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Re-calibration of pre-recorded images during interventions using a needle device Grant 9,980,698 - Bakker , et al. May 29, 2 | 2018-05-29 |
Device for imaging the interior of an optically turbid medium and receptacle unit for such a device Grant 9,488,574 - Koehler , et al. November 8, 2 | 2016-11-08 |
Method and device for optical imaging of a turbid medium Grant 9,398,877 - Van Der Mark , et al. July 26, 2 | 2016-07-26 |
Optical element and lithographic apparatus Grant 9,097,993 - Bakker August 4, 2 | 2015-08-04 |
Detection apparatus and detection method Grant 8,835,875 - She , et al. September 16, 2 | 2014-09-16 |
System and method for detecting at least one contamination species in a lithographic apparatus Grant 8,445,873 - Banine , et al. May 21, 2 | 2013-05-21 |
Optical Element, Lithographic Apparatus Including Such Optical Element And Device Manufacturing Method, And Device Manufactured Thereby App 20130115419 - BAKKER; Levinus Pieter | 2013-05-09 |
Device and method for acquiring image data from a turbid medium Grant 8,355,131 - Bakker , et al. January 15, 2 | 2013-01-15 |
Optical element, lithographic apparatus including such optical element and device manufacturing method, and device manufactured thereby Grant 8,318,288 - Bakker November 27, 2 | 2012-11-27 |
Detection Apparatus And Detection Method App 20120273697 - She; Jun ;   et al. | 2012-11-01 |
System and Method for Detecting at Least One Contamination Species in a Lithographic Apparatus App 20120241610 - BANINE; Vadim Yevgenyevich ;   et al. | 2012-09-27 |
Illumination system and filter system Grant 8,269,179 - Wassink , et al. September 18, 2 | 2012-09-18 |
System and method for detecting at least one contamination species in a lithographic apparatus Grant 8,217,347 - Banine , et al. July 10, 2 | 2012-07-10 |
Illumination Apparatus App 20120163022 - Bakker; Levinus Pieter ;   et al. | 2012-06-28 |
Optical Element And Lithographic Apparatus App 20120140197 - BAKKER; Levinus Pieter | 2012-06-07 |
Method and device for removing particles generated by means of a radiation source during generation of short-wave radiation Grant 8,173,975 - Jonkers , et al. May 8, 2 | 2012-05-08 |
Method And System For Monitoring Performance Of A Discharge Lamp And Corresponding Lamp App 20120074848 - Zhu; Xiaoyan ;   et al. | 2012-03-29 |
Optical element, lithographic apparatus, method for manufacturing and/or protecting an optical element, device manufacturing method and device manufactured thereby Grant 8,137,869 - Bakker March 20, 2 | 2012-03-20 |
Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method Grant 8,139,200 - Van Herpen , et al. March 20, 2 | 2012-03-20 |
Re-calibration Of Pre-recorded Images During Interventions Using A Needle Device App 20120059251 - Bakker; Levinus Pieter ;   et al. | 2012-03-08 |
Radiation system with contamination barrier Grant 8,129,702 - Bakker , et al. March 6, 2 | 2012-03-06 |
Device for detection of excitation using a multiple spot arrangement Grant 8,119,995 - Klunder , et al. February 21, 2 | 2012-02-21 |
Lithographic apparatus with enhanced spectral purity, device manufacturing method and device manufactured thereby Grant 8,102,511 - Bakker January 24, 2 | 2012-01-24 |
Spectral Purity Filter For Multi-layer Mirror, Lithographic Apparatus Including Such Multi-layer Mirror, Method For Enlarging The Ratio Of Desired Radiation And Undesired Radiation, And Device Manufacturing Method App 20110134410 - VAN HERPEN; Maarten Marinus Johannes Wilhelmus ;   et al. | 2011-06-09 |
Power Supply Apparatus App 20110121665 - Liu; Chenyang ;   et al. | 2011-05-26 |
System and Method for Detecting at Least One Contamination Species in a Lithographic Apparatus App 20110121177 - BANINE; Vadim Yevgenyevich ;   et al. | 2011-05-26 |
