loadpatents
name:-0.22948098182678
name:-0.10290884971619
name:-0.00093197822570801
Bakker; Levinus Pieter Patent Filings

Bakker; Levinus Pieter

Patent Applications and Registrations

Patent applications and USPTO patent grants for Bakker; Levinus Pieter.The latest application filed is for "optical element, lithographic apparatus including such optical element and device manufacturing method, and device manufactured thereby".

Company Profile
0.82.105
  • Bakker; Levinus Pieter - Shanghai N/A CN
  • Bakker; Levinus Pieter - Eindhoven N/A NL
  • Bakker; Levinus Pieter - Helmond N/A NL
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Re-calibration of pre-recorded images during interventions using a needle device
Grant 9,980,698 - Bakker , et al. May 29, 2
2018-05-29
Device for imaging the interior of an optically turbid medium and receptacle unit for such a device
Grant 9,488,574 - Koehler , et al. November 8, 2
2016-11-08
Method and device for optical imaging of a turbid medium
Grant 9,398,877 - Van Der Mark , et al. July 26, 2
2016-07-26
Optical element and lithographic apparatus
Grant 9,097,993 - Bakker August 4, 2
2015-08-04
Detection apparatus and detection method
Grant 8,835,875 - She , et al. September 16, 2
2014-09-16
System and method for detecting at least one contamination species in a lithographic apparatus
Grant 8,445,873 - Banine , et al. May 21, 2
2013-05-21
Optical Element, Lithographic Apparatus Including Such Optical Element And Device Manufacturing Method, And Device Manufactured Thereby
App 20130115419 - BAKKER; Levinus Pieter
2013-05-09
Device and method for acquiring image data from a turbid medium
Grant 8,355,131 - Bakker , et al. January 15, 2
2013-01-15
Optical element, lithographic apparatus including such optical element and device manufacturing method, and device manufactured thereby
Grant 8,318,288 - Bakker November 27, 2
2012-11-27
Detection Apparatus And Detection Method
App 20120273697 - She; Jun ;   et al.
2012-11-01
System and Method for Detecting at Least One Contamination Species in a Lithographic Apparatus
App 20120241610 - BANINE; Vadim Yevgenyevich ;   et al.
2012-09-27
Illumination system and filter system
Grant 8,269,179 - Wassink , et al. September 18, 2
2012-09-18
System and method for detecting at least one contamination species in a lithographic apparatus
Grant 8,217,347 - Banine , et al. July 10, 2
2012-07-10
Illumination Apparatus
App 20120163022 - Bakker; Levinus Pieter ;   et al.
2012-06-28
Optical Element And Lithographic Apparatus
App 20120140197 - BAKKER; Levinus Pieter
2012-06-07
Method and device for removing particles generated by means of a radiation source during generation of short-wave radiation
Grant 8,173,975 - Jonkers , et al. May 8, 2
2012-05-08
Method And System For Monitoring Performance Of A Discharge Lamp And Corresponding Lamp
App 20120074848 - Zhu; Xiaoyan ;   et al.
2012-03-29
Optical element, lithographic apparatus, method for manufacturing and/or protecting an optical element, device manufacturing method and device manufactured thereby
Grant 8,137,869 - Bakker March 20, 2
2012-03-20
Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
Grant 8,139,200 - Van Herpen , et al. March 20, 2
2012-03-20
Re-calibration Of Pre-recorded Images During Interventions Using A Needle Device
App 20120059251 - Bakker; Levinus Pieter ;   et al.
2012-03-08
Radiation system with contamination barrier
Grant 8,129,702 - Bakker , et al. March 6, 2
2012-03-06
Device for detection of excitation using a multiple spot arrangement
Grant 8,119,995 - Klunder , et al. February 21, 2
2012-02-21
Lithographic apparatus with enhanced spectral purity, device manufacturing method and device manufactured thereby
Grant 8,102,511 - Bakker January 24, 2
2012-01-24
Spectral Purity Filter For Multi-layer Mirror, Lithographic Apparatus Including Such Multi-layer Mirror, Method For Enlarging The Ratio Of Desired Radiation And Undesired Radiation, And Device Manufacturing Method
App 20110134410 - VAN HERPEN; Maarten Marinus Johannes Wilhelmus ;   et al.
2011-06-09
Power Supply Apparatus
App 20110121665 - Liu; Chenyang ;   et al.
