Aya; Sunao
Patent Applications and Registrations
Patent applications and USPTO patent grants for Aya; Sunao.The latest application filed is for "ion implantation apparatus".
- Aya; Sunao - Tokyo JP
- Aya; Sunao - Hyogo JP
| Patent | Date |
|---|---|
| Ion implantation apparatus Grant 10,043,635 - Aya August 7, 2 | 2018-08-07 |
| Ion Implantation Apparatus App 20170133201 - AYA; Sunao | 2017-05-11 |
| Method for manufacturing semiconductor device Grant 9,188,872 - Aya , et al. November 17, 2 | 2015-11-17 |
| Semiconductor device Grant 9,093,361 - Hino , et al. July 28, 2 | 2015-07-28 |
| Method for manufacturing semiconductor device Grant 9,063,428 - Yuki , et al. June 23, 2 | 2015-06-23 |
| Method of manufacturing semiconductor device Grant 9,059,086 - Ebiike , et al. June 16, 2 | 2015-06-16 |
| Method For Manufacturing Semiconductor Device App 20140377709 - YUKI; Hideaki ; et al. | 2014-12-25 |
| Method For Manufacturing Semiconductor Device App 20140370445 - AYA; Sunao ; et al. | 2014-12-18 |
| Semiconductor Device And Method For Manufacturing Semiconductor Device App 20140077232 - Hino; Shiro ; et al. | 2014-03-20 |
| Method Of Manufacturing Semiconductor Device App 20130288467 - Ebiike; Yuji ; et al. | 2013-10-31 |
| Silicon carbide semiconductor device comprising silicon carbide layer and method of manufacturing the same Grant 8,252,672 - Watanabe , et al. August 28, 2 | 2012-08-28 |
| Silicon Carbide Semiconductor Device Comprising Silicon Carbide Layer And Method Of Manufacturing The Same App 20090250705 - WATANABE; Tomokatsu ; et al. | 2009-10-08 |
| Stress adjustment method of X-ray mask Grant 6,265,113 - Yabe , et al. July 24, 2 | 2001-07-24 |
| Method of manufacturing X-ray mask and heating apparatus Grant 5,953,492 - Yabe , et al. September 14, 1 | 1999-09-14 |
| Method of making X-ray mask having reduced stress Grant 5,677,090 - Marumoto , et al. October 14, 1 | 1997-10-14 |
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