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Patent applications and USPTO patent grants for Aviza Technology Limited.The latest application filed is for "plasma sources".
Patent | Date |
---|---|
Methods and apparatus for sputtering Grant 8,585,873 - Ford , et al. November 19, 2 | 2013-11-19 |
Method of processing substrates Grant 8,486,198 - Appleyard , et al. July 16, 2 | 2013-07-16 |
Ion deposition apparatus having rotatable carousel for supporting a plurality of targets Grant 8,425,741 - Proudfoot , et al. April 23, 2 | 2013-04-23 |
Plasma sources Grant 8,400,063 - Proudfoot , et al. March 19, 2 | 2013-03-19 |
Ion source including separate support systems for accelerator grids Grant 8,354,652 - Proudfoot , et al. January 15, 2 | 2013-01-15 |
Method of forming amorphous TiN by thermal chemical vapor deposition (CVD) Grant 7,732,307 - Burgess , et al. June 8, 2 | 2010-06-08 |
Plasma Sources App 20100108905 - Proudfoot; Gary ;   et al. | 2010-05-06 |
Microfluidic structures and how to make them App 20100068105 - Green; Gordon R. | 2010-03-18 |
Method And Apparatus For Treating A Semi-conductor Substrate App 20090170343 - Beekman; Knut ;   et al. | 2009-07-02 |
Positive Displacement Pumping Chamber App 20080245770 - Brancher; Carl David M. ;   et al. | 2008-10-09 |
Magnet assemblies Grant 7,403,089 - Green , et al. July 22, 2 | 2008-07-22 |
Method of forming a substantially closed void Grant 7,351,669 - MacNeil April 1, 2 | 2008-04-01 |
Method of processing a workpiece Grant 7,282,158 - Burgess , et al. October 16, 2 | 2007-10-16 |
Forming low k dielectric layers Grant 7,205,246 - MacNeil , et al. April 17, 2 | 2007-04-17 |
Method of forming a diffusion barrier Grant 7,202,167 - Beekmann , et al. April 10, 2 | 2007-04-10 |
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