Balseanu; Mihaela

Patent Applications and Registrations

Patent applications and USPTO patent grants for Balseanu; Mihaela.The latest application filed is for "low-k films".

Company Profile

18.62.81

Balseanu; Mihaela - Sunnyvale CA
Balseanu; Mihaela - Cupertino CA
Balseanu; Mihaela - Ithaca NY

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Low-k films Grant 11,371,144 - Zhang , et al. June 28, 2	2022-06-28
Selective deposition of SiCON by plasma ALD Grant 11,359,281 - Zhang , et al. June 14, 2	2022-06-14
Method of forming self-aligned via Grant 11,270,914 - Parikh , et al. March 8, 2	2022-03-08
Low-k Films App 20210388499 - Zhang; Shuaidi ; et al.	2021-12-16
Self-aligned double patterning with spatial atomic layer deposition Grant 11,164,753 - Li , et al. November 2, 2	2021-11-02
Methods and systems to modulate film stress Grant 11,158,489 - Tanaka , et al. October 26, 2	2021-10-26
Seamless gapfill with dielectric ALD films Grant 11,133,178 - Balseanu , et al. September 28, 2	2021-09-28
Methods And Apparatus For Low Temperature Silicon Nitride Films App 20210265157 - Yan; Wenbo ; et al.	2021-08-26
Selective Deposition Of Sicon By Plama Ald App 20210230747 - Zhang; Shuaidi ; et al.	2021-07-29
Atomic layer deposition of films comprising silicon, carbon and nitrogen using halogenated silicon precursors Grant 11,028,478 - Nguyen , et al. June 8, 2	2021-06-08
Methods and apparatus for low temperature silicon nitride films Grant 11,017,997 - Yan , et al. May 25, 2	2021-05-25
Seamless Gapfill With Dielectric ALD Films App 20210090882 - Balseanu; Mihaela ; et al.	2021-03-25
Method and apparatus for deposition of low-k films Grant 10,957,532 - Li , et al. March 23, 2	2021-03-23
Method of forming self-aligned via Grant 10,923,396 - Parikh , et al. February 16, 2	2021-02-16
Methods And Apparatus For Deposition Of Low-K Films App 20200332415 - Bhuyan; Bhaskar Jyoti ; et al.	2020-10-22
Methods And Precursors For Selective Deposition Of Metal Films App 20200312653 - Fredrickson; Kurt ; et al.	2020-10-01
Cap Layer For Bit Line Resistance Reduction App 20200235104 - Panda; Priyadarshi ; et al.	2020-07-23
Method to fabricate thermally stable low K-FinFET spacer Grant 10,714,331 - Balseanu , et al.	2020-07-14
Method Of Forming Self-Aligned Via App 20200219768 - Parikh; Suketu Arun ; et al.	2020-07-09
Cap layer for bit line resistance reduction Grant 10,700,072 - Panda , et al.	2020-06-30
Method Of Forming Self-Aligned Via App 20200144117 - Parikh; Suketu Arun ; et al.	2020-05-07
Method of forming self-aligned via Grant 10,629,484 - Parikh , et al.	2020-04-21
Method And Apparatus For Deposition Of Low-K Films App 20200006064 - Li; Ning ; et al.	2020-01-02
Methods And Apparatus For Low Temperature Silicon Nitride Films App 20190348271 - Yan; Wenbo ; et al.	2019-11-14
Method and apparatus for deposition of low-k films Grant 10,453,678 - Li , et al. Oc	2019-10-22
Methods For Low Temperature ALD Of Metal Oxides App 20190309412 - Bhuyan; Bhaskar Jyoti ; et al.	2019-10-10
Method To Fabricate Thermally Stable Low K-finfet Spacer App 20190311896 - BALSEANU; Mihaela ; et al.	2019-10-10
Selective deposition of silicon nitride films for spacer applications Grant 10,319,583 - Li , et al.	2019-06-11
High temperature silicon oxide atomic layer deposition technology Grant 10,170,298 - Yan , et al. J	2019-01-01
Methods for depositing low K and low wet etch rate dielectric thin films Grant 10,147,599 - Li , et al. De	2018-12-04
Methods and apparatus for selective dry etch Grant 10,134,581 - Li , et al. November 20, 2	2018-11-20
Method And Apparatus For Deposition Of Low-K Films App 20180301333 - Li; Ning ; et al.	2018-10-18
Atomic Layer Deposition Of Films Comprising Silicon, Carbon And Nitrogen Using Halogenated Silicon Precursors App 20180291505 - Nguyen; Victor ; et al.	2018-10-11
Method And Apparatus For Selective Deposition Of Dielectric Films App 20180211833 - Li; Ning ; et al.	2018-07-26
