App 20130010275 - Medvedev; Viacheslav ; et al. | 2013-01-10 |
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby
Grant 8,345,223 - Soer , et al. January 1, 2 | 2013-01-01 |
Radiation Source, Lithographic Apparatus and Device Manufacturing Method
App 20120327381 - Labetski; Dzmitry ; et al. | 2012-12-27 |
Method And Apparatus For Treatment Of Self-assemblable Polymer Layers For Use In Lithography
App 20120312501 - Koole; Roelof ; et al. | 2012-12-13 |
Radiation source, lithographic apparatus and device manufacturing method
Grant 8,319,200 - Schimmel , et al. November 27, 2 | 2012-11-27 |
Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatus
Grant 8,317,929 - Rakhimova , et al. November 27, 2 | 2012-11-27 |
Thermal Conditioning System For Thermal Conditioning A Part Of A Lithographic Apparatus And A Thermal Conditioning Method
App 20120267550 - DONDERS; Sjoerd Nicolaas Lambertus ; et al. | 2012-10-25 |
Apparatus with plasma radiation source and method of forming a beam of radiation
Grant 8,294,128 - Krivtsun , et al. October 23, 2 | 2012-10-23 |
System and Method for Detecting at Least One Contamination Species in a Lithographic Apparatus
App 20120241610 - BANINE; Vadim Yevgenyevich ; et al. | 2012-09-27 |
Radiation source and lithographic apparatus including a contamination trap
Grant 8,242,471 - Soer , et al. August 14, 2 | 2012-08-14 |
Radiation source
Grant 8,242,473 - Banine , et al. August 14, 2 | 2012-08-14 |
Radiation source, lithographic apparatus and device manufacturing method
Grant 8,232,537 - Schimmel , et al. July 31, 2 | 2012-07-31 |
Methods and Apparatus for Inspection Of Articles, EUV Lithography Reticles, Lithography Apparatus and Method of Manufacturing Devices
App 20120182538 - Koole; Roelof ; et al. | 2012-07-19 |
Spectral Purity Filter, Lithographic Apparatus, And Device Manufacturing Method
App 20120182537 - Yakunin; Andrei Mikhailovich ; et al. | 2012-07-19 |
Source Collector, Lithographic Apparatus And Device Manufacturing Method
App 20120182536 - Loopstra; Erik Roelof ; et al. | 2012-07-19 |
System and method for detecting at least one contamination species in a lithographic apparatus
Grant 8,217,347 - Banine , et al. July 10, 2 | 2012-07-10 |
Ex-situ Removal Of Deposition On An Optical Element
App 20120140196 - Banine; Vadim Yevgenyevich ; et al. | 2012-06-07 |
Object Inspection Systems and Methods
App 20120127467 - Ivanov; Vitalii ; et al. | 2012-05-24 |
Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
Grant 8,139,200 - Van Herpen , et al. March 20, 2 | 2012-03-20 |
Ex-situ removal of deposition on an optical element
Grant 8,134,136 - Banine , et al. March 13, 2 | 2012-03-13 |
Lithographic Apparatus And Device Manufacturing Method
App 20120013872 - DE SMIT; Joannes Theodoor ; et al. | 2012-01-19 |
Lithographic Apparatus And Device Manufacturing Method
App 20120008117 - DE SMIT; Joannes Theodoor ; et al. | 2012-01-12 |
Lithographic apparatus and device manufacturing method
Grant 8,094,288 - Banine , et al. January 10, 2 | 2012-01-10 |
Multilayer Mirror And Lithographic Apparatus
App 20110292366 - Glushkov; Denis Alexandrovich ; et al. | 2011-12-01 |
Optical Element For A Lithographic Apparatus, Lithographic Apparatus Comprising Such Optical Element And Method For Making The Optical Element
App 20110249243 - Sjmaenok; Leonid Aizikovitch ; et al. | 2011-10-13 |
Fly's eye integrator, illuminator, lithographic apparatus and method
Grant 8,031,404 - Banine October 4, 2 | 2011-10-04 |
Imprint Lithography
App 20110233825 - Wuister; Sander Frederik ; et al. | 2011-09-29 |
Imprint Lithography
App 20110226735 - Wuister; Sander Frederik ; et al. | 2011-09-22 |
Mirror, Lithographic Apparatus and Device Manufacturing Method
App 20110228243 - Banine; Vadim Yevgenyevich ; et al. | 2011-09-22 |