System and method for detecting at least one contamination species in a lithographic apparatus Grant 7,897,110 - Banine , et al. March 1, 2 | 2011-03-01 |
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,868,304 - Bakker , et al. January 11, 2 | 2011-01-11 |
Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method Grant 7,852,460 - Bakker , et al. December 14, 2 | 2010-12-14 |
Method For Assessing Measurement Quality And Device For Imaging The Interior Of Media App 20100272331 - Brendel; Bernhard Johannes ;   et al. | 2010-10-28 |
Method And Device For Imaging An Interior Of An Optically Turbid Medium App 20100258741 - Bakker; Levinus Pieter ;   et al. | 2010-10-14 |
Method Of Controlling A Device For Imaging The Interior Of Turbid Media, Device For Imaging The Interior Of Turbid Media And Computer Program Product App 20100262018 - Bakker; Levinus Pieter ;   et al. | 2010-10-14 |
Device For Imaging The Interior Of An Optically Turbid Medium And Receptacle Unit For Such A Device App 20100238441 - Koehler; Thomas ;   et al. | 2010-09-23 |
Imaging Device App 20100238311 - Kolesnychenko; Aleksey ;   et al. | 2010-09-23 |
Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method Grant 7,800,079 - Banine , et al. September 21, 2 | 2010-09-21 |
Filter window manufacturing method Grant 7,776,390 - Kurt , et al. August 17, 2 | 2010-08-17 |
Radiation System With Contamination Barrier App 20100200772 - BAKKER; Levinus Pieter ;   et al. | 2010-08-12 |
Method and device for imaging an interior of a turbid medium using an amplification factor selected from an estimate of expected electrical signal strength Grant 7,750,331 - Bakker , et al. July 6, 2 | 2010-07-06 |
Spectral Purity Filter For Multi-layer Mirror, Lithographic Apparatus Including Such Multi-layer Mirror, Method For Enlarging The Ratio Of Desired Radiation And Undesired Radiation, And Device Manufacturing Method App 20100149512 - VAN HERPEN; Maarten Marinus Johannes Wilhelmus ;   et al. | 2010-06-17 |
Contamination barrier with expandable lamellas Grant 7,737,425 - Bakker , et al. June 15, 2 | 2010-06-15 |
Method and apparatus for generating radically and/or azimuthally polarized light beams Grant 7,715,100 - Stallinga , et al. May 11, 2 | 2010-05-11 |
Lithographic apparatus and device manufacturing method Grant 7,714,306 - Moors , et al. May 11, 2 | 2010-05-11 |
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method Grant 7,706,057 - Van Herpen , et al. April 27, 2 | 2010-04-27 |
Spectroscopy Measurements App 20100096551 - Rensen; Wouter Harry Jacinth ;   et al. | 2010-04-22 |
Lithographic apparatus, device manufacturing method, and optical component Grant 7,701,554 - Bakker April 20, 2 | 2010-04-20 |
Method for filtering particles out of a beam of radiation and filter for a lithographic apparatus Grant 7,692,169 - Bakker , et al. April 6, 2 | 2010-04-06 |
Ambient Light Reduction For Optical Tomography App 20100067011 - Bakker; Levinus Pieter | 2010-03-18 |
Optical analysis system using multivariate optical elements Grant 7,671,973 - Van Beek , et al. March 2, 2 | 2010-03-02 |
Device And Method For Acquiring Image Data From A Turbid Medium App 20100027018 - Bakker; Levinus Pieter ;   et al. | 2010-02-04 |
System, Method, Computer-readable Medium And Use For Imaging Of Tissue In An Anatomical Structure App 20100030067 - Van Beek; Michael Cornelis ;   et al. | 2010-02-04 |
Diffuse Optical Tomography With Markers Containing Fluorescent Material App 20100030084 - Ziegler; Andy ;   et al. | 2010-02-04 |
System for copy protection of an information carrier Grant 7,646,869 - Kurt , et al. January 12, 2 | 2010-01-12 |
Device for generating an array of light spots Grant 7,639,422 - Bakker December 29, 2 | 2009-12-29 |