2011-05-26
System and Method for Detecting at Least One Contamination Species in a Lithographic Apparatus
App 20110121177 - BANINE; Vadim Yevgenyevich ;   et al.
2011-05-26
System and method for detecting at least one contamination species in a lithographic apparatus
Grant 7,897,110 - Banine , et al. March 1, 2
2011-03-01
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 7,868,304 - Bakker , et al. January 11, 2
2011-01-11
Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method
Grant 7,852,460 - Bakker , et al. December 14, 2
2010-12-14
Method For Assessing Measurement Quality And Device For Imaging The Interior Of Media
App 20100272331 - Brendel; Bernhard Johannes ;   et al.
2010-10-28
Method And Device For Imaging An Interior Of An Optically Turbid Medium
App 20100258741 - Bakker; Levinus Pieter ;   et al.
2010-10-14
Method Of Controlling A Device For Imaging The Interior Of Turbid Media, Device For Imaging The Interior Of Turbid Media And Computer Program Product
App 20100262018 - Bakker; Levinus Pieter ;   et al.
2010-10-14
Device For Imaging The Interior Of An Optically Turbid Medium And Receptacle Unit For Such A Device
App 20100238441 - Koehler; Thomas ;   et al.
2010-09-23
Imaging Device
App 20100238311 - Kolesnychenko; Aleksey ;   et al.
2010-09-23
Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method
Grant 7,800,079 - Banine , et al. September 21, 2
2010-09-21
Filter window manufacturing method
Grant 7,776,390 - Kurt , et al. August 17, 2
2010-08-17
Radiation System With Contamination Barrier
App 20100200772 - BAKKER; Levinus Pieter ;   et al.
2010-08-12
Method and device for imaging an interior of a turbid medium using an amplification factor selected from an estimate of expected electrical signal strength
Grant 7,750,331 - Bakker , et al. July 6, 2
2010-07-06
Spectral Purity Filter For Multi-layer Mirror, Lithographic Apparatus Including Such Multi-layer Mirror, Method For Enlarging The Ratio Of Desired Radiation And Undesired Radiation, And Device Manufacturing Method
App 20100149512 - VAN HERPEN; Maarten Marinus Johannes Wilhelmus ;   et al.
2010-06-17
Contamination barrier with expandable lamellas
Grant 7,737,425 - Bakker , et al. June 15, 2
2010-06-15
Method and apparatus for generating radically and/or azimuthally polarized light beams
Grant 7,715,100 - Stallinga , et al. May 11, 2
2010-05-11
Lithographic apparatus and device manufacturing method
Grant 7,714,306 - Moors , et al. May 11, 2
2010-05-11
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
Grant 7,706,057 - Van Herpen , et al. April 27, 2
2010-04-27
Spectroscopy Measurements
App 20100096551 - Rensen; Wouter Harry Jacinth ;   et al.
2010-04-22
Lithographic apparatus, device manufacturing method, and optical component
Grant 7,701,554 - Bakker April 20, 2
2010-04-20
Method for filtering particles out of a beam of radiation and filter for a lithographic apparatus
Grant 7,692,169 - Bakker , et al. April 6, 2
2010-04-06
Ambient Light Reduction For Optical Tomography
App 20100067011 - Bakker; Levinus Pieter
2010-03-18
Optical analysis system using multivariate optical elements
Grant 7,671,973 - Van Beek , et al. March 2, 2
2010-03-02
Device And Method For Acquiring Image Data From A Turbid Medium
App 20100027018 - Bakker; Levinus Pieter ;   et al.
2010-02-04
System, Method, Computer-readable Medium And Use For Imaging Of Tissue In An Anatomical Structure
App 20100030067 - Van Beek; Michael Cornelis ;   et al.
2010-02-04
Diffuse Optical Tomography With Markers Containing Fluorescent Material
App 20100030084 - Ziegler; Andy ;   et al.
2010-02-04
System for copy protection of an information carrier
Grant 7,646,869 - Kurt , et al. January 12, 2
2010-01-12
Device for generating an array of light spots
Grant 7,639,422 - Bakker December 29, 2
2009-12-29
Measurement With Multiplexed Detection
App 20090306519 - Bakker; Levinus Pieter
2009-12-10
Device manufacturing method, lithographic apparatus and device manufactured thereby
Grant 7,630,060 - Ottens , et al. December 8, 2
2009-12-08
Setup For Storing Data In A Holographic Storage Medium And Phase Plate
App 20090284814 - Schuurmans; Frank Jeroen Pieter ;   et al.
