Babich; Katherina E.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Babich; Katherina E..The latest application filed is for "methods and structures for protecting one area while processing another area on a chip".

Company Profile

0.30.31

Babich; Katherina E. - Chappaqua NY
Babich; Katherina E - Chappaqua NY

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods and structures for protecting one area while processing another area on a chip Grant 9,472,402 - Kim , et al. October 18, 2	2016-10-18
Selective nanotube growth inside vias using an ion beam Grant 9,099,537 - Babich , et al. August 4, 2	2015-08-04
Methods and Structures for Protecting One Area While Processing Another Area on a Chip App 20150004802 - Kim; Deok-kee ; et al.	2015-01-01
Self-aligned borderless contacts for high density electronic and memory device integration Grant 8,754,530 - Babich , et al. June 17, 2	2014-06-17
Process of making a lithographic structure using antireflective materials Grant 8,609,322 - Angelopoulos , et al. December 17, 2	2013-12-17
Filling narrow openings using ion beam etch Grant 8,497,212 - Babich , et al. July 30, 2	2013-07-30
Process Of Making A Lithographic Structure Using Antireflective Materials App 20130017486 - Angelopoulos; Marie ; et al.	2013-01-17
Thin Body Silicon-on-insulator Transistor With Borderless Self-aligned Contacts App 20120299101 - BABICH; Katherina E. ; et al.	2012-11-29
Selective Epitaxial Growth By Incubation Time Engineering App 20120295417 - Adam; Thomas N. ; et al.	2012-11-22
Process of making a lithographic structure using antireflective materials Grant 8,293,454 - Angelopoulos , et al. October 23, 2	2012-10-23
Filling Narrow Openings Using Ion Beam Etch App 20120217590 - Babich; Katherina E. ; et al.	2012-08-30
Low-temperature Absorber Film And Method Of Fabrication App 20110254138 - Babich; Katherina E. ; et al.	2011-10-20
Process of making a semiconductor device using multiple antireflective materials Grant 7,968,270 - Angelopoulos , et al. June 28, 2	2011-06-28
Selective Nanotube Growth Inside Vias Using An Ion Beam App 20110048930 - Babich; Katherina E. ; et al.	2011-03-03
Method for tuning epitaxial growth by interfacial doping and structure including same Grant 7,790,593 - Babich , et al. September 7, 2	2010-09-07
Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof Grant 7,736,833 - Angelopoulos , et al. June 15, 2	2010-06-15
Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof Grant 7,709,177 - Angelopoulos , et al. May 4, 2	2010-05-04
Thin Body Silicon-on-insulator Transistor With Borderless Self-aligned Contacts App 20100038715 - BABICH; KATHERINA E. ; et al.	2010-02-18
Self-aligned Borderless Contacts For High Density Electronic And Memory Device Integration App 20100038723 - Babich; Katherina E. ; et al.	2010-02-18
Techniques for patterning features in semiconductor devices Grant 7,545,041 - Allen , et al. June 9, 2	2009-06-09
Process Of Making A Lithographic Structure Using Antireflective Materials App 20090061355 - Angelopoulos; Marie ; et al.	2009-03-05
Process of making a semiconductor device using multiple antireflective materials Grant 7,485,573 - Angelopoulos , et al. February 3, 2	2009-02-03
Process Of Making A Semiconductor Device Using Multiple Antireflective Materials App 20080311508 - Angelopoulos; Marie ; et al.	2008-12-18
Techniques for Patterning Features in Semiconductor Devices App 20080187731 - Allen; Scott D. ; et al.	2008-08-07
Method For Tuning Epitaxial Growth By Interfacial Doping And Structure Including Same App 20080153270 - Babich; Katherina E. ; et al.	2008-06-26
Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof App 20080124650 - Angelopoulos; Marie ; et al.	2008-05-29
Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof App 20080124649 - Angelopoulos; Marie ; et al.	2008-05-29
Method For Tuning Epitaxial Growth By Interfacial Doping And Structure Including Same App 20080093640 - Babich; Katherina E. ; et al.	2008-04-24
Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof Grant 7,361,444 - Angelopoulos , et al. April 22, 2	2008-04-22
Method for tuning epitaxial growth by interfacial doping and structure including same Grant 7,329,596 - Babich , et al. February 12, 2	2008-02-12
Antireflective composition and process of making a lithographic structure Grant 7,326,442 - Babich , et al. February 5, 2	2008-02-05
Process of making a semiconductor device using multiple antireflective materials App 20070196748 - Angelopoulos; Marie ; et al.	2007-08-23
Antireflective Hardmask and Uses Thereof App 20070105363 - Babich; Katherina E. ; et al.	2007-05-10
Method for tuning epitaxial growth by interfacial doping and structure including same App 20070090487 - Babich; Katherina E. ; et al.	2007-04-26
Water and aqueous base soluble antireflective coating/hardmask materials Grant 7,175,966 - Babich , et al. February 13, 2	2007-02-13
Process of making a lithographic structure using antireflective materials App 20070015082 - Angelopoulos; Marie ; et al.	2007-01-18
Antireflective composition and process of making a lithographic structure App 20070015083 - Babich; Katherina E. ; et al.	2007-01-18
Multilayer interconnect structure containing air gaps and method for making Grant 7,098,476 - Babich , et al. August 29, 2	2006-08-29
Etch selectivity enhancement for tunable etch resistant anti-reflective layer Grant 7,077,903 - Babich , et al. July 18, 2	2006-07-18
Techniques for patterning features in semiconductor devices App 20060118785 - Allen; Scott D. ; et al.	2006-06-08
Techniques for patterning features in semiconductor devices Grant 7,030,008 - Allen , et al. April 18, 2	2006-04-18
Etch selectivity enhancement for tunable etch resistant anti-reflective layer App 20050098091 - Babich, Katherina E. ; et al.	2005-05-12
Water and aqueous base soluble antireflective coating/hardmask materials App 20050064322 - Babich, Katherina E. ; et al.	2005-03-24
Techniques for patterning features in semiconductor devices App 20050056823 - Allen, Scott D. ; et al.	2005-03-17
Attenuated embedded phase shift photomask blanks Grant 6,858,357 - Angelopoulos , et al. February 22, 2	2005-02-22
Multilayer interconnect structure containing air gaps and method for making App 20050037604 - Babich, Katherina E. ; et al.	2005-02-17
Multilayer interconnect structure containing air gaps and method for making Grant 6,815,329 - Babich , et al. November 9, 2	2004-11-09
Attenuated embedded phase shift photomask blanks App 20040053026 - Angelopoulos, Marie ; et al.	2004-03-18
Multifunctional polymeric materials and use thereof Grant 6,686,124 - Angelopoulos , et al. February 3, 2	2004-02-03
Attenuated embedded phase shift photomask blanks Grant 6,653,027 - Angelopoulos , et al. November 25, 2	2003-11-25
Forming a pattern of a negative photoresist Grant 6,617,086 - Angelopoulos , et al. September 9, 2	2003-09-09
Multilayer interconnect structure containing air gaps and method for making App 20020158337 - Babich, Katherina E. ; et al.	2002-10-31
Forming a pattern of a negative photoresist App 20020123010 - Angelopoulos, Marie ; et al.	2002-09-05
Attenuated embedded phase shift photomask blanks App 20020119378 - Angelopoulos, Marie ; et al.	2002-08-29
Tunable and removable plasma deposited antireflective coatings Grant 6,428,894 - Babich , et al. August 6, 2	2002-08-06
Forming a pattern of a negative photoresist Grant 6,251,569 - Angelopoulos , et al. June 26, 2	2001-06-26

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