Radiation Source Apparatus, Lithographic Apparatus, Method Of Generating And Delivering Radiation And Method For Manufacturing A Device
App 20110222040 - STEINHOFF; Jens Arno ; et al. | 2011-09-15 |
Radiation System, Radiation Collector, Radiation Beam Conditioning System, Spectral Purity Filter For Radiation System And Method For Forming A Spectral Purity Filter
App 20110223543 - Banine; Vadim Yevgenyevich ; et al. | 2011-09-15 |
Lithographic apparatus, radiation system and device manufacturing method
Grant 8,018,574 - Gayazov , et al. September 13, 2 | 2011-09-13 |
Pellicle, lithographic apparatus and device manufacturing method
Grant 8,018,578 - Banine , et al. September 13, 2 | 2011-09-13 |
Spectral Purity Filter, Radiation Source, Lithographic Apparatus, and Device Manufacturing Method
App 20110211185 - Jak; Martin Jacobus Johan ; et al. | 2011-09-01 |
Lithographic Apparatus, Programmable Patterning Device And Lithographic Method
App 20110188016 - De Jager; Pieter Willem Herman ; et al. | 2011-08-04 |
Radiation Source, Lithographic Apparatus And Device Manufacturing Method
App 20110188014 - Banine; Vadim Yevgenyevich ; et al. | 2011-08-04 |
Lithographic Apparatus and Device Manufacturing Method
App 20110170083 - Scaccabarozzi; Luigi ; et al. | 2011-07-14 |
Radiation System And Lithographic Apparatus
App 20110170079 - Banine; Vadim Yevgenyevich ; et al. | 2011-07-14 |
Radiation Source And Lithographic Apparatus
App 20110164236 - Yakunin; Andrei Mikhailovich ; et al. | 2011-07-07 |
Method of Detecting a Particle and a Lithographic Apparatus
App 20110149276 - SCACCABAROZZI; Luigi ; et al. | 2011-06-23 |
Radiation Source, Lithographic Apparatus, And Device Manufacturing Method
App 20110143269 - Yakunin; Andrei Mikhailovich ; et al. | 2011-06-16 |
Radiation Source, Lithographic Apparatus And Device Manufacturing Method
App 20110143288 - Kempen; Antonius Theodorus Wilhelmus ; et al. | 2011-06-16 |
Radiation Source, Lithographic Apparatus And Device Manufacturing Method
App 20110134405 - Banine; Vadim Yevgenyevich ; et al. | 2011-06-09 |
Spectral Purity Filter For Multi-layer Mirror, Lithographic Apparatus Including Such Multi-layer Mirror, Method For Enlarging The Ratio Of Desired Radiation And Undesired Radiation, And Device Manufacturing Method
App 20110134410 - VAN HERPEN; Maarten Marinus Johannes Wilhelmus ; et al. | 2011-06-09 |
System and Method for Detecting at Least One Contamination Species in a Lithographic Apparatus
App 20110121177 - BANINE; Vadim Yevgenyevich ; et al. | 2011-05-26 |
Method For Removing A Deposition On An Uncapped Multilayer Mirror Of A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method
App 20110117504 - Banine; Vadim Yevgenyevich ; et al. | 2011-05-19 |
Optical apparatus, lithographic apparatus and device manufacturing method
Grant 7,935,218 - Moors , et al. May 3, 2 | 2011-05-03 |
Apparatus Comprising A Rotating Contaminant Trap
App 20110096308 - FRANKEN; Johannes Christiaan Leonardus ; et al. | 2011-04-28 |
Lithographic apparatus, and device manufacturing method
Grant 7,928,412 - Van Herpen , et al. April 19, 2 | 2011-04-19 |
Multilayer Mirror And Lithographic Apparatus
App 20110080573 - Glushkov; Denis Alexandrovich ; et al. | 2011-04-07 |
Imprint Lithography
App 20110076352 - DEN BOEF; Arie Jeffrey ; et al. | 2011-03-31 |
Imprint Lithography Method And Apparatus
App 20110049097 - WUISTER; Sander Frederik ; et al. | 2011-03-03 |
System and method for detecting at least one contamination species in a lithographic apparatus
Grant 7,897,110 - Banine , et al. March 1, 2 | 2011-03-01 |
Target Material, A Source, An Euv Lithographic Apparatus And A Device Manufacturing Method Using The Same
App 20110043777 - Krivtsun; Vladimir Mihailovitc ; et al. | 2011-02-24 |
Spectral Purity Filters For Use In A Lithographic Apparatus
App 20110044425 - Jak; Martin Jacobus Johan ; et al. | 2011-02-24 |
Inspection method and apparatus
