Patent | Date |
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Process for forming a fine pattern using a top-coating composition for a photoresist and product formed by same Grant 7,329,477 - Jung , et al. February 12, 2 | 2008-02-12 |
Additive for photoresist composition for resist flow process Grant 7,150,961 - Jung , et al. December 19, 2 | 2006-12-19 |
Top-coating composition for photoresist and process for forming fine pattern using the same Grant 6,984,482 - Jung , et al. January 10, 2 | 2006-01-10 |
Organic anti-reflective polymer and preparation thereof Grant 6,956,091 - Hong , et al. October 18, 2 | 2005-10-18 |
Method of improving the uniformity of a patterned resist on a photomask App 20050221019 - Baik, Ki-Ho ;   et al. | 2005-10-06 |
Process for forming a fine pattern using a top-coating composition for a photoresist and product formed by same App 20050069816 - Jung, Jae Chang ;   et al. | 2005-03-31 |
ArF photoresist copolymers Grant 6,866,984 - Jung , et al. March 15, 2 | 2005-03-15 |
Photoresist composition for resist flow process Grant 6,824,951 - Lee , et al. November 30, 2 | 2004-11-30 |
Cross-linker monomer comprising double bond and photoresist copolymer containing the same Grant 6,818,376 - Lee , et al. November 16, 2 | 2004-11-16 |
Partially crosslinked polymer for bilayer photoresist Grant 6,811,960 - Lee , et al. November 2, 2 | 2004-11-02 |
ArF photoresist copolymers Grant 6,808,859 - Jung , et al. October 26, 2 | 2004-10-26 |
Reflection-inhibiting resin used in process for forming photoresist pattern Grant 6,797,451 - Hong , et al. September 28, 2 | 2004-09-28 |
Additive for photoresist composition for resist flow process App 20040166437 - Jung, Min Ho ;   et al. | 2004-08-26 |
Organic polymer for anti-reflective coating layer and preparation thereof Grant 6,780,953 - Jung , et al. August 24, 2 | 2004-08-24 |
Additive for photoresist composition for resist flow process Grant 6,770,414 - Jung , et al. August 3, 2 | 2004-08-03 |
Photoresist polymer for top-surface imaging process by silylation and photoresist composition containing the same Grant 6,770,415 - Lee , et al. August 3, 2 | 2004-08-03 |
Organic polymer for organic anti-reflective coating layer and preparation thereof Grant 6,770,720 - Jung , et al. August 3, 2 | 2004-08-03 |
Over-coating composition for photoresist, and processes for forming photoresist patterns using the same Grant 6,764,806 - Jung , et al. July 20, 2 | 2004-07-20 |
Novel ArF photoresist copolymers App 20040131968 - Jung, Jae Chang ;   et al. | 2004-07-08 |
Photoresist monomers, polymers thereof and photoresist compositions using the same Grant 6,753,448 - Lee , et al. June 22, 2 | 2004-06-22 |
Process for forming a photoresist pattern comprising alkaline treatment Grant 6,699,644 - Lee , et al. March 2, 2 | 2004-03-02 |
Photoresist composition containing photo radical generator with photoacid generator Grant 6,692,891 - Jung , et al. February 17, 2 | 2004-02-17 |
Process for etching photomasks App 20040000535 - Mueller, Mark ;   et al. | 2004-01-01 |
Process for forming photoresist pattern by using gas phase amine treatment Grant 6,664,031 - Jung , et al. December 16, 2 | 2003-12-16 |
Partially crosslinked polymer for bilayer photoresist App 20030207205 - Lee, Geun Su ;   et al. | 2003-11-06 |
Organic anti-reflective polymer and preparation thereof App 20030208018 - Hong, Sung-eun ;   et al. | 2003-11-06 |
Polymer-containing photoresist, and process for manufacturing the same Grant 6,632,903 - Jung , et al. October 14, 2 | 2003-10-14 |
Photoresist composition for top-surface imaging processes by silylation Grant 6,630,281 - Koh , et al. October 7, 2 | 2003-10-07 |
Photoresist composition for resist flow process, and process for forming contact hole using the same Grant 6,627,379 - Kim , et al. September 30, 2 | 2003-09-30 |
Photoresist monomer comprising bisphenol derivatives and polymers thereof Grant 6,627,383 - Lee , et al. September 30, 2 | 2003-09-30 |
Copolymer resin, preparation thereof, and photoresist using the same Grant 6,608,158 - Jung , et al. August 19, 2 | 2003-08-19 |
Organic anti-reflective coating polymer, anti-reflective coating composition comprising the same and methods of preparation thereof Grant 6,602,650 - Hong , et al. August 5, 2 | 2003-08-05 |
Novel photoresist monomers, polymers thereof and photoresist compositions using the same App 20030144567 - Lee, Geun Su ;   et al. | 2003-07-31 |
Organic anti-reflective coating polymer, anti-reflective coating composition comprising the same and method of preparation thereof Grant 6,599,678 - Hong , et al. July 29, 2 | 2003-07-29 |
