Balan; Aviv
Patent Applications and Registrations
Patent applications and USPTO patent grants for Balan; Aviv.The latest application filed is for "multi-stage, multi-zone substrate positioning systems".
- Balan; Aviv - Mountain View CA
| Patent | Date |
|---|---|
| Six degree of freedom workpiece stage Grant 11,209,373 - Balan December 28, 2 | 2021-12-28 |
| Slotted electrostatic chuck Grant 11,121,019 - Balan , et al. September 14, 2 | 2021-09-14 |
| Multi-Stage, Multi-Zone Substrate Positioning Systems App 20200402827 - Uziel; Yoram ; et al. | 2020-12-24 |
| Six Degree Of Freedom Workpiece Stage App 20200400588 - Balan; Aviv | 2020-12-24 |
| Slotted Electrostatic Chuck App 20190385882 - Balan; Aviv ; et al. | 2019-12-19 |
| Methods and systems for chucking a warped wafer Grant 10,468,288 - Balan , et al. No | 2019-11-05 |
| Floating wafer chuck Grant 10,083,852 - Balan , et al. September 25, 2 | 2018-09-25 |
| Methods and Systems for Chucking a Warped Wafer App 20180108559 - Balan; Aviv ; et al. | 2018-04-19 |
| Stage apparatus for semiconductor inspection and lithography systems Grant 9,529,280 - Balan December 27, 2 | 2016-12-27 |
| Stage Apparatus For Semiconductor Inspection And Lithography Systems App 20150160564 - Balan; Aviv | 2015-06-11 |
| Dual scanning stage Grant 8,924,014 - Balan December 30, 2 | 2014-12-30 |
| Active planar autofocus Grant 8,643,835 - Young , et al. February 4, 2 | 2014-02-04 |
| Dual Scanning Stage App 20130073082 - Balan; Aviv | 2013-03-21 |
| Dual scanning stage Grant 8,285,418 - Balan October 9, 2 | 2012-10-09 |
| Active Planar Autofocus App 20120008137 - Young; Scott A. ; et al. | 2012-01-12 |
| Non contact substrate chuck Grant 7,992,877 - Balan August 9, 2 | 2011-08-09 |
| Dual Scanning Stage App 20110022227 - Balan; Aviv | 2011-01-27 |
| Multiple Chuck Scanning Stage App 20090153824 - BALAN; AVIV | 2009-06-18 |
| Non Contact Substrate Chuck App 20090067114 - Balan; Aviv | 2009-03-12 |
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