2009-11-19
Mirror for use in a lithographic apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 7,592,610 - Bakker , et al. September 22, 2
2009-09-22
Device For Imaging An Interior Of A Turbid Medium
App 20090231587 - Bakker; Levinus Pieter ;   et al.
2009-09-17
Method and Device for Removing Particles Generated by Means of a Radiation Source During Generation of Short-Wave Radiation
App 20090206279 - Jonkers; Jeroen ;   et al.
2009-08-20
Illumination system and filter system
App 20090115980 - Wassink; Arnoud Cornelis ;   et al.
2009-05-07
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 7,508,487 - Mulkens , et al. March 24, 2
2009-03-24
Lithographic apparatus with enhanced spectral purity, device manufacturing method and device manufactured thereby
App 20090046267 - Bakker; Levinus Pieter
2009-02-19
Device For Imaging An Interior Of A Turbid Medium
App 20090046291 - Van Der Mark; Martinus Bernadus ;   et al.
2009-02-19
Method And Apparatus For Generating Radially And/or Azimuthally Polarized Light Beams
App 20090040610 - Stallinga; Sjoerd ;   et al.
2009-02-12
Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system
Grant 7,485,881 - Wassink , et al. February 3, 2
2009-02-03
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
App 20080316595 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al.
2008-12-25
Lithographic apparatus and device manufacturing method
Grant 7,468,521 - Klunder , et al. December 23, 2
2008-12-23
Method of, System for, and Medical Image Acquisition System for Imaging an Interior of a Turbid Medium Taking Into Account the Geometry of the Turbid Medium
App 20080309941 - Van Der Mark; Martinus Bernardus ;   et al.
2008-12-18
Method of, System For, and Medical Image Acquisition System For Imaging an Interior of a Turbid Medium Taking Into Account the Geometry of the Turbid Medium
App 20080309940 - Van Der Mark; Martinus Bernardus ;   et al.
2008-12-18
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
Grant 7,463,413 - Van Herpen , et al. December 9, 2
2008-12-09
Method and Device for Optical Imaging of a Turbid Medium
App 20080300472 - Van Der Mark; Martinus Bernardus ;   et al.
2008-12-04
Method and System for Adjusting the Pitch of Light Spots Used to Read an Information Carrier
App 20080298192 - Bakker; Levinus Pieter
2008-12-04
Method and Device for Imaging an Interior of a Turbid Medium
App 20080290256 - Bakker; Levinus Pieter ;   et al.
2008-11-27
Device for Imaging an Interior of a Turbid Medium
App 20080285823 - Bakker; Levinus Pieter ;   et al.
2008-11-20
Device For Imaging an Interior of a Turbid Medium
App 20080278727 - Van Beek; Michael Cornelis ;   et al.
2008-11-13
Device for Detection of Excitation Using a Multiple Spot Arrangement
App 20080265175 - Klunder; Derk Jan Wilfred ;   et al.
2008-10-30
Method and System With Focus Control for Scanning an Information Carrier
App 20080267022 - Bakker; Levinus Pieter
2008-10-30
Filter window manufacturing method
App 20080254211 - Kurt; Ralph ;   et al.
2008-10-16
Method and System for Scanning an Information Carrier Via One-Dimensional Scanning
App 20080212430 - Bakker; Levinus Pieter ;   et al.
2008-09-04
Device manufacturing method, lithographic apparatus and device manufactured thereby
App 20080212053 - Ottens; Joost Jeroen ;   et al.
2008-09-04
Method for providing an operable filter system for filtering particles out of a beam of radiation, filter system, apparatus and lithographic apparatus comprising the filter system
Grant 7,414,251 - Bakker August 19, 2
2008-08-19
Device For Generating an Array of Light Spots
App 20080180800 - Bakker; Levinus Pieter
2008-07-31
Lithographic apparatus with enhanced spectral purity, device manufacturing method and device manufactured thereby
Grant 7,405,804 - Bakker July 29, 2
2008-07-29
Optical analysis system
Grant 7,405,825 - Schuurmans , et al. July 29, 2
2008-07-29
Mirror, lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 7,382,436 - Bakker June 3, 2
2008-06-03
Information Carrier, System and Apparatus for Reading Such an Information Carrier
App 20080100892 - Hendriks; Robert Frans Maria ;   et al.
