Patent | Date |
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Vacuum treatment system and process for manufacturing workpieces App 20050023135 - Zueger, Othmar | 2005-02-03 |
DLC coating system and process and apparatus for making coating system Grant 6,740,393 - Massler , et al. May 25, 2 | 2004-05-25 |
Workpiece with wear-protective coating Grant 6,395,379 - Braendle May 28, 2 | 2002-05-28 |
Vacuum treatment equipment App 20020029854 - Schertler, Roman | 2002-03-14 |
Processes for vacuum treating workpieces, and corresponding process equipment App 20010051081 - Wagner, Rudolf ;   et al. | 2001-12-13 |
Use of a cleaning process, a cleaning process, a connection process and a workpiece pair App 20010001184 - Dommann, Alex ;   et al. | 2001-05-17 |
Method of manufacturing an object in a vacuum recipient Grant 6,176,979 - Signer , et al. January 23, 2 | 2001-01-23 |
High-reflection silver mirror Grant 6,128,126 - Hohenegger , et al. October 3, 2 | 2000-10-03 |
Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method Grant 6,096,231 - Schertler August 1, 2 | 2000-08-01 |
Method for monitoring the flow of a gas into a vacuum reactor Grant 6,074,691 - Schmitt , et al. June 13, 2 | 2000-06-13 |
Tool with tool body and protective layer system Grant 6,071,560 - Braendle , et al. June 6, 2 | 2000-06-06 |
Capacitively coupled RF-plasma reactor Grant 5,981,899 - Perrin , et al. November 9, 1 | 1999-11-09 |
Coated body, method for its manufacturing as well as its use Grant 5,897,942 - Karner , et al. April 27, 1 | 1999-04-27 |
Sputter source with a target arrangement and a holding device Grant 5,833,823 - Gruenenfelder , et al. November 10, 1 | 1998-11-10 |
Field emission device Grant 5,789,851 - Turlot , et al. August 4, 1 | 1998-08-04 |
Vacuum treatment system for homogeneous workpiece processing Grant 5,753,045 - Karner , et al. May 19, 1 | 1998-05-19 |
Sputter coating station Grant 5,753,089 - Haag May 19, 1 | 1998-05-19 |
High-reflection silver mirror Grant 5,751,474 - Hohenegger , et al. May 12, 1 | 1998-05-12 |
Optical biosensor matrix Grant 5,738,825 - Rudigier , et al. April 14, 1 | 1998-04-14 |
Process and apparatus for workpiece coating Grant 5,709,784 - Braendle , et al. January 20, 1 | 1998-01-20 |
Method for improving the rate of a plasma enhanced vacuum treatment Grant 5,693,238 - Schmitt , et al. December 2, 1 | 1997-12-02 |
Magnetron atomization source and method of use thereof Grant 5,688,381 - Gruenenfelder , et al. November 18, 1 | 1997-11-18 |
Diffraction gratings in optical waveguide components and production method thereof Grant 5,675,691 - Edlinger , et al. October 7, 1 | 1997-10-07 |
Vacuum apparatus for the surface treatment of workpieces Grant 5,655,277 - Galdos , et al. August 12, 1 | 1997-08-12 |
Vacuum valve Grant 5,651,528 - Frei , et al. July 29, 1 | 1997-07-29 |
optical device and method for coating an optical substrate Grant 5,648,147 - Bischof , et al. July 15, 1 | 1997-07-15 |
Process and apparatus for measuring charge quantity flowing in a vacuum Grant 5,644,220 - Urs , et al. July 1, 1 | 1997-07-01 |
Gas inlet arrangement Grant 5,622,606 - Kugler , et al. April 22, 1 | 1997-04-22 |
Process and apparatus for the production of a metal oxide layer Grant 5,618,575 - Peter April 8, 1 | 1997-04-08 |
Plasma CVD method for producing a diamond coating Grant 5,616,373 - Karner , et al. April 1, 1 | 1997-04-01 |
Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method Grant 5,590,994 - Schertler January 7, 1 | 1997-01-07 |
Vacuum treatment apparatus Grant 5,571,331 - Schertler , et al. November 5, 1 | 1996-11-05 |
Method of and apparatus for a direct voltage arc discharge enhanced reactive treatment of objects Grant 5,554,255 - Karner , et al. September 10, 1 | 1996-09-10 |
Coated tool and cutting process Grant 5,549,975 - Schulz , et al. August 27, 1 | 1996-08-27 |
