Baggen; Marcel Koenraad Marie
Patent Applications and Registrations
Patent applications and USPTO patent grants for Baggen; Marcel Koenraad Marie.The latest application filed is for "e-beam apparatus".
- Baggen; Marcel Koenraad Marie - Nuenen NL
- Baggen; Marcel Koenraad Marie - Veldhoven NL
| Patent | Date |
|---|---|
| E-beam apparatus Grant 11,315,752 - Hempenius , et al. April 26, 2 | 2022-04-26 |
| Electron beam inspection apparatus stage positioning Grant 11,302,512 - Baggen , et al. April 12, 2 | 2022-04-12 |
| E-beam Apparatus App 20210151282 - HEMPENIUS; Peter Paul ; et al. | 2021-05-20 |
| E-beam apparatus Grant 10,867,770 - Hempenius , et al. December 15, 2 | 2020-12-15 |
| Substrate Positioning Device And Electron Beam Inspection Tool App 20200373118 - BAGGEN; Marcel Koenraad Marie ; et al. | 2020-11-26 |
| Stage system and metrology tool Grant 10,809,634 - Hempenius , et al. October 20, 2 | 2020-10-20 |
| Interferometric Stage Positioning Apparatus App 20200234911 - BAGGEN; Marcel Koenraad Marie ; et al. | 2020-07-23 |
| Electron Beam Inspection Apparatus Stage Positioning App 20200203118 - BAGGEN; Marcel Koenraad Marie ; et al. | 2020-06-25 |
| E-beam Apparatus App 20190341224 - HEMPENIUS; Peter Paul ; et al. | 2019-11-07 |
| Lithographic apparatus, and device manufacturing method Grant 10,191,393 - Westerlaken , et al. Ja | 2019-01-29 |
| Stage System and Metrology Tool App 20180267410 - HEMPENIUS; Peter Paul ; et al. | 2018-09-20 |
| Lithographic Apparatus, And Device Manufacturing Method App 20180059555 - WESTERLAKEN; Jan Steven Christiaan ; et al. | 2018-03-01 |
| Lithographic apparatus and stage system Grant 9,097,990 - Van Der Toorn , et al. August 4, 2 | 2015-08-04 |
| Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless Grant 8,368,868 - Vermeulen , et al. February 5, 2 | 2013-02-05 |
| Lithographic Apparatus And Stage System App 20120242271 - VAN DER TOORN; Jan-Gerard Cornelis ; et al. | 2012-09-27 |
| Lithographic apparatus and device manufacturing method Grant 7,884,919 - Hempenius , et al. February 8, 2 | 2011-02-08 |
| Lithographic apparatus and position sensor Grant 7,830,495 - Van Bruggen , et al. November 9, 2 | 2010-11-09 |
| Lithographic Apparatus With Gas Pressure Means For Controlling A Planar Position Of A Patterning Device Contactless App 20100159399 - VERMEULEN; Johannes Petrus Martinus Bernardus ; et al. | 2010-06-24 |
| Lithographic apparatus and device manufacturing method Grant 7,733,463 - Baggen , et al. June 8, 2 | 2010-06-08 |
| Lithographic apparatus and device manufacturing method Grant 7,675,607 - Jeunink , et al. March 9, 2 | 2010-03-09 |
| Lithographic apparatus and stage apparatus Grant 7,667,822 - Jacobs , et al. February 23, 2 | 2010-02-23 |
| Lithographic apparatus and position sensor App 20090015246 - Van Bruggen; Olaf Hubertus Wilhelmus ; et al. | 2009-01-15 |
| Stage apparatus, lithographic apparatus and device manufacturing method Grant 7,459,701 - Baggen , et al. December 2, 2 | 2008-12-02 |
| Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle App 20080137049 - Jasper; Johannes Christiaan Maria ; et al. | 2008-06-12 |
| Lithographic apparatus and device manufacturing method App 20080013068 - Jeunink; Andre Bernardus ; et al. | 2008-01-17 |
| Lithographic apparatus and device manufacturing method App 20070258081 - Baggen; Marcel Koenraad Marie ; et al. | 2007-11-08 |
| Lithographic apparatus and stage apparatus App 20070188724 - Jacobs; Fransicus Mathijs ; et al. | 2007-08-16 |
| Lithographic apparatus and device manufacturing method App 20070182947 - Hempenius; Peter ; et al. | 2007-08-09 |
| Lithographic apparatus and device manufacturing method Grant 7,239,370 - Jansen , et al. July 3, 2 | 2007-07-03 |
| Stage apparatus, lithographic apparatus and device manufacturing method App 20060279721 - Baggen; Marcel Koenraad Marie ; et al. | 2006-12-14 |
| Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle App 20050140949 - Jasper, Johannes Christiaan Maria ; et al. | 2005-06-30 |
| Lithographic apparatus and device manufacturing method App 20040174509 - Jansen, Albert Johannes Maria ; et al. | 2004-09-09 |
| Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,707,530 - Schrijver , et al. March 16, 2 | 2004-03-16 |
| Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20020180940 - Schrijver, Raymond Laurentius Johannes ; et al. | 2002-12-05 |
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