2008-05-01
Lithographic apparatus and device manufacturing method
Grant 7,352,434 - Streefkerk , et al. April 1, 2
2008-04-01
Lithographic apparatus and device manufacturing method
App 20080054189 - Moors; Johannes Hubertus Josephina ;   et al.
2008-03-06
Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
Grant 7,336,416 - Van Herpen , et al. February 26, 2
2008-02-26
Lithographic apparatus and device manufacturing method
Grant 7,315,346 - Van Beek , et al. January 1, 2
2008-01-01
Lithographic apparatus, device manufacturing method and radiation system
Grant 7,309,869 - Kurt , et al. December 18, 2
2007-12-18
Lithographic apparatus, radiation system, contaminant trap, device manufacturing method, and method for trapping contaminants in a contaminant trap
Grant 7,307,263 - Bakker , et al. December 11, 2
2007-12-11
Information Carrier, System for Reading Said Information Carrier, Method of Manufacturing Said Information Carrier
App 20070245363 - Bakker; Levinus Pieter ;   et al.
2007-10-18
Lithographic apparatus and device manufacturing method
Grant 7,279,690 - Bakker , et al. October 9, 2
2007-10-09
Contamination barrier with expandable lamellas
App 20070222956 - Bakker; Levinus Pieter ;   et al.
2007-09-27
Lithographic projection apparatus and reflector assembly for use therein
Grant 7,256,407 - Schuurmans , et al. August 14, 2
2007-08-14
Lcd projecting system having dichroic mirrors for polarization conversion
App 20070182932 - Bakker; Levinus Pieter ;   et al.
2007-08-09
Optical analysis system using multivariate optical elements
App 20070177240 - Van Beek; Michael Cornelis ;   et al.
2007-08-02
Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris
Grant 7,251,012 - Banine , et al. July 31, 2
2007-07-31
Contamination barrier with expandable lamellas
Grant 7,247,866 - Bakker , et al. July 24, 2
2007-07-24
Lithographic apparatus and device manufacturing method
App 20070146659 - Klunder; Derk Jan Wilfred ;   et al.
2007-06-28
Grazing incidence mirror, lithographic apparatus including a grazing incidence mirror, method for providing a grazing incidence mirror, method for enhancing EUV reflection of a grazing incidence mirror, device manufacturing method and device manufactured thereby
Grant 7,235,801 - Bakker June 26, 2
2007-06-26
System and method for detecting at least one contamination species in a lithographic apparatus
App 20070140910 - Banine; Vadim Yevgenyevich ;   et al.
2007-06-21
Lithographic projection apparatus and reflector assembly for use therein
Grant 7,233,009 - Schuurmans , et al. June 19, 2
2007-06-19
Method of producing a plurality of bodies
App 20070105253 - Hendriks; Robert Frans Maria ;   et al.
2007-05-10
Method for the protection of an optical element, lithographic apparatus, and device manufacturing method
Grant 7,211,810 - Bakker , et al. May 1, 2
2007-05-01
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby
Grant 7,196,343 - Van Herpen , et al. March 27, 2
2007-03-27
Lithographic apparatus, illumination system and method for mitigating debris particles
Grant 7,193,229 - Banine , et al. March 20, 2
2007-03-20
Method for filtering particles out of a beam of radiation and filter for a lithographic apparatus
App 20070023693 - Bakker; Levinus Pieter ;   et al.
2007-02-01
Lithographic apparatus having a contaminant trapping system, a contamination trapping system, a device manufacturing method, and a method for improving trapping of contaminants in a lithographic apparatus
Grant 7,161,653 - Bakker , et al. January 9, 2
2007-01-09
Lithographic apparatus, illumination system and debris trapping system
Grant 7,145,132 - Bakker , et al. December 5, 2
2006-12-05
Lithographic apparatus with debris suppression, and device manufacturing method
Grant 7,136,141 - Bakker November 14, 2
2006-11-14
Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method
App 20060250599 - Bakker; Levinus Pieter ;   et al.
2006-11-09
Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
App 20060245057 - Van Herpen; Maarten Marinus Johannes W. ;   et al.
2006-11-02
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
App 20060245058 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al.
2006-11-02
Lithographic apparatus and device manufacturing method
App 20060219950 - Bakker; Levinus Pieter ;   et al.