High-reflection silver mirror Grant 5,548,440 - Hohenegger , et al. August 20, 1 | 1996-08-20 |
Plasma treatment apparatus and method for operating same Grant 5,515,986 - Turlot , et al. May 14, 1 | 1996-05-14 |
Coated transparent substrate Grant 5,473,468 - Rudigier , et al. December 5, 1 | 1995-12-05 |
Coated transparent substrate Grant 5,464,683 - Rudigier , et al. November 7, 1 | 1995-11-07 |
Etching or coating method and a plant therefor Grant 5,460,707 - Wellerdieck October 24, 1 | 1995-10-24 |
Hard coating; a workpiece coated by such hard coating and a method of coating such workpiece by such hard coating Grant 5,447,804 - Schulz , et al. September 5, 1 | 1995-09-05 |
Apparatus for reactive sputter coating at least one article Grant 5,423,970 - Kugler June 13, 1 | 1995-06-13 |
Method for a reactive surface treatment of a workpiece and a treatment chamber for practicing such method Grant 5,422,139 - Fischer June 6, 1 | 1995-06-06 |
Method and apparatus for regulating a degree of reaction in a coating process Grant 5,413,684 - Bergmann May 9, 1 | 1995-05-09 |
Optical layer for excimer laser Grant 5,408,489 - Kugler , et al. April 18, 1 | 1995-04-18 |
Plasma generating device Grant 5,399,253 - Grunenfelder March 21, 1 | 1995-03-21 |
Process and apparatus for generating and igniting a low-voltage Grant 5,384,018 - Ramm , et al. January 24, 1 | 1995-01-24 |
Vacuum treatment apparatus comprising annular treatment chamber Grant 5,370,737 - Mathis December 6, 1 | 1994-12-06 |
Process for filtering electrically charged particles and energy filter Grant 5,365,064 - Rettinghaus November 15, 1 | 1994-11-15 |
Method of plasma treating a surface of a workpiece, vacuum treatment apparatus and previously plasma treated plastic article Grant 5,348,632 - Jost September 20, 1 | 1994-09-20 |
Cathode arrangement Grant 5,343,112 - Wegmann , et al. August 30, 1 | 1994-08-30 |
Method of and apparatus for a direct voltage arc discharge enhanced reactive treatment of objects Grant 5,336,326 - Karner , et al. August 9, 1 | 1994-08-09 |
Substrate holding and rotating arrangement for vacuum processes Grant 5,325,812 - Thiebaud , et al. July 5, 1 | 1994-07-05 |
Hard coating; a workpiece coated by such hard coating and a method of coating such workpiece by such hard coating Grant 5,310,607 - Schulz , et al. May 10, 1 | 1994-05-10 |
Method of removing material from a surface in a vacuum chamber Grant 5,308,950 - Ramm , et al. May 3, 1 | 1994-05-03 |
Protective coating on substrates Grant 5,298,290 - Jost , et al. March 29, 1 | 1994-03-29 |
Method for controlling evaporation for vapor deposition Grant 5,277,938 - Wegmann , et al. January 11, 1 | 1994-01-11 |
Method and apparatus for heating-up a substrate by means of a low voltage arc discharge and variable magnetic field Grant 5,250,779 - Kaufmann , et al. October 5, 1 | 1993-10-05 |
Tool or instrument with a wear-resistant hard coating for working or processing organic materials Grant 5,246,787 - Schulz , et al. September 21, 1 | 1993-09-21 |
Vacuum process apparatus Grant 5,245,736 - Schertler September 21, 1 | 1993-09-21 |
Method of an apparatus for a centering of an electron beam Grant 5,229,570 - Kaufmann , et al. July 20, 1 | 1993-07-20 |
Method for chemical coating on opposite surfaces of workpieces Grant 5,227,202 - Thiebaud , et al. July 13, 1 | 1993-07-13 |
Method for a doublesided coating of optical substrates Grant 5,211,759 - Zimmermann , et al. May 18, 1 | 1993-05-18 |
Coated highly wear-resistant tool and physical coating process therefor Grant 5,208,102 - Schulz , et al. May 4, 1 | 1993-05-04 |
Workpiece carrier with suction slot for a disk-shaped workpiece Grant 5,180,000 - Wagner , et al. * January 19, 1 | 1993-01-19 |
Electron beam generator and emission cathode Grant 5,159,234 - Wegmann , et al. October 27, 1 | 1992-10-27 |