Measurement With Multiplexed Detection App 20090306519 - Bakker; Levinus Pieter | 2009-12-10 |
Device manufacturing method, lithographic apparatus and device manufactured thereby Grant 7,630,060 - Ottens , et al. December 8, 2 | 2009-12-08 |
Setup For Storing Data In A Holographic Storage Medium And Phase Plate App 20090284814 - Schuurmans; Frank Jeroen Pieter ;   et al. | 2009-11-19 |
Mirror for use in a lithographic apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,592,610 - Bakker , et al. September 22, 2 | 2009-09-22 |
Device For Imaging An Interior Of A Turbid Medium App 20090231587 - Bakker; Levinus Pieter ;   et al. | 2009-09-17 |
Method and Device for Removing Particles Generated by Means of a Radiation Source During Generation of Short-Wave Radiation App 20090206279 - Jonkers; Jeroen ;   et al. | 2009-08-20 |
Illumination system and filter system App 20090115980 - Wassink; Arnoud Cornelis ;   et al. | 2009-05-07 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,508,487 - Mulkens , et al. March 24, 2 | 2009-03-24 |
Lithographic apparatus with enhanced spectral purity, device manufacturing method and device manufactured thereby App 20090046267 - Bakker; Levinus Pieter | 2009-02-19 |
Device For Imaging An Interior Of A Turbid Medium App 20090046291 - Van Der Mark; Martinus Bernadus ;   et al. | 2009-02-19 |
Method And Apparatus For Generating Radially And/or Azimuthally Polarized Light Beams App 20090040610 - Stallinga; Sjoerd ;   et al. | 2009-02-12 |
Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system Grant 7,485,881 - Wassink , et al. February 3, 2 | 2009-02-03 |
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method App 20080316595 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2008-12-25 |
Lithographic apparatus and device manufacturing method Grant 7,468,521 - Klunder , et al. December 23, 2 | 2008-12-23 |
Method of, System for, and Medical Image Acquisition System for Imaging an Interior of a Turbid Medium Taking Into Account the Geometry of the Turbid Medium App 20080309941 - Van Der Mark; Martinus Bernardus ;   et al. | 2008-12-18 |
Method of, System For, and Medical Image Acquisition System For Imaging an Interior of a Turbid Medium Taking Into Account the Geometry of the Turbid Medium App 20080309940 - Van Der Mark; Martinus Bernardus ;   et al. | 2008-12-18 |
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method Grant 7,463,413 - Van Herpen , et al. December 9, 2 | 2008-12-09 |
Method and Device for Optical Imaging of a Turbid Medium App 20080300472 - Van Der Mark; Martinus Bernardus ;   et al. | 2008-12-04 |
Method and System for Adjusting the Pitch of Light Spots Used to Read an Information Carrier App 20080298192 - Bakker; Levinus Pieter | 2008-12-04 |
Method and Device for Imaging an Interior of a Turbid Medium App 20080290256 - Bakker; Levinus Pieter ;   et al. | 2008-11-27 |
Device for Imaging an Interior of a Turbid Medium App 20080285823 - Bakker; Levinus Pieter ;   et al. | 2008-11-20 |
Device For Imaging an Interior of a Turbid Medium App 20080278727 - Van Beek; Michael Cornelis ;   et al. | 2008-11-13 |
Device for Detection of Excitation Using a Multiple Spot Arrangement App 20080265175 - Klunder; Derk Jan Wilfred ;   et al. | 2008-10-30 |
Method and System With Focus Control for Scanning an Information Carrier App 20080267022 - Bakker; Levinus Pieter | 2008-10-30 |
Filter window manufacturing method App 20080254211 - Kurt; Ralph ;   et al. | 2008-10-16 |
Method and System for Scanning an Information Carrier Via One-Dimensional Scanning App 20080212430 - Bakker; Levinus Pieter ;   et al. | 2008-09-04 |
Device manufacturing method, lithographic apparatus and device manufactured thereby App 20080212053 - Ottens; Joost Jeroen ;   et al. | 2008-09-04 |