2006-10-05
Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system
Grant 7,116,394 - Bakker , et al. October 3, 2
2006-10-03
Lithographic apparatus, device manufacturing method and radiation system
Grant 7,105,837 - Kurt , et al. September 12, 2
2006-09-12
Apparatus including a radiation source, a filter system for filtering particles out of radiation emitted by the source, and a processing system for processing the radiation, a lithographic apparatus including such an apparatus, and a method of filtering particles out of radiation emitting and propag
Grant 7,106,832 - Klunder , et al. September 12, 2
2006-09-12
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby
App 20060175558 - Bakker; Levinus Pieter ;   et al.
2006-08-10
Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method
Grant 7,088,424 - Bakker , et al. August 8, 2
2006-08-08
Optical analysis system
App 20060158734 - Schuurmans; Frank Jeroen Pieter ;   et al.
2006-07-20
Apparatus Including A Radiation Source, A Filter System For Filtering Particles Out Of Radiation Emitted By The Source, And A Processing System For Processing The Radiation, A Lithographic Apparatus Including Such An Apparatus, And A Method Of Filtering Particles O
App 20060151717 - Klunder; Derk Jan Wilfred ;   et al.
2006-07-13
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby
App 20060145094 - Wilhelmus Van Herpen; Maarten Marinus Johannes ;   et al.
2006-07-06
Method for providing an operable filter system for filtering particles out of a beam of radiation, filter system, apparatus and lithographic apparatus comprising the filter system
App 20060138348 - Bakker; Levinus Pieter
2006-06-29
Method for the protection of an optical element, lithographic apparatus, and device manufacturing method
App 20060138354 - Bakker; Levinus Pieter ;   et al.
2006-06-29
Lithographic Apparatus, Illumination System And Debris Trapping System
App 20060138362 - Bakker; Levinus Pieter ;   et al.
2006-06-29
Lithographic apparatus, illumination system and method for mitigating debris particles
App 20060138350 - Banine; Vadim Yevgenyevich ;   et al.
2006-06-29
Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system
App 20060139604 - Wassink; Arnoud Cornelis ;   et al.
2006-06-29
Lithographic apparatus, device manufacturing method, and optical component
App 20060141367 - Bakker; Levinus Pieter
2006-06-29
Lithographic apparatus with contamination suppression, device manufacturing method, and device manufactured thereby
Grant 7,061,574 - Bakker , et al. June 13, 2
2006-06-13
Lithographic projection apparatus, particle barrier for use therein, integrated structure manufacturing method, and device manufactured thereby
Grant 7,057,190 - Bakker , et al. June 6, 2
2006-06-06
Lithographic apparatus and device manufacturing method
App 20060114441 - Banine; Vadim Yevgenyevich ;   et al.
2006-06-01
Optical element, lithographic apparatus comprising such optical element and device manufacturing method
Grant 7,034,923 - Bakker April 25, 2
2006-04-25
Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby
Grant 7,034,308 - Bakker , et al. April 25, 2
2006-04-25
Lithographic apparatus and device manufacturing method
Grant 7,030,963 - Banine , et al. April 18, 2
2006-04-18
Lithographic apparatus with enhanced spectral purity, device manufacturing method and device manufactured thereby
App 20060072090 - Bakker; Levinus Pieter
2006-04-06
Lithographic apparatus having a contaminant trapping system, a contamination trapping system, a device manufacturing method, and a method for improving trapping of contaminants in a lithographic apparatus
App 20060061740 - Bakker; Levinus Pieter ;   et al.
2006-03-23
Lithographic apparatus, radiation system, contaminant trap, device manufacturing method, and method for trapping contaminants in a contaminant trap
App 20060012761 - Bakker; Levinus Pieter ;   et al.
2006-01-19
Lithographic apparatus and device manufacturing method
Grant 6,987,275 - Bakker , et al. January 17, 2
2006-01-17
Lithographic projection apparatus and reflector assembly for use therein
App 20060006350 - Schuurmans; Frank Jeroen Pieter ;   et al.
2006-01-12
Grazing incidence mirror, lithographic apparatus including a grazing incidence mirror, method for providing a grazing incidence mirror, method for enhancing EUV reflection of a grazing incidence mirror, device manufacturing method and device manufactured thereby
App 20050279951 - Bakker, Levinus Pieter
2005-12-22
Lithographic apparatus, device manufacturing method and radiation system
App 20050253091 - Kurt, Ralph ;   et al.
2005-11-17
Lithographic apparatus and device manufacturing method
App 20050243297 - Banine, Vadim Yevgenyevich ;   et al.