App 20110043795 - Den Boef; Arie Jeffrey ; et al. | 2011-02-24 |
Spectral Purity Filters For Use In A Lithographic Apparatus
App 20110043782 - Soer; Wouter Anthon ; et al. | 2011-02-24 |
Apparatus comprising a rotating contaminant trap
Grant 7,889,312 - Franken , et al. February 15, 2 | 2011-02-15 |
Plasma Radiation Source, Method Of Forming Plasma Radiation, Apparatus For Projecting A Pattern From A Patterning Device Onto A Substrate And Device Manufacturing Method
App 20110031866 - IVANOV; Vladimir Vitalevitch ; et al. | 2011-02-10 |
Optical Element, Lithographic Apparatus Including Such An Optical Element, Device Manufacturing Method, And Device Manufactured Thereby
App 20110019174 - Soer; Wouter Anthon ; et al. | 2011-01-27 |
Extreme Ultraviolet Radiation Source And Method For Producing Extreme Ultraviolet Radiation
App 20110020752 - Sidelnikov; Yurii Victorovitch ; et al. | 2011-01-27 |
Illumination system, lithographic apparatus, mirror, method of removing contamination from a mirror and device manufacturing method
Grant 7,875,863 - Van Herpen , et al. January 25, 2 | 2011-01-25 |
Lithographic apparatus and device manufacturing method
Grant 7,872,244 - Ivanov , et al. January 18, 2 | 2011-01-18 |
Imprint Lithography Apparatus
App 20110008483 - Jeunink; Andre Bernardus ; et al. | 2011-01-13 |
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 7,868,304 - Bakker , et al. January 11, 2 | 2011-01-11 |
Imprint Lithography Apparatus and Method
App 20110001254 - Kruijt-Stegeman; Yvonne Wendela ; et al. | 2011-01-06 |
Radiation system and lithographic apparatus comprising the same
Grant 7,863,591 - Van Herpen , et al. January 4, 2 | 2011-01-04 |
Spectral Purity Filter, Lithographic Apparatus, And Method For Manufacturing A Spectral Purity Filter
App 20100328639 - Jak; Martin Jacobus Johan ; et al. | 2010-12-30 |
Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method
Grant 7,838,853 - Ivanov , et al. November 23, 2 | 2010-11-23 |
Ex-situ Removal Of Deposition On An Optical Element
App 20100290015 - BANINE; Vadim Yevgenyevich ; et al. | 2010-11-18 |
Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus
Grant 7,825,390 - Krivtsun , et al. November 2, 2 | 2010-11-02 |
Apparatus comprising a rotating contaminant trap
App 20100259733 - Franken; Johannes Christiaan ; et al. | 2010-10-14 |
Spectral Filter, Lithographic Apparatus Including Such A Spectral Filter, Device Manufacturing Method, And Device Manufactured Thereby
App 20100259744 - Van Herpen; Maarten Marinus Johannes Wilhelmus ; et al. | 2010-10-14 |
Radical cleaning arrangement for a lithographic apparatus
Grant 7,812,330 - Banine , et al. October 12, 2 | 2010-10-12 |
Radiation Source
App 20100253928 - BANINE; Vadim Yevgenyevich ; et al. | 2010-10-07 |
Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method
Grant 7,800,079 - Banine , et al. September 21, 2 | 2010-09-21 |
Assembly for blocking a beam of radiation and method of blocking a beam of radiation
Grant 7,772,570 - Banine , et al. August 10, 2 | 2010-08-10 |
Patterning device, method of providing a patterning device, photolithographic apparatus and device manufacturing method
Grant 7,771,896 - Soer , et al. August 10, 2 | 2010-08-10 |
Ex-situ removal of deposition on an optical element
Grant 7,767,989 - Banine , et al. August 3, 2 | 2010-08-03 |
Radiation source
Grant 7,763,871 - Banine , et al. July 27, 2 | 2010-07-27 |
Lithographic apparatus and cleaning method therefor
Grant 7,750,326 - Van Herpen , et al. July 6, 2 | 2010-07-06 |
Radiation Source, Lithographic Apparatus And Device Manufacturing Method
App 20100157267 - SCHIMMEL; Hendrikus Gijsbertus ; et al. | 2010-06-24 |
System for Contactless Cleaning, Lithographic Apparatus and Device Manufacturing Method
App 20100151394 - Scaccabarozzi; Luigi ; et al. | 2010-06-17 |