Method for providing an operable filter system for filtering particles out of a beam of radiation, filter system, apparatus and lithographic apparatus comprising the filter system Grant 7,414,251 - Bakker August 19, 2 | 2008-08-19 |
Device For Generating an Array of Light Spots App 20080180800 - Bakker; Levinus Pieter | 2008-07-31 |
Lithographic apparatus with enhanced spectral purity, device manufacturing method and device manufactured thereby Grant 7,405,804 - Bakker July 29, 2 | 2008-07-29 |
Optical analysis system Grant 7,405,825 - Schuurmans , et al. July 29, 2 | 2008-07-29 |
Mirror, lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,382,436 - Bakker June 3, 2 | 2008-06-03 |
Information Carrier, System and Apparatus for Reading Such an Information Carrier App 20080100892 - Hendriks; Robert Frans Maria ;   et al. | 2008-05-01 |
Lithographic apparatus and device manufacturing method Grant 7,352,434 - Streefkerk , et al. April 1, 2 | 2008-04-01 |
Lithographic apparatus and device manufacturing method App 20080054189 - Moors; Johannes Hubertus Josephina ;   et al. | 2008-03-06 |
Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method Grant 7,336,416 - Van Herpen , et al. February 26, 2 | 2008-02-26 |
Lithographic apparatus and device manufacturing method Grant 7,315,346 - Van Beek , et al. January 1, 2 | 2008-01-01 |
Lithographic apparatus, device manufacturing method and radiation system Grant 7,309,869 - Kurt , et al. December 18, 2 | 2007-12-18 |
Lithographic apparatus, radiation system, contaminant trap, device manufacturing method, and method for trapping contaminants in a contaminant trap Grant 7,307,263 - Bakker , et al. December 11, 2 | 2007-12-11 |
Information Carrier, System for Reading Said Information Carrier, Method of Manufacturing Said Information Carrier App 20070245363 - Bakker; Levinus Pieter ;   et al. | 2007-10-18 |
Lithographic apparatus and device manufacturing method Grant 7,279,690 - Bakker , et al. October 9, 2 | 2007-10-09 |
Contamination barrier with expandable lamellas App 20070222956 - Bakker; Levinus Pieter ;   et al. | 2007-09-27 |
Lithographic projection apparatus and reflector assembly for use therein Grant 7,256,407 - Schuurmans , et al. August 14, 2 | 2007-08-14 |
Lcd projecting system having dichroic mirrors for polarization conversion App 20070182932 - Bakker; Levinus Pieter ;   et al. | 2007-08-09 |
Optical analysis system using multivariate optical elements App 20070177240 - Van Beek; Michael Cornelis ;   et al. | 2007-08-02 |
Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris Grant 7,251,012 - Banine , et al. July 31, 2 | 2007-07-31 |
Contamination barrier with expandable lamellas Grant 7,247,866 - Bakker , et al. July 24, 2 | 2007-07-24 |
Lithographic apparatus and device manufacturing method App 20070146659 - Klunder; Derk Jan Wilfred ;   et al. | 2007-06-28 |
Grazing incidence mirror, lithographic apparatus including a grazing incidence mirror, method for providing a grazing incidence mirror, method for enhancing EUV reflection of a grazing incidence mirror, device manufacturing method and device manufactured thereby Grant 7,235,801 - Bakker June 26, 2 | 2007-06-26 |
System and method for detecting at least one contamination species in a lithographic apparatus App 20070140910 - Banine; Vadim Yevgenyevich ;   et al. | 2007-06-21 |
Lithographic projection apparatus and reflector assembly for use therein Grant 7,233,009 - Schuurmans , et al. June 19, 2 | 2007-06-19 |
Method of producing a plurality of bodies App 20070105253 - Hendriks; Robert Frans Maria ;   et al. | 2007-05-10 |
Method for the protection of an optical element, lithographic apparatus, and device manufacturing method Grant 7,211,810 - Bakker , et al. May 1, 2 | 2007-05-01 |
