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Patent applications and USPTO patent grants for BANDARAPU; Bhaskar.The latest application filed is for "vapor delivery head for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structures".
Patent | Date |
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Vapor Delivery Head For Preventing Stiction Of High Aspect Ratio Structures And/or Repairing High Aspect Ratio Structures App 20210366738 - BANDARAPU; Bhaskar ;   et al. | 2021-11-25 |
Spin chuck with rotating gas showerhead Grant 10,167,552 - Gleissner , et al. J | 2019-01-01 |
Apparatus for treating surfaces of wafer-shaped articles Grant 9,911,630 - Gleissner , et al. March 6, 2 | 2018-03-06 |
Method and apparatus for processing wafer-shaped articles Grant 9,887,122 - Si , et al. February 6, 2 | 2018-02-06 |
Method And Apparatus For Processing Wafer-shaped Articles App 20170323823 - SI; Hongbo ;   et al. | 2017-11-09 |
Spin Chuck With Gas Leakage Prevention App 20170162426 - GLEISSNER; Andreas ;   et al. | 2017-06-08 |
Apparatus For Treating Surfaces Of Wafer-shaped Articles App 20170125266 - GLEISSNER; Andreas ;   et al. | 2017-05-04 |
Slit nozzle Grant 9,597,703 - Detterbeck , et al. March 21, 2 | 2017-03-21 |
Slit Nozzle App 20160236227 - DETTERBECK; Stefan ;   et al. | 2016-08-18 |
Spin Chuck With Rotating Gas Showerhead App 20160230278 - GLEISSNER; Andreas ;   et al. | 2016-08-11 |
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