Spectral Purity Filter For Multi-layer Mirror, Lithographic Apparatus Including Such Multi-layer Mirror, Method For Enlarging The Ratio Of Desired Radiation And Undesired Radiation, And Device Manufacturing Method
App 20100149512 - VAN HERPEN; Maarten Marinus Johannes Wilhelmus ; et al. | 2010-06-17 |
Anti-reflection coating for an EUV mask
Grant 7,736,820 - Van Herpen , et al. June 15, 2 | 2010-06-15 |
Radiation System And Lithographic Apparatus
App 20100141909 - Wassink; Arnoud Cornelis ; et al. | 2010-06-10 |
Lithographic Apparatus And Device Manufacturing Method
App 20100128235 - De Smit; Joannes Theodoor ; et al. | 2010-05-27 |
Device arranged to measure a quantity relating to radiation and lithographic apparatus
Grant 7,724,349 - Soer , et al. May 25, 2 | 2010-05-25 |
Radiation Source And Lithographic Apparatus
App 20100110405 - LOOPSTRA; Erik Roelof ; et al. | 2010-05-06 |
Fly's Eye Integrator, Illuminator, Lithographic Apparatus And Method
App 20100103395 - BANINE; Vadim Yevgenyevich | 2010-04-29 |
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
Grant 7,706,057 - Van Herpen , et al. April 27, 2 | 2010-04-27 |
Radiation system and lithographic apparatus
Grant 7,696,493 - Van Herpen , et al. April 13, 2 | 2010-04-13 |
Radiation system and lithographic apparatus
Grant 7,696,492 - Wassink , et al. April 13, 2 | 2010-04-13 |
Source Module, Radiation Source And Lithographic Apparatus
App 20100085547 - Labetski; Dzmitry ; et al. | 2010-04-08 |
Lithographic apparatus and device manufacturing method
Grant 7,684,008 - De Smit , et al. March 23, 2 | 2010-03-23 |
Lithographic device, device manufacturing method and device manufactured thereby
Grant 7,684,012 - Jacobs , et al. March 23, 2 | 2010-03-23 |
Radiation Source And Lithographic Apparatus
App 20100053581 - SWINKELS; Gerardus Hubertus Petrus Maria ; et al. | 2010-03-04 |
Radiation Source, Lithographic Apparatus And Device Manufacturing Method
App 20100039632 - VAN HERPEN; Maarten Marinus Johannes Wilhelmus ; et al. | 2010-02-18 |
Radiation Source, Lithographic Apparatus And Device Manufacturing Method
App 20100038562 - SCHIMMEL; Hendrikus Gijsbertus ; et al. | 2010-02-18 |
Spectral Purity Filters for Use in a Lithographic Apparatus
App 20100020304 - Soer; Wouter Anthon ; et al. | 2010-01-28 |
Lithographic Apparatus
App 20100002211 - GLUSHKOV; Denis ; et al. | 2010-01-07 |
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby
Grant 7,639,418 - Banine , et al. December 29, 2 | 2009-12-29 |
Radiation System and Lithographic Apparatus Comprising the Same
App 20090309048 - VAN HERPEN; Maarten Marinus Johannes Wilhelmus ; et al. | 2009-12-17 |
Lithographic apparatus, and device manufacturing method
Grant 7,629,594 - Van Herpen , et al. December 8, 2 | 2009-12-08 |
Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method
Grant 7,629,593 - Buis , et al. December 8, 2 | 2009-12-08 |
Radiation Source
App 20090272917 - Soer; Wouter Anthon ; et al. | 2009-11-05 |
Lithographic apparatus, contaminant trap, and device manufacturing method
Grant 7,612,353 - Sjmaenok , et al. November 3, 2 | 2009-11-03 |
Radiation source
App 20090250639 - Banine; Vadim Yevgenyevich ; et al. | 2009-10-08 |
Lithographic apparatus and cleaning method therefor
Grant 7,598,503 - Van Herpen , et al. October 6, 2 | 2009-10-06 |
Lithographic Apparatus, and Device Manufacturing Method
App 20090173360 - VAN HERPEN; Maarten Marinus Johannes Wilhelmus ; et al. | 2009-07-09 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
Grant 7,557,366 - Ivanov , et al. July 7, 2 | 2009-07-07 |
Radiation system and lithographic apparatus comprising the same
Grant 7,541,603 - Van Herpen , et al. June 2, 2 | 2009-06-02 |
Radiation source, lithographic apparatus and device manufacturing method
Grant 7,528,395 - Koshelev , et al. May 5, 2 | 2009-05-05 |
Plasma radiation source for a lithographic apparatus
