| Patent | Date |
|---|
Process-metrology reproducibility bands for lithographic photomasks
Grant 10,210,292 - Bailey , et al. Feb | 2019-02-19 |
Process-metrology Reproducibility Bands For Lithographic Photomasks
App 20180101630 - Bailey; Todd C. ; et al. | 2018-04-12 |
Process-metrology reproducibility bands for lithographic photomasks
Grant 9,928,316 - Bailey , et al. March 27, 2 | 2018-03-27 |
Process-metrology Reproducibility Bands For Lithographic Photomasks
App 20160283617 - Bailey; Todd C. ; et al. | 2016-09-29 |
Method of automatic fluid dispensing for imprint lithography processes
Grant 9,223,202 - Choi , et al. December 29, 2 | 2015-12-29 |
Alignment method for semiconductor processing
Grant 8,514,374 - Bailey , et al. August 20, 2 | 2013-08-20 |
Pattern recognition with edge correction for design based metrology
Grant 8,495,527 - Bailey , et al. July 23, 2 | 2013-07-23 |
Pattern recognition with edge correction for design based metrology
Grant 8,429,570 - Bailey , et al. April 23, 2 | 2013-04-23 |
Method of enhancing photoresist adhesion to rare earth oxides
Grant 8,415,212 - Schaeffer , et al. April 9, 2 | 2013-04-09 |
System and method for semiconductor device fabrication using modeling
Grant 8,359,562 - Sarma , et al. January 22, 2 | 2013-01-22 |
Stray light feedback for dose control in semiconductor lithography systems
Grant 8,330,937 - Marokkey , et al. December 11, 2 | 2012-12-11 |
System and Method for Semiconductor Device Fabrication Using Modeling
App 20120179282 - Sarma; Chandrasekhar ; et al. | 2012-07-12 |
Pattern Recognition with Edge Correction for Design Based Metrology
App 20120110522 - Bailey; Todd C. ; et al. | 2012-05-03 |
Pattern Recognition With Edge Correction For Design Based Metrology
App 20120110523 - Bailey; Todd C. ; et al. | 2012-05-03 |
Device for holding a template for use in imprint lithography
Grant 8,033,814 - Bailey , et al. October 11, 2 | 2011-10-11 |
Method of Enhancing Photoresist Adhesion to Rare Earth Oxides
App 20110223756 - Schaeffer; James K. ; et al. | 2011-09-15 |
Mask forming and implanting methods using implant stopping layer
Grant 7,998,871 - Babich , et al. August 16, 2 | 2011-08-16 |
Alignment Method For Semiconductor Processing
App 20110102760 - Bailey; Todd C. ; et al. | 2011-05-05 |
Variable fill and cheese for mitigation of BEOL topography
Grant 7,926,006 - Bailey , et al. April 12, 2 | 2011-04-12 |
Device for holding a template for use in imprint lithography
Grant 7,708,542 - Bailey , et al. May 4, 2 | 2010-05-04 |
Mask forming and implanting methods using implant stopping layer and mask so formed
Grant 7,651,947 - Babich , et al. January 26, 2 | 2010-01-26 |
Stray Light Feedback for Dose Control in Semiconductor Lithography Systems
App 20090284726 - Marokkey; Sajan ; et al. | 2009-11-19 |
Stray light feedback for dose control in semiconductor lithography systems
Grant 7,583,362 - Marokkey , et al. September 1, 2 | 2009-09-01 |
Imprint Lithography Templates Having Alignment Marks
App 20090214689 - Bailey; Todd C. ; et al. | 2009-08-27 |
Ribs for line collapse prevention in damascene structures
Grant 7,514,356 - Marokkey , et al. April 7, 2 | 2009-04-07 |
Mask Forming And Implanting Methods Using Implant Stopping Layer
App 20090004869 - Babich; Katherina ; et al. | 2009-01-01 |
Mask Having Implant Stopping Layer
App 20080286545 - Babich; Katherina ; et al. | 2008-11-20 |
Variable Fill And Cheese For Mitigation Of Beol Topography
App 20080203589 - Bailey; Todd C. ; et al. | 2008-08-28 |
Imprint lithography system to produce light to impinge upon and polymerize a liquid in superimposition with template overlay marks
Grant 7,303,383 - Sreenivasan , et al. December 4, 2 | 2007-12-04 |
Bottom Anti-reflective Coating
App 20070275330 - Bailey; Todd C. ; et al. | 2007-11-29 |
Mask Forming And Implanting Methods Using Implant Stopping Layer And Mask So Formed
App 20070275563 - Babich; Katherina ; et al. | 2007-11-29 |
Imprint Lithography System To Produce Light To Impinge Upon And Polymerize A Liquid In Superimposition With Template Overlay Marks
App 20070264588 - Sreenivasan; Sidlgata V. ; et al. | 2007-11-15 |
Imprint lithography template having a feature size under 250 nm
Grant 7,229,273 - Bailey , et al. June 12, 2 | 2007-06-12 |
Method of determining alignment of a template and a substrate having a liquid disposed therebetween
Grant 7,186,483 - Sreenivasan , et al. March 6, 2 | 2007-03-06 |
Ribs for line collapse prevention in damascene structures
App 20060199369 - Marokkey; Sajan ; et al. | 2006-09-07 |
Method for performing chemical shrink process over BARC (bottom anti-reflective coating)
Grant 7,083,898 - Bailey , et al. August 1, 2 | 2006-08-01 |
System And Method For Wireless Ip Address Capacity Optimization
App 20060153118 - Bailey; Todd C. | 2006-07-13 |
Release layer comprising diamond-like carbon (DLC) or doped DLC with tunable composition for imprint lithography templates and contact masks
App 20060145398 - Bailey; Todd C. ; et al. | 2006-07-06 |
Stray light feedback for dose control in semiconductor lithography systems
App 20060110666 - Marokkey; Sajan ; et al. | 2006-05-25 |
Imprint lithography templates having alignment marks
App 20050064344 - Bailey, Todd C. ; et al. | 2005-03-24 |
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