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Patent applications and USPTO patent grants for Balasubramanian; Lalita A..The latest application filed is for "systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions".
Patent | Date |
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Computer-implemented methods and systems for classifying defects on a specimen Grant 8,532,949 - Teh , et al. September 10, 2 | 2013-09-10 |
Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions Grant 8,126,255 - Bhaskar , et al. February 28, 2 | 2012-02-28 |
Systems And Methods For Creating Persistent Data For A Wafer And For Using Persistent Data For Inspection-related Functions App 20090080759 - Bhaskar; Kris ;   et al. | 2009-03-26 |
Computer-implemented methods and systems for classifying defects on a specimen App 20060082763 - Teh; Cho Huak ;   et al. | 2006-04-20 |
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