Balseanu; Mihaela A.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Balseanu; Mihaela A..The latest application filed is for "low temperature silicon nitride/silicon oxynitride stack film with tunable dielectric constant".
- Balseanu; Mihaela A. - Sunnyvale CA
- Balseanu; Mihaela A. - Santa Clara CA
| Patent | Date |
|---|---|
| Low-k Films App 20220307134 - Zhang; Shuaidi ; et al. | 2022-09-29 |
| Low Temperature Silicon Nitride/silicon Oxynitride Stack Film With Tunable Dielectric Constant App 20220310909 - Maldonado-Garcia; Maribel ; et al. | 2022-09-29 |
| Deposition of low-.kappa. films Grant 11,447,865 - Zhang , et al. September 20, 2 | 2022-09-20 |
| Sequential Plasma And Thermal Treatment App 20220262619 - Li; Ning ; et al. | 2022-08-18 |
| Plasma Induced Modification Of Silicon Carbide Surface App 20220205095 - Mungai; Francis Kanyiri ; et al. | 2022-06-30 |
| Deposition Of Low-k Films App 20220154337 - Zhang; Shuaidi ; et al. | 2022-05-19 |
| Susceptor Wafer Chucks For Bowed Wafers App 20220093443 - Chowdhury; Abhishek ; et al. | 2022-03-24 |
| Self-Aligned Double Patterning With Spatial Atomic Layer Deposition App 20220059362 - Li; Ning ; et al. | 2022-02-24 |
| Methods And Systems To Modulate Film Stress App 20220028660 - Tanaka; Tsutomu ; et al. | 2022-01-27 |
| Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates Grant 11,217,443 - Vats , et al. January 4, 2 | 2022-01-04 |
| Apparatus And Methods To Reduce Particles In A Film Deposition Chamber App 20210404058 - Maldonado-Garcia; Maribel ; et al. | 2021-12-30 |
| Confined Charge Trap Layer App 20210399011 - Kang; Chang Seok ; et al. | 2021-12-23 |
| Thin Layer Deposition With Plasma Pulsing App 20210388497 - Trinh; Cong ; et al. | 2021-12-16 |
| Method Of Forming Self-Aligned Via App 20210166973 - Parikh; Suketu Arun ; et al. | 2021-06-03 |
| Silyl Pseudohalides For Silicon Containing Films App 20210140046 - Woods; Keenan N. ; et al. | 2021-05-13 |
| Method and Apparatus for Selective Deposition of Dielectric Films App 20210043448 - Li; Ning ; et al. | 2021-02-11 |
| Multilayer Encapsulation Stacks By Atomic Layer Deposition App 20210032749 - Trinh; Cong ; et al. | 2021-02-04 |
| Sequential Deposition And High Frequency Plasma Treatment Of Deposited Film On Patterned And Un-patterned Substrates App 20200176241 - Vats; Vinayak Veer ; et al. | 2020-06-04 |
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