Baklanov; Mikhail

Patent Applications and Registrations

Patent applications and USPTO patent grants for Baklanov; Mikhail.The latest application filed is for "method for pore sealing of porous materials using polyimide langmuir-blodgett film".

Company Profile

2.17.22

Baklanov; Mikhail - Veltem-Beisem BE
Baklanov; Mikhail - Herent BE
BAKLANOV; Mikhail - Leuven BE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for Pore Sealing of Porous Materials Using Polyimide Langmuir-Blodgett Film App 20190135998 - Luchinin; Victor ; et al.	2019-05-09
Method of etching porous film Grant 10,236,162 - Tahara , et al.	2019-03-19
Method for producing an integrated circuit including a metallization layer comprising low K dielectric material Grant 9,941,151 - Zhang , et al. April 10, 2	2018-04-10
Method Of Etching Porous Film App 20180082823 - TAHARA; Shigeru ; et al.	2018-03-22
Method of etching porous film Grant 9,859,102 - Tahara , et al. January 2, 2	2018-01-02
Method For Producing An Integrated Circuit Including A Metallization Layer Comprising Low K Dielectric Material App 20170301583 - Zhang; Liping ; et al.	2017-10-19
Plasma etching of porous substrates Grant 9,595,422 - Baklanov , et al. March 14, 2	2017-03-14
Method for Pore Sealing of Porous Materials Using Polyimide Langmuir-Blodgett Film App 20170021604 - Luchinin; Victor ; et al.	2017-01-26
Method for pore sealing of porous materials using polyimide langmuir-blodgett film Grant 9,492,841 - Luchinin , et al. November 15, 2	2016-11-15
Method Of Etching Porous Film App 20160307732 - TAHARA; Shigeru ; et al.	2016-10-20
Plasma Etching Of Porous Substrates App 20160276133 - Baklanov; Mikhail ; et al.	2016-09-22
Method and apparatus for microwave treatment of dielectric films Grant 9,414,445 - Ahmad , et al. August 9, 2	2016-08-09
Method for activating a porous layer surface Grant 9,117,666 - Le , et al. August 25, 2	2015-08-25
Method For Activating A Porous Layer Surface App 20150170910 - Le; Quoc Toan ; et al.	2015-06-18
Protection Of Porous Substrates Before Treatment App 20150076109 - Baklanov; Mikhail	2015-03-19
Fabrication of porogen residues free low-k materials with improved mechanical and chemical resistance Grant 8,974,870 - Baklanov , et al. March 10, 2	2015-03-10
Sealed porous materials, methods for making them, and semiconductor devices comprising them Grant 8,968,864 - Goethals , et al. March 3, 2	2015-03-03
Protection of porous substrates before treatment Grant 8,961,803 - Baklanov February 24, 2	2015-02-24
Method and apparatus for microwave treatment of dielectric films App 20140322921 - Ahmad; Iftikhar ; et al.	2014-10-30
Method For Etching Porous Organosilica Low-k Materials App 20140291289 - LAZZARINO; Frederic ; et al.	2014-10-02
Method for Pore Sealing of Porous Materials Using Polyimide Langmuir-Blodgett Film App 20130251978 - Luchinin; Victor ; et al.	2013-09-26
Protective treatment for porous materials Grant 8,540,890 - Baklanov , et al. September 24, 2	2013-09-24
Protective Treatment For Porous Materials App 20130119014 - Baklanov; Mikhail ; et al.	2013-05-16
Sealed Porous Materials, Methods For Making Them, And Semiconductor Devices Comprising Them App 20130075876 - Goethals; Frederik ; et al.	2013-03-28
Quantification of hydrophobic and hydrophilic properties of materials Grant 8,158,523 - Urbanowicz , et al. April 17, 2	2012-04-17
Fabrication Of Porogen Residues Free Low-k Materials With Improved Mechanical And Chemical Resistance App 20120052692 - Baklanov; Mikhail ; et al.	2012-03-01
Cleaning of plasma chamber walls using noble gas cleaning step Grant 7,964,039 - Urbanowicz , et al. June 21, 2	2011-06-21
Fabrication Of Porogen Residues Free And Mechanically Robust Low-k Materials App 20110006406 - Urbanowicz; Adam Michal ; et al.	2011-01-13
Quantification Of Hydrophobic And Hydrophilic Properties Of Materials App 20090068768 - Urbanowicz; Adam Michal ; et al.	2009-03-12
Cleaning Of Plasma Chamber Walls Using Noble Gas Cleaning Step App 20090065025 - Urbanowicz; Adam Michal ; et al.	2009-03-12
Method for determining solvent permeability of films Grant 7,458,251 - Baklanov , et al. December 2, 2	2008-12-02
Method for the quantification of hydrophilic properties of porous materials Grant 7,415,902 - Baklanov , et al. August 26, 2	2008-08-26
Method for determining solvent permeability of films App 20070148327 - Baklanov; Mikhail ; et al.	2007-06-28
Method for the quantification of hydrophilic properties of porous materials App 20060254374 - Baklanov; Mikhail ; et al.	2006-11-16
Method to produce a porous oxygen-silicon layer App 20030181066 - Baklanov, Mikhail ; et al.	2003-09-25
Method to produce a porous oxygen-silicon layer Grant 6,593,251 - Baklanov , et al. July 15, 2	2003-07-15
Method to produce a porous oxygen-silicon layer App 20020022378 - Baklanov, Mikhail ; et al.	2002-02-21

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