Partially crosslinked polymer for bilayer photoresist Grant 6,589,707 - Lee , et al. July 8, 2 | 2003-07-08 |
Organic polymer for anti-reflective coating layer and preparation thereof App 20030118736 - Jung, Min-Ho ;   et al. | 2003-06-26 |
Top-coating composition for photoresist and process for forming fine pattern using the same App 20030108815 - Jung, Jae Chang ;   et al. | 2003-06-12 |
Organic polymer for organic anti-reflective coating layer and preparation thereof App 20030100695 - Jung, Jae-chang ;   et al. | 2003-05-29 |
Reflection-inhibiting resinn used in process for forming photoresist pattern App 20030018150 - Hong, Sung Eun ;   et al. | 2003-01-23 |
Organic anti-reflective coating polymer, anti-reflective coating composition comprising the same and methods of preparation thereof App 20030003397 - Hong, Sung-eun ;   et al. | 2003-01-02 |
Anti reflective coating polymers and the preparation method thereof Grant 6,492,441 - Hong , et al. December 10, 2 | 2002-12-10 |
Organic anti-reflective coating polymer and preparation thereof Grant 6,489,432 - Jung , et al. December 3, 2 | 2002-12-03 |
Cross-linking monomers for photoresist, and process for preparing photoresist polymers using the same App 20020177069 - Jung, Jae Chang ;   et al. | 2002-11-28 |
Organic anti-reflective coating polymer, anti-reflective coating composition methods of preparation thereof Grant 6,486,283 - Hong , et al. November 26, 2 | 2002-11-26 |
Cross-linker monomer comprising double bond and photoresist copolymer containing the same App 20020160301 - Lee, Geun Su ;   et al. | 2002-10-31 |
Novel photoresist monomer, polymer thereof and photoresist composition containing it App 20020151666 - Jung, Min Ho ;   et al. | 2002-10-17 |
Organic anti-reflective polymer and method for manufacturing therof App 20020136834 - Jung, Min-Ho ;   et al. | 2002-09-26 |
Organic anti-reflective polymer and method for manufacturing thereof App 20020137826 - Jung, Min-ho ;   et al. | 2002-09-26 |
Photoresist monomers having stability to post exposure delay, polymers thereof and photoresist compositions containing the same Grant 6,455,225 - Kong , et al. September 24, 2 | 2002-09-24 |
Organic anti-reflective coating material and its preparation App 20020132183 - Jung, Min-Ho ;   et al. | 2002-09-19 |
Organic anti-reflective coating polymer, anti-reflective coating composition comprising the same and method of preparation thereof App 20020127789 - Hong, Sung-Eun ;   et al. | 2002-09-12 |
Photoresist monomer, polymer thereof and photoresist composition containing it Grant 6,448,352 - Jung , et al. September 10, 2 | 2002-09-10 |
Organic anti-reflective coating polymer, anti-reflective coating composition methods of preparation thereof App 20020123586 - Hong, Sung-Eun ;   et al. | 2002-09-05 |
Anti reflective coating polymers and the preparation method thereof App 20020120070 - Hong, Sung-Eun ;   et al. | 2002-08-29 |
Photoresist monomer, polymer thereof and photoresist composition containing it Grant 6,426,171 - Jung , et al. July 30, 2 | 2002-07-30 |
Organic anti-reflective coating polymer, anti-reflective coating composition and methods of preparation thereof App 20020093069 - Hong, Sung-Eun ;   et al. | 2002-07-18 |
Organic anti-reflective coating polymer, anti-reflective coating composition and methods of preparation thereof App 20020090452 - Hong, Sung-Eun ;   et al. | 2002-07-11 |
Novel photoresist monomer having hydroxy group and carboxy group, copolymer thereof and photoresist composition using the same App 20020091216 - Lee, Geun Su ;   et al. | 2002-07-11 |
Photoresist monomer having hydroxy group and carboxy group, copolymer thereof and photoresist composition using the same Grant 6,410,670 - Lee , et al. June 25, 2 | 2002-06-25 |
Copolymer resin, preparation thereof, and photoresist using the same App 20020068803 - Jung, Min Ho ;   et al. | 2002-06-06 |
Photoresist composition containing photo base generator with photo acid generator Grant 6,395,451 - Jung , et al. May 28, 2 | 2002-05-28 |
Photoresist polymer for top-surface imaging process by silylation and photoresist composition containing the same App 20020061461 - Lee, Geun Su ;   et al. | 2002-05-23 |
Polymers and photoresist compositions using the same Grant 6,391,518 - Jung , et al. May 21, 2 | 2002-05-21 |
Photoresist monomer comprising bisphenol derivatives and polymers thereof App 20020051940 - Lee, Geun Su ;   et al. | 2002-05-02 |
Photoresist composition for resist flow process App 20020048723 - Lee, Geun Su ;   et al. | 2002-04-25 |
Photoresist cross-linker and photoresist composition comprising the same Grant 6,368,773 - Jung , et al. April 9, 2 | 2002-04-09 |
