loadpatents
Patent applications and USPTO patent grants for AZUMO; Shuji.The latest application filed is for "method for forming film".
Patent | Date |
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Film Formation Method And Film Formation Device App 20220186362 - AZUMO; Shuji ;   et al. | 2022-06-16 |
Film Formation Method And Film Formation Apparatus App 20220189777 - KAWANO; Yumiko ;   et al. | 2022-06-16 |
Method For Forming Film App 20220189778 - IKE; Shinichi ;   et al. | 2022-06-16 |
Film Formation Method And Film Formation Device App 20220181144 - KAWANO; Yumiko ;   et al. | 2022-06-09 |
Method For Area Selective Deposition Using A Surface Cleaning Process App 20210398846 - Tapily; Kandabara N. ;   et al. | 2021-12-23 |
Film Forming Method App 20210246547 - AZUMO; Shuji ;   et al. | 2021-08-12 |
Film forming method for SiC film Grant 11,041,239 - Katou , et al. June 22, 2 | 2021-06-22 |
Film Forming Method App 20210087691 - AZUMO; Shuji ;   et al. | 2021-03-25 |
Semiconductor device including an MIS structure Grant 10,833,166 - Yamamoto , et al. November 10, 2 | 2020-11-10 |
Method and system for selectively forming film Grant 10,790,138 - Azumo September 29, 2 | 2020-09-29 |
Film Forming Method And Film Forming Apparatus App 20200294798 - WAGATSUMA; Yuichiro ;   et al. | 2020-09-17 |
FILM FORMING METHOD FOR SiC FILM App 20200063262 - KATOU; Taiki ;   et al. | 2020-02-27 |
Method And System For Selectively Forming Film App 20200006057 - AZUMO; Shuji | 2020-01-02 |
Selective film forming method and method of manufacturing semiconductor device Grant 10,490,443 - Kawano , et al. Nov | 2019-11-26 |
Semiconductor Apparatus App 20190355828 - YAMAMOTO; Kenji ;   et al. | 2019-11-21 |
Selective Film Forming Method and Method of Manufacturing Semiconductor Device App 20190096750 - KAWANO; Yumiko ;   et al. | 2019-03-28 |
SiC FILM FORMING METHOD AND SiC FILM FORMING APPARATUS App 20180076030 - YAMADA; Kazuki ;   et al. | 2018-03-15 |
Film forming method and film forming apparatus Grant 9,293,543 - Azumo , et al. March 22, 2 | 2016-03-22 |
Transistor And Method For Manufacturing The Same App 20150235842 - HARA; Kenichi ;   et al. | 2015-08-20 |
Substrate processing apparatus Grant 8,999,102 - Miyoshi , et al. April 7, 2 | 2015-04-07 |
Film forming method and storage medium Grant 8,900,991 - Azumo , et al. December 2, 2 | 2014-12-02 |
Substrate Processing Apparatus App 20140290857 - MIYOSHI; Hidenori ;   et al. | 2014-10-02 |
Film forming method, semiconductor device, manufacturing method thereof and substrate processing apparatus therefor Grant 8,785,311 - Miyoshi , et al. July 22, 2 | 2014-07-22 |
Film Forming Method And Film Forming Apparatus App 20140094027 - AZUMO; Shuji ;   et al. | 2014-04-03 |
Film Forming Method And Storage Medium App 20120220121 - AZUMO; Shuji ;   et al. | 2012-08-30 |
Method For Forming Metal Thin Film, Semiconductor Device And Manufacturing Method Thereof App 20120211890 - AZUMO; Shuji ;   et al. | 2012-08-23 |
Film Forming Apparatus, Film Forming Method And Storage Medium App 20120171365 - Azumo; Shuji ;   et al. | 2012-07-05 |
Film Formation Method And Storage Medium App 20120164328 - Kojima; Yasuhiko ;   et al. | 2012-06-28 |
Film Forming Method, Semiconductor Device, Manufacturing Method Thereof And Substrate Processing Apparatus Therefor App 20120064708 - MIYOSHI; Hidenori ;   et al. | 2012-03-15 |
Film Formation Method And Storage Medium App 20110174630 - Kojima; Yasuhiko ;   et al. | 2011-07-21 |
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