Atomic layer deposition of films comprising silicon, carbon and nitrogen using halogenated silicon precursors Grant 10,023,958 - Nguyen , et al. July 17, 2	2018-07-17
PEALD of films comprising silicon nitride Grant 9,984,868 - Nguyen , et al. May 29, 2	2018-05-29
Methods And Systems To Modulate Film Stress App 20180130642 - Tanaka; Tsutomu ; et al.	2018-05-10
High Temperature Silicon Oxide Atomic Layer Deposition Technology App 20180076023 - Yan; Wenbo ; et al.	2018-03-15
Methods For Depositing Low K And Low Wet Etch Rate Dielectric Thin Films App 20180040470 - Li; Ning ; et al.	2018-02-08
High temperature silicon oxide atomic layer deposition technology Grant 9,875,888 - Yan , et al. January 23, 2	2018-01-23
Methods for depositing low k and low wet etch rate dielectric thin films Grant 9,799,511 - Li , et al. October 24, 2	2017-10-24
Methods And Apparatus For Selective Dry Etch App 20170263438 - Li; Ning ; et al.	2017-09-14
Selective Deposition Of Silicon Nitride Films For Spacer Applications App 20170263437 - Li; Ning ; et al.	2017-09-14
Pulsed nitride encapsulation Grant 9,748,093 - Reilly , et al. August 29, 2	2017-08-29
Cu/barrier interface enhancement Grant 9,633,861 - Ye , et al. April 25, 2	2017-04-25
High Temperature Thermal ALD Silicon Nitride Films App 20170053792 - Lu; Xinliang ; et al.	2017-02-23
Method of forming magnetic tunneling junctions Grant 9,564,582 - Pakala , et al. February 7, 2	2017-02-07
Methods For Depositing Low K And Low Wet Etch Rate Dielectric Thin Films App 20160322214 - Li; Ning ; et al.	2016-11-03
Pulsed Nitride Encapsulation App 20160284567 - Reilly; Patrick James ; et al.	2016-09-29
High Temperature Silicon Oxide Atomic Layer Deposition Technology App 20160099143 - Yan; Wenbo ; et al.	2016-04-07
Accurate film thickness control in gap-fill technology Grant 9,297,073 - Li , et al. March 29, 2	2016-03-29
Enhancing Uv Compatibility Of Low K Barrier Film App 20160013049 - YE; Weifeng ; et al.	2016-01-14
Accurate Film Thickness Control In Gap-fill Technology App 20150299856 - LI; Ning ; et al.	2015-10-22
In-situ Carbon And Oxide Doping Of Atomic Layer Deposition Silicon Nitride Films App 20150252477 - NGUYEN; Victor ; et al.	2015-09-10
Method Of Forming Magnetic Tunneling Junctions App 20150255507 - PAKALA; Mahendra ; et al.	2015-09-10
Seamless Gap-fill With Spatial Atomic Layer Deposition App 20150255324 - LI; Ning ; et al.	2015-09-10
Self-Aligned Double Patterning With Spatial Atomic Layer Deposition App 20150200110 - Li; Ning ; et al.	2015-07-16
Atomic Layer Deposition Of Films Comprising Silicon, Carbon And Nitrogen Using Halogenated Silicon Precursors App 20150147484 - Nguyen; Victor ; et al.	2015-05-28
Cu/barrier Interface Enhancement App 20140273438 - YE; Weifeng ; et al.	2014-09-18
Plasma Doping Of Silicon-Containing Films App 20140273524 - Nguyen; Victor ; et al.	2014-09-18
Vbd And Tddb Improvement Thru Interface Engineering App 20140273516 - XIA; Li-Qun ; et al.	2014-09-18
Post-Deposition Treatment Methods For Silicon Nitride App 20140273530 - Nguyen; Victor ; et al.	2014-09-18
PEALD of Films Comprising Silicon Nitride App 20140273529 - Nguyen; Victor ; et al.	2014-09-18
Copper oxide removal techniques Grant 8,758,638 - Ye , et al. June 24, 2	2014-06-24
Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cure Grant 8,753,989 - Balseanu , et al. June 17, 2	2014-06-17
Method And Apparatus For Low Temperature ALD Deposition App 20140023794 - Mahajani; Maitreyee ; et al.	2014-01-23
MODULATED COMPOSITIONAL AND STRESS CONTROLLED MULTILAYER ULTRATHIN CONFORMAL SiNx DIELECTRICS USED IN NANO DEVICE FABRICATION App 20130333923 - Balseanu; Mihaela ; et al.	2013-12-19
Plasma-enhanced chemical vapor deposition of crystalline germanium Grant 8,598,020 - Nguyen , et al. December 3, 2	2013-12-03