Copolymer resin, preparation thereof, and photoresist using the same Grant 6,369,181 - Jung , et al. April 9, 2 | 2002-04-09 |
Photoresist composition for top-surface imaging processes by silylation App 20020031721 - Koh, Cha Won ;   et al. | 2002-03-14 |
Photoresist composition for resist flow process, and process for forming contact hole using the same App 20020028405 - Kim, Jin Soo ;   et al. | 2002-03-07 |
Partially crosslinked polymer for bilayer photoresist App 20020028406 - Lee, Geun Su ;   et al. | 2002-03-07 |
Additive for photoresist composition for resist flow process App 20020022197 - Jung, Min Ho ;   et al. | 2002-02-21 |
Novel photoresist cross-linker and photoresist composition comprising the same App 20020019560 - Kong, Keun Kyu ;   et al. | 2002-02-14 |
Novel photoresist polymers, and photoresist compositions containing the same App 20020018960 - Lee, Geun Su ;   et al. | 2002-02-14 |
Multi-oxygen containing compound for preventing acid diffusion, and photoresist composition containing the same App 20020015917 - Lee, Geun Su ;   et al. | 2002-02-07 |
Photoresist composition containing photo radical generator with photoacid generator App 20020012873 - Jung, Jae Chang ;   et al. | 2002-01-31 |
Organic anti-reflective coating polymer and preparation thereof App 20020009595 - Hong, Sung-Eun ;   et al. | 2002-01-24 |
Process for forming photoresist pattern by using gas phase amine treatment App 20010053590 - Jung, Jae Chang ;   et al. | 2001-12-20 |
Semiconductor device using polymer-containing photoresist, and process for manufacturing the same App 20010053834 - Jung, Min Ho ;   et al. | 2001-12-20 |
Organic anti-reflective coating polymer and preparation thereof App 20010049429 - Jung, Min-ho ;   et al. | 2001-12-06 |
Photoresist cross-linker and photoresist composition comprising the same Grant 6,322,948 - Jung , et al. November 27, 2 | 2001-11-27 |
Organic polymer for anti-reflective coating layer and preparation thereof App 20010043992 - Jung, Min-ho ;   et al. | 2001-11-22 |
Polymer and a forming method of a micro pattern using the same Grant 6,316,162 - Jung , et al. November 13, 2 | 2001-11-13 |
Semiconductor device using polymer-containing photoresist, and process for manufacturing the same Grant 6,312,865 - Jung , et al. November 6, 2 | 2001-11-06 |
Photoresist cross-linker and photoresist composition comprising the same Grant 6,312,868 - Kong , et al. November 6, 2 | 2001-11-06 |
Organic anti-reflective coating material and its preparation Grant 6,309,790 - Jung , et al. October 30, 2 | 2001-10-30 |
Organic anti-reflective coating polymer and preparation thereof App 20010034427 - Jung, Min-Ho ;   et al. | 2001-10-25 |
Partially crosslinked polymer for bilayer photoresist App 20010031420 - Lee, Geun Su ;   et al. | 2001-10-18 |
Monomers for photoresist, polymers thereof, and photoresist compositions using the same Grant 6,291,131 - Jung , et al. September 18, 2 | 2001-09-18 |
Photoresist polymers of carboxyl-containing alicyclic compounds Grant 6,265,130 - Lee , et al. July 24, 2 | 2001-07-24 |
Over-coating composition for photoresist, and processes for forming photoresist patterns using the same App 20010003030 - Jung, Jae Chang ;   et al. | 2001-06-07 |
Photoresist monomers, polymers thereof, and photoresist compositions containing the same Grant 6,235,448 - Lee , et al. May 22, 2 | 2001-05-22 |
Photoresist monomers, polymers thereof, and photoresist compositions containing the same Grant 6,235,447 - Lee , et al. May 22, 2 | 2001-05-22 |
Polymer and a forming method of a micro pattern using the same Grant 6,225,020 - Jung , et al. May 1, 2 | 2001-05-01 |
Maleimide or alicyclic olefin-based monomers, copolymer resin of these monomers and photoresist using the resin Grant 6,165,672 - Jung , et al. December 26, 2 | 2000-12-26 |
Oxabicyclo compound, a polymer-containing said compound, and a photoresist micro pattern forming method using the same Grant 6,150,069 - Jung , et al. November 21, 2 | 2000-11-21 |
Method and photoresist using a photoresist copolymer Grant 6,143,463 - Jung , et al. November 7, 2 | 2000-11-07 |
ArF photoresist copolymers Grant 6,132,926 - Jung , et al. October 17, 2 | 2000-10-17 |
Method for forming resist patterns comprising two photoresist layers and an intermediate layer Grant 5,830,624 - Bae , et al. November 3, 1 | 1998-11-03 |
Method for forming micro patterns of semiconductor devices Grant 5,821,034 - Kim , et al. October 13, 1 | 1998-10-13 |
Method for forming photoresist pattern Grant 5,759,748 - Chun , et al. June 2, 1 | 1998-06-02 |