loadpatents
Patent applications and USPTO patent grants for Ayata; Naoki.The latest application filed is for "method and apparatus for detecting position of a mark".
Patent | Date |
---|---|
Method and apparatus for detecting position of a mark Grant 5,392,361 - Imaizumi , et al. February 21, 1 | 1995-02-21 |
Alignment and exposure apparatus and method for manufacture of integrated circuits Grant 5,365,342 - Ayata , et al. November 15, 1 | 1994-11-15 |
Alignment and exposure apparatus and method for manufacture of integrated circuits Grant 5,050,111 - Ayata , et al. September 17, 1 | 1991-09-17 |
Information read-out and recording apparatus Grant 5,006,864 - Ayata , et al. April 9, 1 | 1991-04-09 |
Copying apparatus capable of designating image areas Grant 4,985,778 - Ayata , et al. January 15, 1 | 1991-01-15 |
Mark detecting method and apparatus Grant 4,962,423 - Yamada , et al. October 9, 1 | 1990-10-09 |
Alignment and exposure apparatus and method for manufacture of integrated circuits Grant 4,937,618 - Ayata , et al. June 26, 1 | 1990-06-26 |
Method of detecting position of a mark Grant 4,933,715 - Yamada , et al. June 12, 1 | 1990-06-12 |
Alignment method usable in a step-and-repeat type exposure apparatus for either global or dye-by-dye alignment Grant 4,918,320 - Hamasaki , et al. April 17, 1 | 1990-04-17 |
Printing apparatus for system Grant 4,866,532 - Ayata , et al. September 12, 1 | 1989-09-12 |
Mask aligner with a wafer position detecting device Grant 4,794,648 - Ayata , et al. December 27, 1 | 1988-12-27 |
Semiconductor circuit manufacturing apparatus having selectively operable detectors for effecting automatic alignment Grant 4,719,357 - Ayata , et al. January 12, 1 | 1988-01-12 |
Printing apparatus or system for recording a color image Grant 4,718,040 - Ayata , et al. January 5, 1 | 1988-01-05 |
Alignment apparatus Grant 4,713,784 - Ayata December 15, 1 | 1987-12-15 |
Image recording apparatus Grant 4,707,713 - Ayata , et al. November 17, 1 | 1987-11-17 |
Color image reading apparatus Grant 4,694,502 - Ozawa , et al. September 15, 1 | 1987-09-15 |
Position detecting device and method Grant 4,688,088 - Hamazaki , et al. August 18, 1 | 1987-08-18 |
Alignment and exposure apparatus Grant 4,669,867 - Uda , et al. June 2, 1 | 1987-06-02 |
Mask aligner having a photo-mask setting device Grant 4,655,599 - Ayata , et al. April 7, 1 | 1987-04-07 |
System for controlling drive of a wafer stage Grant 4,641,071 - Tazawa , et al. February 3, 1 | 1987-02-03 |
Measurement method and apparatus for alignment Grant 4,641,257 - Ayata February 3, 1 | 1987-02-03 |
Object position detecting apparatus using accumulation type sensor Grant 4,634,876 - Ayata January 6, 1 | 1987-01-06 |
Mask aligner having a malfunction disposal device Grant 4,553,834 - Ayata , et al. November 19, 1 | 1985-11-19 |
Image processing apparatus Grant 4,538,182 - Saito , et al. August 27, 1 | 1985-08-27 |
Image recording system having multiple image recording means Grant 4,527,885 - Ayata , et al. July 9, 1 | 1985-07-09 |
Printing apparatus or system Grant 4,521,805 - Ayata , et al. June 4, 1 | 1985-06-04 |
Droplet generating method and apparatus therefor Grant 4,520,373 - Ayata , et al. May 28, 1 | 1985-05-28 |
Image recording system utilizing a plurality of recording units Grant 4,476,486 - Ayata , et al. October 9, 1 | 1984-10-09 |
Image recording device Grant 4,467,348 - Fujii , et al. August 21, 1 | 1984-08-21 |
Ink jet recording apparatus with vacuum platen Grant 4,463,361 - Koumura , et al. July 31, 1 | 1984-07-31 |
Droplet generating method and apparatus thereof Grant 4,463,359 - Ayata , et al. July 31, 1 | 1984-07-31 |
Solid-state photoelectric converter Grant 4,461,956 - Hatanaka , et al. July 24, 1 | 1984-07-24 |
Solid-state photoelectric transducer Grant 4,390,791 - Hatanaka , et al. June 28, 1 | 1983-06-28 |
Recording device Grant 4,325,086 - Sato , et al. April 13, 1 | 1982-04-13 |
Optical scanner for reading data recorded in plural colors Grant 4,323,919 - Fujii , et al. April 6, 1 | 1982-04-06 |
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