Low temperature plasma enhanced chemical vapor deposition of conformal silicon carbon nitride and silicon nitride films Grant 8,586,487 - Nguyen , et al. November 19, 2	2013-11-19
Boron film interface engineering Grant 8,563,090 - Balseanu , et al. October 22, 2	2013-10-22
Multilayered low k cap with conformal gap fill and UV stable compressive stress properties Grant 8,536,069 - Balseanu , et al. September 17, 2	2013-09-17
Method of forming flash memory with ultraviolet treatment Grant 8,501,568 - Balseanu , et al. August 6, 2	2013-08-06
Engineering Dielectric Films For Cmp Stop App 20130189841 - Balseanu; Mihaela ; et al.	2013-07-25
Multilayered low k cap with conformal gap fill and UV stable compressive stress properties Grant 8,492,880 - Balseanu , et al. July 23, 2	2013-07-23
Low Temperature Plasma Enhanced Chemical Vapor Deposition Of Conformal Silicon Carbon Nitride And Silicon Nitride Films App 20130183835 - Nguyen; Victor ; et al.	2013-07-18
MULTILAYERED LOW k CAP WITH CONFORMAL GAP FILL AND UV STABLE COMPRESSIVE STRESS PROPERTIES App 20130005146 - Balseanu; Mihaela ; et al.	2013-01-03
Method for depositing boron-rich films for lithographic mask applications Grant 8,337,950 - Nguyen , et al. December 25, 2	2012-12-25
Copper Oxide Removal Techniques App 20120289049 - YE; WEIFENG ; et al.	2012-11-15
MULTILAYERED LOW k CAP WITH CONFORMAL GAP FILL AND UV STABLE COMPRESSIVE STRESS PROPERTIES App 20120248617 - Balseanu; Mihaela ; et al.	2012-10-04
Method of forming a non-volatile memory having a silicon nitride charge trap layer Grant 8,252,653 - Balseanu , et al. August 28, 2	2012-08-28
Method To Increase Silicon Nitride Tensile Stress Using Nitrogen Plasma In-situ Treatment And Ex-situ Uv Cure App 20120196450 - Balseanu; Mihaela ; et al.	2012-08-02
Method To Increase Tensile Stress Of Silicon Nitride Films Using A Post Pecvd Deposition Uv Cure App 20120196452 - Balseanu; Mihaela ; et al.	2012-08-02
Boron nitride and boron-nitride derived materials deposition method Grant 8,148,269 - Balseanu , et al. April 3, 2	2012-04-03
Method to increase silicon nitride tensile stress using nitrogen plasma in-situ treatment and ex-situ UV cure Grant 8,138,104 - Balseanu , et al. March 20, 2	2012-03-20
Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cure Grant 8,129,290 - Balseanu , et al. March 6, 2	2012-03-06
Plasma-enhanced Chemical Vapor Deposition Of Crystalline Germanium App 20110315992 - Nguyen; Victor T. ; et al.	2011-12-29
Method of depositing boron nitride and boron nitride-derived materials Grant 8,084,105 - Huh , et al. December 27, 2	2011-12-27
Methods And Apparatus Of Creating Airgap In Dielectric Layers For The Reduction Of Rc Delay App 20110104891 - AL-BAYATI; AMIR ; et al.	2011-05-05
Method to improve the step coverage and pattern loading for dielectric films Grant 7,923,386 - Balseanu , et al. April 12, 2	2011-04-12
Gapfill improvement with low etch rate dielectric liners Grant 7,910,491 - Soo Kwon , et al. March 22, 2	2011-03-22
Methods and apparatus of creating airgap in dielectric layers for the reduction of RC delay Grant 7,879,683 - Al-Bayati , et al. February 1, 2	2011-02-01
Methods and systems for forming at least one dielectric layer Grant 7,871,926 - Xia , et al. January 18, 2	2011-01-18
Method of forming non-volatile memory having charge trap layer with compositional gradient Grant 7,816,205 - Balseanu , et al. October 19, 2	2010-10-19
Engineering Boron-rich Films For Lithographic Mask Applications App 20100233633 - Nguyen; Victor ; et al.	2010-09-16
Method to increase the compressive stress of PECVD dielectric films Grant 7,790,635 - Balseanu , et al. September 7, 2	2010-09-07
Method to improve the step coverage and pattern loading for dielectric films Grant 7,780,865 - Balseanu , et al. August 24, 2	2010-08-24
Method to increase the compressive stress of PECVD silicon nitride films Grant 7,732,342 - Balseanu , et al. June 8, 2	2010-06-08
