| Patent | Date |
|---|
Systems and methods for scatterometric single-wavelength measurement of misregistration and amelioration thereof
Grant 11,454,894 - Yagil , et al. September 27, 2 | 2022-09-27 |
Metrology system and method for measuring diagonal diffraction-based overlay targets
Grant 11,353,321 - Volkovich , et al. June 7, 2 | 2022-06-07 |
Systems And Methods For Scatterometric Single-wavelength Measurement Of Misregistration And Amelioration Thereof
App 20220082950 - Yagil; Alon ; et al. | 2022-03-17 |
Metrology System and Method for Measuring Diagonal Diffraction-Based Overlay Targets
App 20210389125 - Volkovich; Roie ; et al. | 2021-12-16 |
Spectral filter for high-power fiber illumination sources
Grant 11,187,838 - Hill , et al. November 30, 2 | 2021-11-30 |
High-brightness illumination source for optical metrology
Grant 11,156,846 - Manassen , et al. October 26, 2 | 2021-10-26 |
Nano-structured non-polarizing beamsplitter
Grant 10,976,562 - Gorelik , et al. April 13, 2 | 2021-04-13 |
Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology
Grant 10,831,108 - Marciano , et al. November 10, 2 | 2020-11-10 |
High-Brightness Illumination Source for Optical Metrology
App 20200333612 - Manassen; Amnon ; et al. | 2020-10-22 |
Localized telecentricity and focus optimization for overlay metrology
Grant 10,677,588 - Hill , et al. | 2020-06-09 |
Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology
Grant 10,533,940 - Manassen , et al. Ja | 2020-01-14 |
Systems and methods for metrology with layer-specific illumination spectra
Grant 10,444,161 - Manassen , et al. Oc | 2019-10-15 |
Localized Telecentricity and Focus Optimization for Overlay Metrology
App 20190310080 - Hill; Andrew V. ; et al. | 2019-10-10 |
System and method for spectral tuning of broadband light sources
Grant 10,422,508 - Hill , et al. Sept | 2019-09-24 |
System and method for generating multi-channel tunable illumination from a broadband source
Grant 10,371,626 - Hill , et al. | 2019-08-06 |
Nano-Structured Non-Polarizing Beamsplitter
App 20190107727 - Gorelik; Dmitry ; et al. | 2019-04-11 |
Scanning in Angle-Resolved Reflectometry and Algorithmically Eliminating Diffraction from Optical Metrology
App 20190094142 - Manassen; Amnon ; et al. | 2019-03-28 |
Systems for providing illumination in optical metrology
Grant 10,203,247 - Brady , et al. Feb | 2019-02-12 |
Spectral Filter for High-Power Fiber Illumination Sources
App 20190033501 - Hill; Andrew V. ; et al. | 2019-01-31 |
Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology
Grant 10,126,238 - Manassen , et al. November 13, 2 | 2018-11-13 |
Systems and Methods for Metrology with Layer-Specific Illumination Spectra
App 20180292326 - Manassen; Amnon ; et al. | 2018-10-11 |
Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology
Grant 9,958,385 - Manassen , et al. May 1, 2 | 2018-05-01 |
Scanning In Angle-resolved Reflectometry And Algorithmically Eliminating Diffraction From Optical Metrology
App 20180106723 - Manassen; Amnon ; et al. | 2018-04-19 |
Spectral control system
Grant 9,921,050 - Manassen , et al. March 20, 2 | 2018-03-20 |
System and Method for Generating Multi-Channel Tunable Illumination from a Broadband Source
App 20180052099 - Hill; Andrew V. ; et al. | 2018-02-22 |
System and Method for Spectral Tuning of Broadband Light Sources
App 20170350575 - Hill; Andrew V. ; et al. | 2017-12-07 |
Apodization for pupil imaging scatterometry
Grant 9,784,987 - Hill , et al. October 10, 2 | 2017-10-10 |
Systems for Providing Illumination in Optical Metrology
App 20170146399 - Brady; Gregory R. ; et al. | 2017-05-25 |
Phase characterization of targets
Grant 9,581,430 - Manassen , et al. February 28, 2 | 2017-02-28 |
Systems for providing illumination in optical metrology
Grant 9,512,985 - Brady , et al. December 6, 2 | 2016-12-06 |
Methods Of Analyzing And Utilizing Landscapes To Reduce Or Eliminate Inaccuracy In Overlay Optical Metrology
App 20160313658 - Marciano; Tal ; et al. | 2016-10-27 |
Spectral Control System
App 20160305766 - Manassen; Amnon ; et al. | 2016-10-20 |
Spectral control system
Grant 9,341,769 - Manassen , et al. May 17, 2 | 2016-05-17 |
Apodization for Pupil Imaging Scatterometry
App 20150316783 - Hill; Andrew V. ; et al. | 2015-11-05 |
Optics symmetrization for metrology
Grant 9,164,397 - Manassen , et al. October 20, 2 | 2015-10-20 |
Apodization for pupil imaging scatterometry
Grant 9,091,650 - Hill , et al. July 28, 2 | 2015-07-28 |
Metrology systems and methods
Grant 9,080,971 - Kandel , et al. July 14, 2 | 2015-07-14 |
Scanning In Angle-resolved Reflectometry And Algorithmically Eliminating Diffraction From Optical Metrology
App 20150116717 - MANASSEN; Amnon ; et al. | 2015-04-30 |
Metrology Systems and Methods
App 20150036142 - Kandel; Daniel ; et al. | 2015-02-05 |
Metrology systems and methods
Grant 8,873,054 - Kandel , et al. October 28, 2 | 2014-10-28 |
Systems for Providing Illumination in Optical Metrology
App 20140240951 - Brady; Gregory R. ; et al. | 2014-08-28 |
Spectral Control System
App 20140168650 - Manassen; Amnon ; et al. | 2014-06-19 |
Apodization for Pupil Imaging Scatterometry
App 20140146322 - Hill; Andrew V. ; et al. | 2014-05-29 |
Phase Characterization Of Targets
App 20140111791 - Manassen; Amnon ; et al. | 2014-04-24 |
Overlay metrology by pupil phase analysis
Grant 8,582,114 - Manassen , et al. November 12, 2 | 2013-11-12 |
Metrology Systems and Methods
App 20130229661 - Kandel; Daniel ; et al. | 2013-09-05 |
Metrology systems and methods
Grant 8,441,639 - Kandel , et al. May 14, 2 | 2013-05-14 |
Overlay Metrology By Pupil Phase Analysis
App 20130044331 - Manassen; Amnon ; et al. | 2013-02-21 |
Optics Symmetrization For Metrology
App 20120033226 - Manassen; Amnon ; et al. | 2012-02-09 |
Metrology Systems And Methods
App 20110069312 - Kandel; Daniel ; et al. | 2011-03-24 |
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