Supporting and transport apparatus Grant 5,100,285 - Wagner March 31, 1 | 1992-03-31 |
Workpiece support for vacuum chamber Grant 5,090,900 - Rudolf , et al. February 25, 1 | 1992-02-25 |
Holding device for a disk and application therefor Grant 5,037,262 - Moll , et al. August 6, 1 | 1991-08-06 |
Workpiece carrier for a disk-shaped workpiece as well as a vacuum process space Grant 5,033,538 - Wagner , et al. July 23, 1 | 1991-07-23 |
Sputter-CVD process for at least partially coating a workpiece Grant 4,992,153 - Bergmann , et al. February 12, 1 | 1991-02-12 |
Composite material having a slide layer applied by cathode sputtering Grant 4,961,831 - Bergmann , et al. October 9, 1 | 1990-10-09 |
Crucible cover for coating installation with an electron beam source Grant 4,944,245 - Stoessl , et al. July 31, 1 | 1990-07-31 |
Method and apparatus for coating workpieces Grant 4,929,321 - Buhl May 29, 1 | 1990-05-29 |
Method and apparatus for vacuum vapor deposition Grant 4,919,968 - Buhl , et al. April 24, 1 | 1990-04-24 |
Process and apparatus for coating microcavities Grant 4,915,806 - Lardon , et al. April 10, 1 | 1990-04-10 |
Method and apparatus for the transmission heat to or from plate like object Grant 4,903,754 - Hirscher , et al. February 27, 1 | 1990-02-27 |
Composite material having a slide layer applied by cathode sputtering Grant 4,889,772 - Bergmann , et al. December 26, 1 | 1989-12-26 |
Device for transmission of electrical currents and rotating machine parts Grant 4,889,494 - Kunz December 26, 1 | 1989-12-26 |
Method and apparatus for application of coatings on substrates Grant 4,877,505 - Bergmann October 31, 1 | 1989-10-31 |
Thermochemical surface treatments of materials in a reactive gas plasma Grant 4,762,756 - Bergmann , et al. August 9, 1 | 1988-08-09 |
Decorative black wear protection coating Grant 4,758,280 - Bergmann , et al. July 19, 1 | 1988-07-19 |
Process for depositing layers on substrates in a vacuum chamber Grant 4,749,587 - Bergmann , et al. June 7, 1 | 1988-06-07 |
Vapor source for vacuum coating installation Grant 4,748,935 - Wegmann June 7, 1 | 1988-06-07 |
Tube having strain-hardened inside coating Grant 4,641,450 - Moll , et al. February 10, 1 | 1987-02-10 |
Method and apparatus for the reactive vapor deposition of layers of oxides, nitrides, oxynitrides and carbides on a substrate Grant 4,619,748 - Moll , et al. October 28, 1 | 1986-10-28 |
Effusion type evaporator cell for vacuum evaporators Grant 4,543,467 - Eisele , et al. September 24, 1 | 1985-09-24 |
Method and apparatus for detecting gas leaks Grant 4,487,058 - Mennenga December 11, 1 | 1984-12-11 |
Method and apparatus for rapidly regenerating a self-contained cryopump Grant 4,485,631 - Winkler December 4, 1 | 1984-12-04 |
Low pressure leak detector Grant 4,472,962 - Mennenga September 25, 1 | 1984-09-25 |
Electrochromic layer system Grant 4,449,790 - Thoni May 22, 1 | 1984-05-22 |
Method and apparatus for evaporating material under vacuum using both an arc discharge and electron beam Grant 4,448,802 - Buhl , et al. May 15, 1 | 1984-05-15 |
Cathode arrangement for sputtering material from a target in a cathode sputtering unit Grant 4,448,653 - Wegmann May 15, 1 | 1984-05-15 |
Method of coating the surface of an elastic body with a continuous layer Grant 4,388,164 - Moll , et al. June 14, 1 | 1983-06-14 |
Quartz oscillator measuring head Grant 4,362,125 - Schadler December 7, 1 | 1982-12-07 |
Method of depositing hard wear-resistant coatings on substrates Grant 4,346,123 - Kaufmann August 24, 1 | 1982-08-24 |
Method for producing gold color coatings Grant 4,333,962 - Pulker , et al. June 8, 1 | 1982-06-08 |
Method and apparatus for evaporating materials in a vacuum coating plant Grant 4,197,175 - Moll , et al. April 8, 1 | 1980-04-08 |