Boron derived materials deposition method Grant 7,704,816 - Huh , et al. April 27, 2	2010-04-27
Flash Memory With Treated Charge Trap Layer App 20100099247 - Balseanu; Mihaela ; et al.	2010-04-22
Gapfill Improvement With Low Etch Rate Dielectric Liners App 20100099236 - Kwon; Young Soo ; et al.	2010-04-22
Non-volatile Memory Having Charge Trap Layer With Compositional Gradient App 20100096688 - Balseanu; Mihaela ; et al.	2010-04-22
Non-volatile Memory Having Silicon Nitride Charge Trap Layer App 20100096687 - BALSEANU; Mihaela ; et al.	2010-04-22
Boron Film Interface Engineering App 20100098884 - BALSEANU; MIHAELA ; et al.	2010-04-22
Method To Improve The Step Coverage And Pattern Loading For Dielectric Films App 20100048030 - BALSEANU; MIHAELA ; et al.	2010-02-25
Method For Critical Dimension Shrink Using Conformal Pecvd Films App 20090286402 - Xia; Li-Qun ; et al.	2009-11-19
Method for monolithically integrating silicon carbide microelectromechanical devices with electronic circuitry Grant 7,615,788 - Kornegay , et al. November 10, 2	2009-11-10
Boron Nitride And Boron-nitride Derived Materials Deposition Method App 20090263972 - Balseanu; Mihaela ; et al.	2009-10-22
Method to improve the step coverage and pattern loading for dielectric films Grant 7,601,651 - Balseanu , et al. October 13, 2	2009-10-13
Integration process for fabricating stressed transistor structure Grant 7,566,655 - Balseanu , et al. July 28, 2	2009-07-28
Methods and Systems for Forming at Least One Dielectric Layer App 20090104764 - Xia; Li-Qun ; et al.	2009-04-23
Method For Forming An Air Gap In Multilevel Interconnect Structure App 20090093100 - Xia; Li-Qun ; et al.	2009-04-09
Methods And Apparatus Of Creating Airgap In Dielectric Layers For The Reduction Of Rc Delay App 20090093112 - AL-BAYATI; AMIR ; et al.	2009-04-09
Boron Derived Materials Deposition Method App 20090017640 - Huh; Jeong-Uk ; et al.	2009-01-15
Boron Nitride And Boron Nitride-derived Materials Deposition Method App 20080292798 - Huh; Jeong-Uk ; et al.	2008-11-27
Method To Increase The Compressive Stress Of Pecvd Dielectric Films App 20080146007 - Balseanu; Mihaela ; et al.	2008-06-19
Method for monolithically integrating silicon carbide microelectromechanical devices with electronic circuitry App 20080093605 - Kornegay; Kevin ; et al.	2008-04-24
Method To Increase Silicon Nitride Tensile Stress Using Nitrogen Plasma In-situ Treatment And Ex-situ Uv Cure App 20080020591 - Balseanu; Mihaela ; et al.	2008-01-24
Method To Improve The Step Coverage And Pattern Loading For Dielectric Films App 20070232082 - Balseanu; Mihaela ; et al.	2007-10-04
Method To Improve The Step Coverage And Pattern Loading For Dielectric Films App 20070232071 - Balseanu; Mihaela ; et al.	2007-10-04
Low-k spacer integration into CMOS transistors App 20070202640 - Al-Bayati; Amir ; et al.	2007-08-30
Method for monolithically integrating silicon carbide microelectromechanical devices with electronic circuitry Grant 7,170,141 - Kornegay , et al. January 30, 2	2007-01-30
Integration process for fabricating stressed transistor structure App 20060270217 - Balseanu; Mihaela ; et al.	2006-11-30
Method to increase the compressive stress of PECVD silicon nitride films App 20060269692 - Balseanu; Mihaela ; et al.	2006-11-30
Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cure App 20060269693 - Balseanu; Mihaela ; et al.	2006-11-30
Tensile and compressive stressed materials for semiconductors App 20060105106 - Balseanu; Mihaela ; et al.	2006-05-18
High-power dielectric seasoning for stable wafer-to-wafer thickness uniformity of dielectric CVD films App 20060093756 - Rajagopalan; Nagarajan ; et al.	2006-05-04
Method for monolithically integrating silicon carbide microelectromechanical devices with electronic circuitry App 20040077164 - Kornegay, Kevin ; et al.	2004-04-22

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