Ayoub; Mohamad A.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Ayoub; Mohamad A..The latest application filed is for "pecvd process".
Company Profile
11.24.28
- Ayoub; Mohamad A. - Los Gatos CA
- Ayoub; Mohamad A. - Las Gatos CA US
Patent Activity
| Patent | Date |
|---|---|
| Shadow ring for modifying wafer edge and bevel deposition Grant 11,136,665 - Bois , et al. October 5, 2 | 2021-10-05 |
| Bottom and side plasma tuning having closed loop control Grant 10,910,227 - Rocha-Alvarez , et al. February 2, 2 | 2021-02-02 |
| Pecvd Process App 20200399756 - RAJAGOPALAN; Nagarajan ; et al. | 2020-12-24 |
| PECVD process Grant 10,793,954 - Rajagopalan , et al. October 6, 2 | 2020-10-06 |
| High Impedance Rf Filter For Heater With Impedance Tuning Device App 20200010957 - CHEN; Jian J. ; et al. | 2020-01-09 |
| High impedance RF filter for heater with impedance tuning device Grant 10,450,653 - Chen , et al. Oc | 2019-10-22 |
| Apparatus and method for tuning a plasma profile using a tuning electrode in a processing chamber Grant 10,347,465 - Ayoub , et al. July 9, 2 | 2019-07-09 |
| High Impedance Rf Filter For Heater With Impedance Tuning Device App 20190177848 - CHEN; Jian J. ; et al. | 2019-06-13 |
| Shadow Ring For Modifying Wafer Edge And Bevel Deposition App 20190153592 - BOIS; Dale Du ; et al. | 2019-05-23 |
| Bottom And Side Plasma Tuning Having Closed Loop Control App 20190080916 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2019-03-14 |
| Shadow ring for modifying wafer edge and bevel deposition Grant 10,227,695 - Du Bois , et al. | 2019-03-12 |
| High impedance RF filter for heater with impedance tuning device Grant 10,125,422 - Chen , et al. November 13, 2 | 2018-11-13 |
| Bottom and side plasma tuning having closed loop control Grant 10,128,118 - Rocha-Alvarez , et al. November 13, 2 | 2018-11-13 |
| Auto frequency tuned remote plasma source Grant 10,083,818 - Khaja , et al. September 25, 2 | 2018-09-25 |
| Pecvd Process App 20180258535 - RAJAGOPALAN; Nagarajan ; et al. | 2018-09-13 |
| PECVD process Grant 10,060,032 - Rajagopalan , et al. August 28, 2 | 2018-08-28 |
| PECVD apparatus and process Grant 10,030,306 - Rajagopalan , et al. July 24, 2 | 2018-07-24 |
| Apparatus and method for tuning electrode impedance for high frequency radio frequency and terminating low frequency radio frequency to ground Grant 10,032,608 - Chen , et al. July 24, 2 | 2018-07-24 |
| Apparatus And Method For Tuning A Plasma Profile Using A Tuning Electrode In A Processing Chamber App 20180130637 - AYOUB; Mohamad A. ; et al. | 2018-05-10 |
| Pecvd Process App 20180066364 - RAJAGOPALAN; Nagarajan ; et al. | 2018-03-08 |
| Apparatus and method for tuning a plasma profile using a tuning electrode in a processing chamber Grant 9,865,431 - Ayoub , et al. January 9, 2 | 2018-01-09 |
| PECVD process Grant 9,816,187 - Rajagopalan , et al. November 14, 2 | 2017-11-14 |
| Pecvd Process App 20170016118 - RAJAGOPALAN; Nagarajan ; et al. | 2017-01-19 |
| Remote plasma source for controlling plasma skew Grant 9,466,469 - Khaja , et al. October 11, 2 | 2016-10-11 |
| PECVD process Grant 9,458,537 - Rajagopalan , et al. October 4, 2 | 2016-10-04 |
| Remote Plasma Source For Controlling Plasma Skew App 20160268103 - KHAJA; Abdul Aziz ; et al. | 2016-09-15 |
| Tunable Ground Planes In Plasma Chambers App 20160145742 - Janakiraman; Karthik ; et al. | 2016-05-26 |
| Detecting Plasma Arcs By Monitoring Rf Reflected Power In A Plasma Processing Chamber App 20160095196 - CHEN; Jian J. ; et al. | 2016-03-31 |
| Auto Frequency Tuned Remote Plasma Source App 20160086772 - KHAJA; Abdul Aziz ; et al. | 2016-03-24 |
| Apparatus And Method For Tuning A Plasma Profile Using A Tuning Ring In A Processing Chamber App 20160017494 - AYOUB; Mohamad A. ; et al. | 2016-01-21 |
| Pecvd Process App 20160017497 - RAJAGOPALAN; NAGARAJAN ; et al. | 2016-01-21 |
| Apparatus And Method For Tuning A Plasma Profile Using A Tuning Electrode In A Processing Chamber App 20160013022 - AYOUB; MOHAMAD A. ; et al. | 2016-01-14 |
| PECVD process Grant 9,157,730 - Rajagopalan , et al. October 13, 2 | 2015-10-13 |
| Pecvd Apparatus And Process App 20150226540 - Rajagopalan; Nagarajan ; et al. | 2015-08-13 |
| Apparatus and methods for improving reliability of RF grounding Grant 8,884,524 - Zhou , et al. November 11, 2 | 2014-11-11 |
| High Impedance Rf Filter For Heater With Impedance Tuning Device App 20140302256 - CHEN; Jian J. ; et al. | 2014-10-09 |
| Method And Apparatus For Tuning Electrode Impedance For High Frequency Radio Frequency And Terminating Low Frequency Radio Frequency To Ground App 20140290576 - Chen; Jian J. ; et al. | 2014-10-02 |
| Confined process volume PECVD chamber Grant 8,778,813 - Sankarakrishnan , et al. July 15, 2 | 2014-07-15 |
| Pecvd Process App 20140118751 - RAJAGOPALAN; Nagarajan ; et al. | 2014-05-01 |
| Bottom And Side Plasma Tuning Having Closed Loop Control App 20140087489 - ROCHA-ALVAREZ; Juan Carlos ; et al. | 2014-03-27 |
| System and method for current-based plasma excursion detection Grant 8,587,321 - Chen , et al. November 19, 2 | 2013-11-19 |
| Apparatus And Methods For Improving Reliability Of Rf Grounding App 20130126206 - Zhou; Jianhua ; et al. | 2013-05-23 |
| Tunable Ground Planes In Plasma Chambers App 20120205046 - Janakiraman; Karthik ; et al. | 2012-08-16 |
| System And Method For Current-based Plasma Excursion Detection App 20120074951 - Chen; Jian J. ; et al. | 2012-03-29 |
| Confined Process Volume Pecvd Chamber App 20110294303 - Sankarakrishnan; Ramprakash ; et al. | 2011-12-01 |
| Shadow Ring For Modifying Wafer Edge And Bevel Deposition App 20110159211 - Du Bois; Dale R. ; et al. | 2011-06-30 |
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