| Patent | Date |
|---|
Forming method and forming apparatus of carbon nanotubes
Grant 9,564,589 - Awano , et al. February 7, 2 | 2017-02-07 |
Deposition Method And A Deposition Apparatus Of Fine Particles, A Forming Method And A Forming Apparatus Of Carbon Nanotubes, And A Semiconductor Device And A Manufacturing Method Of The Same
App 20150207074 - Awano; Yuji ; et al. | 2015-07-23 |
Manufacturing method of semiconductor device
Grant 9,017,636 - Awano , et al. April 28, 2 | 2015-04-28 |
Wiring structure and method of forming the same
Grant 8,533,945 - Nihei , et al. September 17, 2 | 2013-09-17 |
Method of manufacturing carbon cylindrical structures and biopolymer detection device
Grant 8,535,635 - Awano , et al. September 17, 2 | 2013-09-17 |
Deposition Method And A Deposition Apparatus Of Fine Particles, A Forming Method And A Forming Apparatus Of Carbon Nanotubes, And A Semiconductor Device And A Manufacturing Method Of The Same
App 20130109170 - Awano; Yuji ; et al. | 2013-05-02 |
Semiconductor package and method of manufacturing the same
Grant 8,293,577 - Awano , et al. October 23, 2 | 2012-10-23 |
Method of manufacturing carbon nanotube
Grant 8,277,770 - Awano , et al. October 2, 2 | 2012-10-02 |
Integrated circuit device and method of producing the same
Grant 7,923,283 - Awano April 12, 2 | 2011-04-12 |
Semiconductor package and method of manufacturing the same
App 20110021016 - Awano; Yuji ; et al. | 2011-01-27 |
Semiconductor package and method of manufacturing the same
Grant 7,830,009 - Awano , et al. November 9, 2 | 2010-11-09 |
Deposition Method And A Deposition Apparatus Of Fine Particles, A Forming Method And A Forming Apparatus Of Carbon Nanotubes, And A Semiconductor Device And A Manufacturing Method Of The Same
App 20100244262 - Awano; Yuji ; et al. | 2010-09-30 |
Semiconductor device and manufacturing method thereof
Grant 7,786,487 - Nihei , et al. August 31, 2 | 2010-08-31 |
Field effect transistor using carbon nanotube of two or more walls having the outer walls at the gate and source/drain regions removed
Grant 7,755,115 - Awano July 13, 2 | 2010-07-13 |
Method of manufacturing carbon cylindrical structures and biopolymer detection device
App 20100124529 - Awano; Yuji ; et al. | 2010-05-20 |
Electron device and process of manufacturing thereof
Grant 7,696,512 - Awano , et al. April 13, 2 | 2010-04-13 |
Semiconductor device with semiconductor chips mounted on mounting board via conductive anaotubes
Grant 7,633,148 - Awano , et al. December 15, 2 | 2009-12-15 |
Method of manufacturing carbon nanotube
App 20090136412 - Awano; Yuji ; et al. | 2009-05-28 |
Field Effect Transistor Using Carbon Nanotube, Method Of Fabricating Same, And Sensor
App 20090072223 - AWANO; Yuji | 2009-03-19 |
Wiring Structure And Method Of Forming The Same
App 20080236875 - NIHEI; Mizuhisa ; et al. | 2008-10-02 |
Substrate structure and manufacturing method of the same
Grant 7,417,320 - Kawabata , et al. August 26, 2 | 2008-08-26 |
Semiconductor package and method of manufacturing the same
App 20080169563 - Awano; Yuji ; et al. | 2008-07-17 |
Integrated Circuit Device And Method Of Producing The Same
App 20080111164 - AWANO; Yuji | 2008-05-15 |
Integrated circuit device and method of producing the same
Grant 7,332,810 - Awano February 19, 2 | 2008-02-19 |
Carbon nanotubes, process for their production, and catalyst for production of carbon nanotubes
Grant 7,311,889 - Awano , et al. December 25, 2 | 2007-12-25 |
Semiconductor device with semiconductor chips mounted on mounting board
App 20070267735 - Awano; Yuji ; et al. | 2007-11-22 |
Carbon Nanotubes, Process For Their Production, And Catalyst For Production Of Carbon Nanotubes
App 20070253889 - Awano; Yuji ; et al. | 2007-11-01 |
Substrate structure and manufacturing method of the same
App 20060290003 - Kawabata; Akio ; et al. | 2006-12-28 |
Integrated circuit device and method of producing the same
App 20060226551 - Awano; Yuji | 2006-10-12 |
Integrated circuit device and method of producing the same
Grant 7,084,507 - Awano August 1, 2 | 2006-08-01 |
Semiconductor device, method for fabricating the semiconductor device and semiconductor integrated circuit
Grant 6,885,041 - Awano April 26, 2 | 2005-04-26 |
Semiconductor device and manufacturing method thereof
App 20050067693 - Nihei, Mizuhisa ; et al. | 2005-03-31 |
Semiconductor device and method for fabricating the same
Grant 6,800,886 - Awano October 5, 2 | 2004-10-05 |
Electron device and process of manufacturing thereof
App 20030214054 - Awano, Yuji ; et al. | 2003-11-20 |
Semiconductor device and method for fabricating the same
App 20030209802 - Awano, Yuji | 2003-11-13 |
Method of manufacturing carbon cylindrical structures and biopolymer detection device
App 20030124717 - Awano, Yuji ; et al. | 2003-07-03 |
Semiconductor device, method for fabricating the semiconductor device and semiconductor integrated circuit
App 20030094637 - Awano, Yuji | 2003-05-22 |
Semiconductor device, method for fabricating the semiconductor device and semiconductor integrated circuit
Grant 6,509,586 - Awano January 21, 2 | 2003-01-21 |
Integrated circuit device and method of producing the same
App 20020163079 - Awano, Yuji | 2002-11-07 |
Semiconductor device, method for fabricating the semiconductor device and semiconductor integrated circuit
App 20010028067 - Awano, Yuji | 2001-10-11 |
Method for fabricating a semiconductor device having a vertical channel of carriers
Grant 5,296,390 - Awano March 22, 1 | 1994-03-22 |
Compound semiconductor device and a manufacturing method thereof
Grant 5,024,958 - Awano June 18, 1 | 1991-06-18 |
Complementary semiconductor device
Grant 4,994,866 - Awano February 19, 1 | 1991-02-19 |
Semiconductor device having level shift diode
Grant 4,963,948 - Awano October 16, 1 | 1990-10-16 |
Constant current semiconductor device
Grant 4,914,489 - Awano April 3, 1 | 1990-04-03 |
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