Babayan; Viachslav

Patent Applications and Registrations

Patent applications and USPTO patent grants for Babayan; Viachslav.The latest application filed is for "method and apparatus for post exposure processing of photoresist wafers".

Company Profile

15.17.25

Babayan; Viachslav - Sunnyvale CA
BABAYAN; Viachslav - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Post exposure processing apparatus Grant 11,262,662 - Babayan , et al. March 1, 2	2022-03-01
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers App 20220004104 - BABAYAN; Viachslav ; et al.	2022-01-06
Method and apparatus for post exposure processing of photoresist wafers Grant 11,112,697 - Babayan , et al. September 7, 2	2021-09-07
Method and apparatus for thin wafer carrier Grant 11,094,573 - Qiao , et al. August 17, 2	2021-08-17
Biased cover ring for a substrate processing system Grant 11,049,701 - Allen , et al. June 29, 2	2021-06-29
High temperature vapor delivery system and method Grant 10,954,594 - Babayan , et al. March 23, 2	2021-03-23
Post Exposure Processing Apparatus App 20210026257 - BABAYAN; Viachslav ; et al.	2021-01-28
Apparatus For Post Exposure Bake App 20200387074 - HANSON; Kyle M. ; et al.	2020-12-10
High density, low stress amorphous carbon film, and process and equipment for its deposition Grant 10,858,727 - Liu , et al. December 8, 2	2020-12-08
Post exposure processing apparatus Grant 10,845,715 - Babayan , et al. November 24, 2	2020-11-24
Apparatus for post exposure bake Grant 10,754,252 - Hanson , et al. A	2020-08-25
Method And Apparatus For Thin Wafer Carrier App 20200161156 - QIAO; Jingyu ; et al.	2020-05-21
Apparatus for field guided acid profile control in a photoresist layer Grant 10,615,058 - Godet , et al.	2020-04-07
Pulse shape controller for sputter sources Grant 10,566,177 - Stowell , et al. Feb	2020-02-18
High Power Impulse Magnetron Sputtering Physical Vapor Deposition Of Tungsten Films Having Improved Bottom Coverage App 20200048760 - KALATHIPARAMBIL; KISHOR ; et al.	2020-02-13
Post Exposure Processing Apparatus App 20190377272 - BABAYAN; Viachslav ; et al.	2019-12-12
Method and apparatus for post exposure processing of photoresist wafers Grant 10,474,033 - Babayan , et al. Nov	2019-11-12
Post exposure processing apparatus Grant 10,401,742 - Babayan , et al. Sep	2019-09-03
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers App 20190187563 - BABAYAN; Viachslav ; et al.	2019-06-20
Pulsed Dc Source For High Power Impulse Magnetron Sputtering Physical Vapor Deposition Of Dielectric Films And Methods Of Application App 20190127842 - BABAYAN; Viachslav ; et al.	2019-05-02
Sync Controller For High Impulse Magnetron Sputtering App 20190088457 - BABAYAN; Viachslav ; et al.	2019-03-21
Method and apparatus for post exposure processing of photoresist wafers Grant 10,203,604 - Babayan , et al. Feb	2019-02-12
Post Exposure Processing Apparatus App 20180224754 - BABAYAN; Viachslav ; et al.	2018-08-09
Apparatus For Post Exposure Bake App 20180217504 - HANSON; Kyle M. ; et al.	2018-08-02
Apparatus For Field Guided Acid Profile Control In A Photoresist Layer App 20180190518 - GODET; Ludovic ; et al.	2018-07-05
Biased Cover Ring For A Substrate Processing System App 20180151325 - ALLEN; ADOLPH MILLER ; et al.	2018-05-31
Post exposure processing apparatus Grant 9,964,863 - Babayan , et al. May 8, 2	2018-05-08
Apparatus for post exposure bake Grant 9,958,782 - Hanson , et al. May 1, 2	2018-05-01
Apparatus For Post Exposure Bake App 20180107119 - HANSON; Kyle M. ; et al.	2018-04-19
POWER DELIVERY FOR HIGH POWER IMPULSE MAGNETRON SPUTTERING (HiPIMS) App 20180108519 - BABAYAN; VIACHSLAV ; et al.	2018-04-19
Selective Etch Using Material Modification And Rf Pulsing App 20180082861 - Citla; Bhargav ; et al.	2018-03-22
High Density, Low Stress Amorphous Carbon Film, And Process And Equipment For Its Deposition App 20180051368 - Liu; Jingjing ; et al.	2018-02-22
Pulse Shape Controller For Sputter Sources App 20180044781 - STOWELL; Michael ; et al.	2018-02-15
Substrate Support With In Situ Wafer Rotation App 20180033673 - Nemani; Srinivas D. ; et al.	2018-02-01
Selective etch using material modification and RF pulsing Grant 9,865,484 - Citla , et al. January 9, 2	2018-01-09
Apparatus For Post Exposure Bake App 20180004094 - HANSON; Kyle M. ; et al.	2018-01-04
Selective Etch Using Material Modification And Rf Pulsing App 20180005850 - Citla; Bhargav ; et al.	2018-01-04
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers App 20170363960 - BABAYAN; Viachslav ; et al.	2017-12-21
Immersion field guided exposure and post-exposure bake process Grant 9,829,790 - Buchberger, Jr. , et al. November 28, 2	2017-11-28
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers App 20170154797 - Babayan; Viachslav ; et al.	2017-06-01
High Temperature Vapor Delivery System And Method App 20170088949 - BABAYAN; Viachslav ; et al.	2017-03-30
Immersion Field Guided Exposure And Post-exposure Bake Process App 20160357107 - BUCHBERGER, JR.; Douglas A. ; et al.	2016-12-08

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