Grant 7,518,134 - Ivanov , et al. April 14, 2 | 2009-04-14 |
Reducing fast ions in a plasma radiation source
Grant 7,518,135 - Ivanov , et al. April 14, 2 | 2009-04-14 |
Module And Method For Producing Extreme Ultraviolet Radiation
App 20090090877 - Van Empel; Tjarko Adriaan Rudolf ; et al. | 2009-04-09 |
Lithographic apparatus and device manufacturing method
Grant 7,515,245 - Moors , et al. April 7, 2 | 2009-04-07 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 7,508,487 - Mulkens , et al. March 24, 2 | 2009-03-24 |
Radical cleaning arrangement for a lithographic apparatus
App 20090072168 - Banine; Vadim Yevgenyevich ; et al. | 2009-03-19 |
Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement
Grant 7,504,643 - Freriks , et al. March 17, 2 | 2009-03-17 |
Radiation source
Grant 7,501,642 - Moors , et al. March 10, 2 | 2009-03-10 |
Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement
Grant 7,495,239 - Freriks , et al. February 24, 2 | 2009-02-24 |
Lithographic apparatus, system and device manufacturing method
Grant 7,491,951 - Van Der Velden , et al. February 17, 2 | 2009-02-17 |
Cleaning method
App 20090038636 - Wuister; Sander Frederik ; et al. | 2009-02-12 |
Lithographic apparatus and device manufacturing method
App 20090040491 - Ivanov; Vladimir Vitalevich ; et al. | 2009-02-12 |
Lithographic apparatus and device manufacturing method
App 20090040492 - Ivanov; Vladimir Vitalevich ; et al. | 2009-02-12 |
Lithographic projection apparatus with collector including concave and convex mirrors
Grant 7,489,385 - Banine February 10, 2 | 2009-02-10 |
Getter and cleaning arrangement for a lithographic apparatus and method for cleaning a surface
Grant 7,473,908 - Van Herpen , et al. January 6, 2 | 2009-01-06 |
Illumination system for a wavelength of .ltoreq. 193 nm, with sensors for determining an illumination
Grant 7,473,907 - Singer , et al. January 6, 2 | 2009-01-06 |
Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method
App 20090001288 - Buis; Edwin Johan ; et al. | 2009-01-01 |
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
App 20080316595 - Van Herpen; Maarten Marinus Johannes Wilhelmus ; et al. | 2008-12-25 |
Lithographic apparatus and device manufacturing method
Grant 7,468,521 - Klunder , et al. December 23, 2 | 2008-12-23 |
Controlling the flow through the collector during cleaning
Grant 7,465,943 - Banine , et al. December 16, 2 | 2008-12-16 |
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
Grant 7,463,413 - Van Herpen , et al. December 9, 2 | 2008-12-09 |
Radical cleaning arrangement for a lithographic apparatus
Grant 7,462,850 - Banine , et al. December 9, 2 | 2008-12-09 |
Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby
Grant 7,462,851 - Banine , et al. December 9, 2 | 2008-12-09 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 7,459,690 - Van Der Werf , et al. December 2, 2 | 2008-12-02 |
Device arranged to measure a quantity relating to radiation and lithographic apparatus
App 20080273188 - Soer; Wouter Anthon ; et al. | 2008-11-06 |
Extreme ultraviolet microscope
App 20080266654 - Banine; Vadim Yevgenyevich ; et al. | 2008-10-30 |
Pellicle, lithographic apparatus and device manufacturing method
App 20080259291 - Banine; Vadim Yevgenyevich ; et al. | 2008-10-23 |
Lithographic apparatus and device manufacturing method
App 20080259298 - Banine; Vadim Yevgenyevich ; et al. | 2008-10-23 |
Inspection method and apparatus using same
Grant 7,433,033 - Bleeker , et al. October 7, 2 | 2008-10-07 |
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus
Grant 7,414,700 - Van Herpen , et al. August 19, 2 | 2008-08-19 |
Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus
App 20080192218 - Krivtsun; Vladimir Mihailovitch ; et al. | 2008-08-14 |
Lithographic apparatus having a monitoring device for detecting contamination
