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Patent applications and USPTO patent grants for Axcells Technologies, Inc..The latest application filed is for "fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam".
Patent | Date |
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Fluorine Based Molecular Co-gas When Running Dimethylaluminum Chloride As A Source Material To Generate An Aluminum Ion Beam App 20220139664 - Colvin; Neil K. ;   et al. | 2022-05-05 |
Low Conductance Self-shielding Insulator For Ion Implantation Systems App 20180350553 - Baggett; John F. ;   et al. | 2018-12-06 |
Ion source cathode shield Grant 9,941,087 - Colvin , et al. April 10, 2 | 2018-04-10 |
Angular scanning using angular energy filter Grant 9,455,116 - Jen , et al. September 27, 2 | 2016-09-27 |
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