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby Grant 7,196,343 - Van Herpen , et al. March 27, 2 | 2007-03-27 |
Lithographic apparatus, illumination system and method for mitigating debris particles Grant 7,193,229 - Banine , et al. March 20, 2 | 2007-03-20 |
Method for filtering particles out of a beam of radiation and filter for a lithographic apparatus App 20070023693 - Bakker; Levinus Pieter ;   et al. | 2007-02-01 |
Lithographic apparatus having a contaminant trapping system, a contamination trapping system, a device manufacturing method, and a method for improving trapping of contaminants in a lithographic apparatus Grant 7,161,653 - Bakker , et al. January 9, 2 | 2007-01-09 |
Lithographic apparatus, illumination system and debris trapping system Grant 7,145,132 - Bakker , et al. December 5, 2 | 2006-12-05 |
Lithographic apparatus with debris suppression, and device manufacturing method Grant 7,136,141 - Bakker November 14, 2 | 2006-11-14 |
Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method App 20060250599 - Bakker; Levinus Pieter ;   et al. | 2006-11-09 |
Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method App 20060245057 - Van Herpen; Maarten Marinus Johannes W. ;   et al. | 2006-11-02 |
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method App 20060245058 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2006-11-02 |
Lithographic apparatus and device manufacturing method App 20060219950 - Bakker; Levinus Pieter ;   et al. | 2006-10-05 |
Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system Grant 7,116,394 - Bakker , et al. October 3, 2 | 2006-10-03 |
Lithographic apparatus, device manufacturing method and radiation system Grant 7,105,837 - Kurt , et al. September 12, 2 | 2006-09-12 |
Apparatus including a radiation source, a filter system for filtering particles out of radiation emitted by the source, and a processing system for processing the radiation, a lithographic apparatus including such an apparatus, and a method of filtering particles out of radiation emitting and propag Grant 7,106,832 - Klunder , et al. September 12, 2 | 2006-09-12 |
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby App 20060175558 - Bakker; Levinus Pieter ;   et al. | 2006-08-10 |
Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method Grant 7,088,424 - Bakker , et al. August 8, 2 | 2006-08-08 |
Optical analysis system App 20060158734 - Schuurmans; Frank Jeroen Pieter ;   et al. | 2006-07-20 |
Apparatus Including A Radiation Source, A Filter System For Filtering Particles Out Of Radiation Emitted By The Source, And A Processing System For Processing The Radiation, A Lithographic Apparatus Including Such An Apparatus, And A Method Of Filtering Particles O App 20060151717 - Klunder; Derk Jan Wilfred ;   et al. | 2006-07-13 |
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby App 20060145094 - Wilhelmus Van Herpen; Maarten Marinus Johannes ;   et al. | 2006-07-06 |
Method for providing an operable filter system for filtering particles out of a beam of radiation, filter system, apparatus and lithographic apparatus comprising the filter system App 20060138348 - Bakker; Levinus Pieter | 2006-06-29 |
Method for the protection of an optical element, lithographic apparatus, and device manufacturing method App 20060138354 - Bakker; Levinus Pieter ;   et al. | 2006-06-29 |
Lithographic Apparatus, Illumination System And Debris Trapping System App 20060138362 - Bakker; Levinus Pieter ;   et al. | 2006-06-29 |
Lithographic apparatus, illumination system and method for mitigating debris particles App 20060138350 - Banine; Vadim Yevgenyevich ;   et al. | 2006-06-29 |
Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system App 20060139604 - Wassink; Arnoud Cornelis ;   et al. | 2006-06-29 |