2005-11-03
Lithographic apparatus and method of manufacturing a device
Grant 6,947,118 - Bakker September 20, 2
2005-09-20
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 6,930,760 - Van Elp , et al. August 16, 2
2005-08-16
Radiation detector assembly, lithographic apparatus, method of determining an amount of radiation, an intensity of the amount of radiation, or an amount of contamination of an optical element, device manufacturing method, and device manufactured thereby
App 20050173647 - Bakker, Levinus Pieter
2005-08-11
Optical element, lithographic apparatus comprising such optical element and device manufacturing method
App 20050157282 - Bakker, Levinus Pieter
2005-07-21
Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method
App 20050148210 - Bakker, Levinus Pieter ;   et al.
2005-07-07
Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris
App 20050140945 - Banine, Vadim Yevgenyevich ;   et al.
2005-06-30
Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method
App 20050133727 - Banine, Vadim Yevgenyevich ;   et al.
2005-06-23
Lithographic apparatus and method of manufacturing a device
App 20050134814 - Bakker, Levinus Pieter
2005-06-23
Lithographic projection apparatus with multiple suppression meshes
Grant 6,906,788 - Bakker , et al. June 14, 2
2005-06-14
Method of and apparatus for supplying a dynamic protective layer to a mirror
App 20050120953 - Banine, Vadim Yevgenyevich ;   et al.
2005-06-09
Lithographic apparatus with contamination suppression, device manufacturing method, and device manufactured thereby
App 20050122491 - Bakker, Levinus Pieter ;   et al.
2005-06-09
Optical element, lithographic apparatus including such optical element and device manufacturing method, and device manufactured thereby
App 20050122589 - Bakker, Levinus Pieter
2005-06-09
Mirror for use in a lithographic apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby
App 20050111080 - Bakker, Levinus Pieter ;   et al.
2005-05-26
Optical element, lithographic apparatus, method for manufacturing and/or protecting an optical element, device manufacturing method and device manufactured thereby
App 20050112510 - Bakker, Levinus Pieter
2005-05-26
Lithographic projection apparatus, particle barrier for use therein, integrated structure manufacturing method, and device manufactured thereby
App 20050098741 - Bakker, Levinus Pieter ;   et al.
2005-05-12
Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby
App 20050077483 - Bakker, Levinus Pieter ;   et al.
2005-04-14
Lithographic projection apparatus and reflector assembly for use therein
Grant 6,859,259 - Bakker , et al. February 22, 2
2005-02-22
Mirror, lithographic apparatus, device manufacturing method, and device manufactured thereby
App 20050024614 - Bakker, Levinus Pieter
2005-02-03
Lithographic apparatus and device manufacturing method
App 20050007569 - Streefkerk, Bob ;   et al.
2005-01-13
Lithographic projection apparatus and particle barrier for use therein
Grant 6,838,684 - Bakker , et al. January 4, 2
2005-01-04
Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system
App 20040218157 - Bakker, Levinus Pieter ;   et al.
2004-11-04
Contamination barrier with expandable lamellas
App 20040184014 - Bakker, Levinus Pieter ;   et al.
2004-09-23
Lithographic apparatus with debris suppression, and device manufacturing method
App 20040179182 - Bakker, Levinus Pieter
2004-09-16
Lithographic projection apparatus and device manufacturing method
Grant 6,791,665 - Kurt , et al. September 14, 2
2004-09-14
Lithographic apparatus and device manufacturing method
App 20040165160 - Van Beek, Michael Cornelis ;   et al.
2004-08-26
Lithographic apparatus, device manufacturing method, and device manufactured thereby
App 20040160583 - Hubertus Mulkens, Johannes Catharinus ;   et al.
2004-08-19
Lithographic projection apparatus with multiple suppression meshes
App 20040135985 - Bakker, Levinus Pieter ;   et al.
2004-07-15
Lithographic projection apparatus and device manufacturing method
App 20040130694 - Kurt, Ralph ;   et al.
2004-07-08
Lithographic projection apparatus and particle barrier for use therein
App 20040108465 - Bakker, Levinus Pieter ;   et al.
2004-06-10
Lithographic apparatus, device manufacturing method, and device manufactured thereby
App 20040109149 - Elp, Jan Van ;   et al.
2004-06-10
Lithographic projection apparatus and reflector assembly for use therein
App 20040109151 - Bakker, Levinus Pieter ;   et al.
2004-06-10
Lithographic projection apparatus and reflector assembly for use therein
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