Backhauss; Henning
Patent Applications and Registrations
Patent applications and USPTO patent grants for Backhauss; Henning.The latest application filed is for "apparatus for the optical inspection of wafers".
- Backhauss; Henning - Wetzlar N/A DE
- Backhauss; Henning - Oak Park IL
| Patent | Date |
|---|---|
| Apparatus for the optical inspection of wafers Grant 8,451,440 - Hahn , et al. May 28, 2 | 2013-05-28 |
| Apparatus for the Optical Inspection of Wafers App 20100295938 - Hahn; Kurt ; et al. | 2010-11-25 |
| Method of detecting incomplete edge bead removal from a disk-like object Grant 7,477,370 - Michelsson , et al. January 13, 2 | 2009-01-13 |
| Method for optically inspecting a wafer by sequentially illuminating with bright and dark field light beams wherein the images from the bright and dark field illuminated regions are spatially offset Grant 7,460,219 - Jung , et al. December 2, 2 | 2008-12-02 |
| Apparatus for inspection of a wafer Grant 7,327,450 - Kreh , et al. February 5, 2 | 2008-02-05 |
| Apparatus and method for inspection of a wafer Grant 7,307,713 - Kreh , et al. December 11, 2 | 2007-12-11 |
| Method for inspection of a wafer Grant 7,292,328 - Kreh , et al. November 6, 2 | 2007-11-06 |
| System for the detection of macrodefects Grant 7,265,823 - Kreh , et al. September 4, 2 | 2007-09-04 |
| Apparatus for inspection of a wafer Grant 7,248,354 - Kreh , et al. July 24, 2 | 2007-07-24 |
| Apparatus, method, and computer program for wafer inspection Grant 7,224,446 - Kreh , et al. May 29, 2 | 2007-05-29 |
| Method of detecting incomplete edge bead removal from a disk-like object App 20070076194 - Michelsson; Detlef ; et al. | 2007-04-05 |
| Method and device for inspecting a wafer App 20070064224 - Kreh; Albert ; et al. | 2007-03-22 |
| Apparatus for wafer inspection Grant 7,180,585 - Kreh , et al. February 20, 2 | 2007-02-20 |
| Apparatus for Inspecting a Wafer App 20070013902 - Backhauss; Henning ; et al. | 2007-01-18 |
| Apparatus and method for inspecting a wafer App 20060262295 - Backhauss; Henning ; et al. | 2006-11-23 |
| Method and system for inspecting a wafer App 20050280807 - Backhauss, Henning ; et al. | 2005-12-22 |
| Method and system for inspecting a wafer App 20050280808 - Backhauss, Henning ; et al. | 2005-12-22 |
| Method for inspecting a wafer App 20050168729 - Jung, Paul ; et al. | 2005-08-04 |
| Method for inspection of a wafer App 20050134839 - Kreh, Albert ; et al. | 2005-06-23 |
| Apparatus and method for inspection of a wafer App 20050134846 - Kreh, Albert ; et al. | 2005-06-23 |
| Apparatus for wafer inspection App 20050122509 - Backhauss, Henning | 2005-06-09 |
| System for the detection of macrodefects App 20050101036 - Kreh, Albert ; et al. | 2005-05-12 |
| Apparatus for inspection of a wafer App 20050001900 - Kreh, Albert ; et al. | 2005-01-06 |
| Apparatus for inspection of a wafer App 20050002023 - Kreh, Albert ; et al. | 2005-01-06 |
| Apparatus, method, and computer program for wafer inspection App 20050002021 - Kreh, Albert ; et al. | 2005-01-06 |
| Apparatus for wafer inspection App 20040239920 - Kreh, Albert ; et al. | 2004-12-02 |
| Optical transceiver and filler composition Grant 5,778,127 - Gilliland , et al. July 7, 1 | 1998-07-07 |
| Small footprint optoelectronic transceiver with laser Grant 5,528,408 - McGinley , et al. June 18, 1 | 1996-06-18 |
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