Lithographic apparatus, device manufacturing method, and optical component App 20060141367 - Bakker; Levinus Pieter | 2006-06-29 |
Lithographic apparatus with contamination suppression, device manufacturing method, and device manufactured thereby Grant 7,061,574 - Bakker , et al. June 13, 2 | 2006-06-13 |
Lithographic projection apparatus, particle barrier for use therein, integrated structure manufacturing method, and device manufactured thereby Grant 7,057,190 - Bakker , et al. June 6, 2 | 2006-06-06 |
Lithographic apparatus and device manufacturing method App 20060114441 - Banine; Vadim Yevgenyevich ;   et al. | 2006-06-01 |
Optical element, lithographic apparatus comprising such optical element and device manufacturing method Grant 7,034,923 - Bakker April 25, 2 | 2006-04-25 |
Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,034,308 - Bakker , et al. April 25, 2 | 2006-04-25 |
Lithographic apparatus and device manufacturing method Grant 7,030,963 - Banine , et al. April 18, 2 | 2006-04-18 |
Lithographic apparatus with enhanced spectral purity, device manufacturing method and device manufactured thereby App 20060072090 - Bakker; Levinus Pieter | 2006-04-06 |
Lithographic apparatus having a contaminant trapping system, a contamination trapping system, a device manufacturing method, and a method for improving trapping of contaminants in a lithographic apparatus App 20060061740 - Bakker; Levinus Pieter ;   et al. | 2006-03-23 |
Lithographic apparatus, radiation system, contaminant trap, device manufacturing method, and method for trapping contaminants in a contaminant trap App 20060012761 - Bakker; Levinus Pieter ;   et al. | 2006-01-19 |
Lithographic apparatus and device manufacturing method Grant 6,987,275 - Bakker , et al. January 17, 2 | 2006-01-17 |
Lithographic projection apparatus and reflector assembly for use therein App 20060006350 - Schuurmans; Frank Jeroen Pieter ;   et al. | 2006-01-12 |
Grazing incidence mirror, lithographic apparatus including a grazing incidence mirror, method for providing a grazing incidence mirror, method for enhancing EUV reflection of a grazing incidence mirror, device manufacturing method and device manufactured thereby App 20050279951 - Bakker, Levinus Pieter | 2005-12-22 |
Lithographic apparatus, device manufacturing method and radiation system App 20050253091 - Kurt, Ralph ;   et al. | 2005-11-17 |
Lithographic apparatus and device manufacturing method App 20050243297 - Banine, Vadim Yevgenyevich ;   et al. | 2005-11-03 |
Lithographic apparatus and method of manufacturing a device Grant 6,947,118 - Bakker September 20, 2 | 2005-09-20 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,930,760 - Van Elp , et al. August 16, 2 | 2005-08-16 |
Radiation detector assembly, lithographic apparatus, method of determining an amount of radiation, an intensity of the amount of radiation, or an amount of contamination of an optical element, device manufacturing method, and device manufactured thereby App 20050173647 - Bakker, Levinus Pieter | 2005-08-11 |
Optical element, lithographic apparatus comprising such optical element and device manufacturing method App 20050157282 - Bakker, Levinus Pieter | 2005-07-21 |
Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method App 20050148210 - Bakker, Levinus Pieter ;   et al. | 2005-07-07 |
Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris App 20050140945 - Banine, Vadim Yevgenyevich ;   et al. | 2005-06-30 |
Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method App 20050133727 - Banine, Vadim Yevgenyevich ;   et al. | 2005-06-23 |
Lithographic apparatus and method of manufacturing a device App 20050134814 - Bakker, Levinus Pieter | 2005-06-23 |
