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Oxide sintered body and method for manufacturing the same, sputtering target, and semiconductor device Grant 10,811,238 - Miyanaga , et al. October 20, 2 | 2020-10-20 |
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Oxide sintered material, method of producing oxide sintered material, sputtering target, and method of producing semiconductor device Grant 10,655,213 - Miyanaga , et al. | 2020-05-19 |
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Oxide Sintered Body And Method For Manufacturing The Same, Sputtering Target, And Semiconductor Device App 20190259588 - Miyanaga; Miki ;   et al. | 2019-08-22 |
Aqueous Solution Composition and Method for Manufacturing the Same, Oxide Powder and Method for Manufacturing the Same, Carbide App 20190194784 - Onoki; Takamasa ;   et al. | 2019-06-27 |
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Oxide sintered body and method for manufacturing the same, sputtering target, and semiconductor device Grant 10262844 - | 2019-04-16 |
Oxide semiconductor film including indium, tungsten and zinc and thin film transistor device Grant 10,192,994 - Miyanaga , et al. Ja | 2019-01-29 |
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Feeding mechanism for continuous processing of elongate base material, processing apparatus and thin film forming apparatus using the same, and elongate member produced thereby App 20080083506 - Awata; Hideaki ;   et al. | 2008-04-10 |
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