Ballance; David S.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ballance; David S..The latest application filed is for "sloped substrate support".

Company Profile

0.13.0

Ballance; David S. - Cupertino CA
Ballance; David S. - Midland MI

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Sloped substrate support Grant 6,395,363 - Ballance , et al. May 28, 2	2002-05-28
Method and apparatus for achieving temperature uniformity of a substrate Grant 6,123,766 - Williams , et al. September 26, 2	2000-09-26
Multi-zone gas flow control in a process chamber Grant 6,090,210 - Ballance , et al. July 18, 2	2000-07-18
Reflector cover for a semiconductor processing chamber Grant 6,035,100 - Bierman , et al. March 7, 2	2000-03-07
Method and apparatus for purging the back side of a substrate during chemical vapor processing Grant 5,960,555 - Deaton , et al. October 5, 1	1999-10-05
Method and apparatus for purging the back side of a substrate during chemical vapor processing Grant 5,884,412 - Tietz , et al. March 23, 1	1999-03-23
Semiconductor wafer support with graded thermal mass Grant 5,848,889 - Tietz , et al. December 15, 1	1998-12-15
Gas introduction showerhead for an RTP chamber with upper and lower transparent plates and gas flow therebetween Grant 5,781,693 - Ballance , et al. July 14, 1	1998-07-14
Low dielectric constant coatings Grant 5,523,163 - Ballance , et al. June 4, 1	1996-06-04
Method of forming Si-O containing coatings Grant 5,441,765 - Ballance , et al. August 15, 1	1995-08-15
Method of forming SI-O containing coatings Grant 5,320,868 - Ballance , et al. June 14, 1	1994-06-14
Vapor phase deposition of hydrogen silsesquioxane resin in the presence of nitrous oxide Grant 5,310,583 - Eckstein , et al. May 10, 1	1994-05-10
Process for coating a substrate with silica Grant 5,145,723 - Ballance , et al. September 8, 1	1992-09-08

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.