Grant 7,405,417 - Stevens , et al. July 29, 2 | 2008-07-29 |
Lithographic apparatus, contaminant trap, and device manufacturing method
Grant 7,397,056 - Sjmaenok , et al. July 8, 2 | 2008-07-08 |
Illumination system, lithographic apparatus, mirror, method of removing contamination from a mirror and device manufacturing method
App 20080149854 - Van Herpen; Maarten Marinus Johannes Wilhelmus ; et al. | 2008-06-26 |
Assembly for blocking a beam of radiation and method of blocking a beam of radiation
App 20080148978 - Banine; Vadim Yevgenyevich ; et al. | 2008-06-26 |
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby
App 20080151361 - Banine; Vadim Yevgenyevich ; et al. | 2008-06-26 |
Patterning device, method of providing a patterning device, photolithographic apparatus and device manufacturing method
App 20080151215 - Soer; Wouter Anthon ; et al. | 2008-06-26 |
Reducing fast ions in a plasma radiation source
App 20080151205 - Ivanov; Vladimir Vitalevitch ; et al. | 2008-06-26 |
Radiation system and lithographic apparatus
App 20080142741 - Van Herpen; Maarten Marinus Johannes Wilhelmus ; et al. | 2008-06-19 |
Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method
App 20080142740 - Ivanov; Vladimir Vitalevitch ; et al. | 2008-06-19 |
Radiation system and lithographic apparatus
App 20080142736 - Wassink; Arnoud Cornelis ; et al. | 2008-06-19 |
Plasma radiation source for a lithographic apparatus
App 20080137050 - Ivanov; Vladimir Vitalevitch ; et al. | 2008-06-12 |
Ex-situ removal of deposition on an optical element
Grant 7,372,058 - Banine , et al. May 13, 2 | 2008-05-13 |
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby
Grant 7,372,623 - Banine , et al. May 13, 2 | 2008-05-13 |
Lithographic apparatus and device manufacturing method
Grant 7,361,911 - Moors , et al. April 22, 2 | 2008-04-22 |
Lithographic apparatus, and device manufacturing method
App 20080083885 - Wilhelmus Van Herpen; Maarten Marinus Johannes ; et al. | 2008-04-10 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
App 20080067453 - Ivanov; Vladimir Vitalevitch ; et al. | 2008-03-20 |
Getter and cleaning arrangement for a lithographic apparatus and method for cleaning a surface
App 20080011967 - Van Herpen; Maarten Marinus Johannes Wilhelmus ; et al. | 2008-01-17 |
Inspection method and apparatus using same
App 20070258086 - Bleeker; Arno Jan ; et al. | 2007-11-08 |
Anti-reflection coating for an EUV mask
App 20070259275 - Van Herpen; Maarten Marinus Johannes Wilhelmus ; et al. | 2007-11-08 |
Optical apparatus, lithographic apparatus and device manufacturing method
App 20070158579 - Moors; Johannes Hubertus Josephina ; et al. | 2007-07-12 |
Radiation source
App 20070152175 - Moors; Johannes Hubertus Josephina ; et al. | 2007-07-05 |
Method for cleaning a lithographic apparatus module, cleaning arrangement for a lithographic apparatus module and lithographic apparatus comprising the cleaning arrangement
App 20070145297 - Freriks; Johannes Maria ; et al. | 2007-06-28 |
Radical cleaning arrangement for a lithographic apparatus
App 20070145295 - Banine; Vadim Yevgenyevich ; et al. | 2007-06-28 |
Lithographic apparatus and device manufacturing method
App 20070146659 - Klunder; Derk Jan Wilfred ; et al. | 2007-06-28 |
Method for cleaning a lithographic apparatus module, cleaning arrangement for a lithographic apparatus module and lithographic apparatus comprising the cleaning arrangement
App 20070145296 - Freriks; Johannes Maria ; et al. | 2007-06-28 |
Lithographic apparatus, system and device manufacturing method
App 20070146660 - Lorenz Van Der Velden; Marc Hubertus ; et al. | 2007-06-28 |
Lithographic apparatus having a monitoring device for detecting contamination
App 20070138414 - Stevens; Lucas Henricus Johannes ; et al. | 2007-06-21 |
System and method for detecting at least one contamination species in a lithographic apparatus
