Patent | Date |
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Method of manufacturing semiconductor device Grant 8,507,184 - Bae August 13, 2 | 2013-08-13 |
Semiconductor Device And Method For Fabricating The Same App 20120049253 - BAE; Sang-Man ;   et al. | 2012-03-01 |
Semiconductor device and method for fabricating the same Grant 8,053,312 - Bae , et al. November 8, 2 | 2011-11-08 |
Semiconductor device with omega gate and method for fabricating a semiconductor device Grant 8,022,409 - Bae September 20, 2 | 2011-09-20 |
Method for manufacturing capacitor of semiconductor device Grant 7,875,515 - Bae , et al. January 25, 2 | 2011-01-25 |
Photo mask and semiconductor device fabricated using the same Grant 7,755,149 - Bae July 13, 2 | 2010-07-13 |
Method for manufacturing a semiconductor device Grant 7,736,843 - Bae June 15, 2 | 2010-06-15 |
Method for exposing photoresist film of semiconductor device Grant 7,709,186 - Bae May 4, 2 | 2010-05-04 |
Method of Manufacturing Semiconductor Device App 20090286185 - Bae; Sang Man | 2009-11-19 |
Photo Mask App 20090170329 - BAE; Sang Man ;   et al. | 2009-07-02 |
Method for Manufacturing Capacitor of Semiconductor Device App 20090108402 - Bae; Sang Man ;   et al. | 2009-04-30 |
Method For Manufacturing A Semiconductor Device App 20080241766 - Bae; Sang Man | 2008-10-02 |
Method for forming fine patterns of semiconductor device Grant 7,368,226 - Bae May 6, 2 | 2008-05-06 |
Semiconductor device with omega gate and method for fabricating a semiconductor device App 20070284691 - Bae; Sang-Man | 2007-12-13 |
Semiconductor device with omega gate and method for fabricating a semiconductor device Grant 7,276,410 - Bae October 2, 2 | 2007-10-02 |
Lithography apparatus and method for using the same App 20070042276 - Bae; Sang Man | 2007-02-22 |
Photo mask App 20060234169 - Bae; Sang Man ;   et al. | 2006-10-19 |
Semiconductor device with omega gate and method for fabricating a semiconductor device App 20060170057 - Bae; Sang-Man | 2006-08-03 |
Semiconductor device and method for fabricating the same App 20060141694 - Bae; Sang-Man ;   et al. | 2006-06-29 |
Photo mask and semiconductor device fabricated using the same App 20060118838 - Bae; Sang Man | 2006-06-08 |
Method for forming fine patterns of semiconductor device App 20050175937 - Bae, Sang Man | 2005-08-11 |
Method for exposing photoresist film of semiconductor device App 20050118538 - Bae, Sang Man | 2005-06-02 |
Alignment mark for aligning wafer of semiconductor device Grant 6,864,590 - Bae , et al. March 8, 2 | 2005-03-08 |
Alignment Mark For Aligning Wafer Of Semiconductor Device App 20040261282 - Bae, Sang-Man ;   et al. | 2004-12-30 |
Particle inspection device and inspection method using the same Grant 6,836,322 - Bae December 28, 2 | 2004-12-28 |
Photomask and method for forming micro patterns of semiconductor device using the same Grant 6,821,690 - Bae November 23, 2 | 2004-11-23 |
Particle inspection device and inspection method using the same App 20040012776 - Bae, Sang-Man | 2004-01-22 |
Photomask and method for forming micro patterns of semiconductor device using the same App 20030186138 - Bae, Sang Man | 2003-10-02 |
Method for forming micro patterns of semiconductor devices Grant 6,015,650 - Bae January 18, 2 | 2000-01-18 |
Method for forming micro patterns of semiconductor devices Grant 5,902,493 - Bae May 11, 1 | 1999-05-11 |
Method for forming resist patterns comprising two photoresist layers and an intermediate layer Grant 5,830,624 - Bae , et al. November 3, 1 | 1998-11-03 |
Method for testing overlay in a semiconductor device utilizing inclined measuring mark Grant 5,766,809 - Bae June 16, 1 | 1998-06-16 |
Process for forming fine patterns in a semiconductor device utilizing multiple photosensitive film patterns and organic metal-coupled material Grant 5,741,625 - Bae , et al. April 21, 1 | 1998-04-21 |
Method for aligning micro patterns of a semiconductor device Grant 5,668,042 - Bae September 16, 1 | 1997-09-16 |