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Patent applications and USPTO patent grants for Balaraman; Karthikeyan.The latest application filed is for "modular microwave source with multiple metal housings".
Patent | Date |
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Seal apparatus for an electroplating system Grant 11,274,377 - Hanson , et al. March 15, 2 | 2022-03-15 |
Protective layers for processing chamber components Grant 11,239,058 - Balaraman , et al. February 1, 2 | 2022-02-01 |
Modular Microwave Source With Multiple Metal Housings App 20210391149 - Kraus; Philip Allan ;   et al. | 2021-12-16 |
Method For Fabricating Chamber Parts App 20200270747 - LARSSON; Mats ;   et al. | 2020-08-27 |
Protective Layers For Processing Chamber Components App 20200020511 - BALARAMAN; Karthikeyan ;   et al. | 2020-01-16 |
Protection Of Aluminum Process Chamber Components App 20200013589 - BALARAMAN; Karthikeyan ;   et al. | 2020-01-09 |
Seal Apparatus For An Electroplating System App 20190323141 - Hanson; Kyle M. ;   et al. | 2019-10-24 |
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