Lithographic projection apparatus with multiple suppression meshes Grant 6,906,788 - Bakker , et al. June 14, 2 | 2005-06-14 |
Method of and apparatus for supplying a dynamic protective layer to a mirror App 20050120953 - Banine, Vadim Yevgenyevich ;   et al. | 2005-06-09 |
Lithographic apparatus with contamination suppression, device manufacturing method, and device manufactured thereby App 20050122491 - Bakker, Levinus Pieter ;   et al. | 2005-06-09 |
Optical element, lithographic apparatus including such optical element and device manufacturing method, and device manufactured thereby App 20050122589 - Bakker, Levinus Pieter | 2005-06-09 |
Mirror for use in a lithographic apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby App 20050111080 - Bakker, Levinus Pieter ;   et al. | 2005-05-26 |
Optical element, lithographic apparatus, method for manufacturing and/or protecting an optical element, device manufacturing method and device manufactured thereby App 20050112510 - Bakker, Levinus Pieter | 2005-05-26 |
Lithographic projection apparatus, particle barrier for use therein, integrated structure manufacturing method, and device manufactured thereby App 20050098741 - Bakker, Levinus Pieter ;   et al. | 2005-05-12 |
Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby App 20050077483 - Bakker, Levinus Pieter ;   et al. | 2005-04-14 |
Lithographic projection apparatus and reflector assembly for use therein Grant 6,859,259 - Bakker , et al. February 22, 2 | 2005-02-22 |
Mirror, lithographic apparatus, device manufacturing method, and device manufactured thereby App 20050024614 - Bakker, Levinus Pieter | 2005-02-03 |
Lithographic apparatus and device manufacturing method App 20050007569 - Streefkerk, Bob ;   et al. | 2005-01-13 |
Lithographic projection apparatus and particle barrier for use therein Grant 6,838,684 - Bakker , et al. January 4, 2 | 2005-01-04 |
Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system App 20040218157 - Bakker, Levinus Pieter ;   et al. | 2004-11-04 |
Contamination barrier with expandable lamellas App 20040184014 - Bakker, Levinus Pieter ;   et al. | 2004-09-23 |
Lithographic apparatus with debris suppression, and device manufacturing method App 20040179182 - Bakker, Levinus Pieter | 2004-09-16 |
Lithographic projection apparatus and device manufacturing method Grant 6,791,665 - Kurt , et al. September 14, 2 | 2004-09-14 |
Lithographic apparatus and device manufacturing method App 20040165160 - Van Beek, Michael Cornelis ;   et al. | 2004-08-26 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20040160583 - Hubertus Mulkens, Johannes Catharinus ;   et al. | 2004-08-19 |
Lithographic projection apparatus with multiple suppression meshes App 20040135985 - Bakker, Levinus Pieter ;   et al. | 2004-07-15 |
Lithographic projection apparatus and device manufacturing method App 20040130694 - Kurt, Ralph ;   et al. | 2004-07-08 |
Lithographic projection apparatus and particle barrier for use therein App 20040108465 - Bakker, Levinus Pieter ;   et al. | 2004-06-10 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20040109149 - Elp, Jan Van ;   et al. | 2004-06-10 |
Lithographic projection apparatus and reflector assembly for use therein App 20040109151 - Bakker, Levinus Pieter ;   et al. | 2004-06-10 |
Lithographic projection apparatus and reflector assembly for use therein App 20040094724 - Schuurmans, Frank Jeroen Pieter ;   et al. | 2004-05-20 |
Lithographic apparatus and device manufacturing method App 20040013226 - Bakker, Levinus Pieter ;   et al. | 2004-01-22 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,678,037 - Van Elp , et al. January 13, 2 | 2004-01-13 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20020097385 - Van Elp, Jan ;   et al. | 2002-07-25 |