App 20070140910 - Banine; Vadim Yevgenyevich ; et al. | 2007-06-21 |
Controlling the flow through the collector during cleaning
App 20070131878 - Banine; Vadim Yevgenyevich ; et al. | 2007-06-14 |
Lithographic projection apparatus, device manufacturing method and device manufactured thereby
App 20070085984 - Banine; Vadim Yevgenyevich ; et al. | 2007-04-19 |
Ex-situ removal of deposition on an optical element
App 20070069162 - Banine; Vadim Yevgenyevich ; et al. | 2007-03-29 |
Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby
App 20070069159 - Banine; Vadim Yevgenyevich ; et al. | 2007-03-29 |
Ex-situ removal of deposition on an optical element
App 20070069160 - Banine; Vadim Yevgenyevich ; et al. | 2007-03-29 |
Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatus
App 20070062557 - Rakhimova; Tatyana Victorovna ; et al. | 2007-03-22 |
Lithographic apparatus, contaminant trap, and device manufacturing method
App 20070023706 - Sjmaenok; Leonid Aizikovitch ; et al. | 2007-02-01 |
Lithographic apparatus, contaminant trap, and device manufacturing method
App 20070018118 - Sjmaenok; Leonid Aizikovitch ; et al. | 2007-01-25 |
Lithographic apparatus, radiation system and device manufacturing method
App 20070001126 - Gayazov; Robert Rafilevitch ; et al. | 2007-01-04 |
Lithographic apparatus and cleaning method therefor
App 20060289811 - Wilhelmus Van Herpen; Maarten Marinus Johannes ; et al. | 2006-12-28 |
Lithographic apparatus and cleaning method therefor
App 20060278833 - Wilhelmus Van Herpen; Maarten Marinus Johannes ; et al. | 2006-12-14 |
Lithographic device, device manufacturing method and device manufactured thereby
App 20060268246 - Jacobs; Johannes Henricus Wilhelmus ; et al. | 2006-11-30 |
Radiation system and lithographic apparatus
App 20060261290 - Wilhelmus Van Herpen; Maarten Marinus Johannes ; et al. | 2006-11-23 |
Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
App 20060245057 - Van Herpen; Maarten Marinus Johannes W. ; et al. | 2006-11-02 |
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
App 20060245058 - Van Herpen; Maarten Marinus Johannes Wilhelmus ; et al. | 2006-11-02 |
Lithographic apparatus and device manufacturing method
App 20060219950 - Bakker; Levinus Pieter ; et al. | 2006-10-05 |
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby
App 20060221440 - Banine; Vadim Yevgenyevich ; et al. | 2006-10-05 |
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby
App 20060175558 - Bakker; Levinus Pieter ; et al. | 2006-08-10 |
Apparatus Including A Radiation Source, A Filter System For Filtering Particles Out Of Radiation Emitted By The Source, And A Processing System For Processing The Radiation, A Lithographic Apparatus Including Such An Apparatus, And A Method Of Filtering Particles O
App 20060151717 - Klunder; Derk Jan Wilfred ; et al. | 2006-07-13 |
Lithographic apparatus, illumination system and method for mitigating debris particles
App 20060138350 - Banine; Vadim Yevgenyevich ; et al. | 2006-06-29 |
Lithographic apparatus and device manufacturing method
App 20060127811 - Josephina Moors; Johannes Hubertus ; et al. | 2006-06-15 |
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus
App 20060115771 - Wilhelmus Van Herpen; Maarten Marinus Johannes ; et al. | 2006-06-01 |
Lithographic apparatus and device manufacturing method
App 20060114441 - Banine; Vadim Yevgenyevich ; et al. | 2006-06-01 |
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus
App 20060072084 - Van Herpen; Maarten Marinus Johannes Wilhelmus ; et al. | 2006-04-06 |
Lithographic apparatus having a contaminant trapping system, a contamination trapping system, a device manufacturing method, and a method for improving trapping of contaminants in a lithographic apparatus
App 20060061740 - Bakker; Levinus Pieter ; et al. | 2006-03-23 |
| 