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Patent applications and USPTO patent grants for Augustyn; Walter H..The latest application filed is for "system and method to align and measure alignment patterns on multiple layers".
Patent | Date |
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System and Method to Align and Measure Alignment Patterns on Multiple Layers App 20080198363 - Raval; Pankaj ;   et al. | 2008-08-21 |
System and method using visible and infrared light to align and measure alignment patterns on multiple layers Grant 7,365,848 - Raval , et al. April 29, 2 | 2008-04-29 |
Diffuser plate and method of making same Grant 7,164,534 - Augustyn , et al. January 16, 2 | 2007-01-16 |
System and method using visible and infrared light to align and measure alignment patterns on multiple layers App 20060115956 - Raval; Pankaj ;   et al. | 2006-06-01 |
Diffuser plate and method of making same Grant 7,002,747 - Augustyn , et al. February 21, 2 | 2006-02-21 |
Diffuser plate and method of making same App 20050248743 - Augustyn, Walter H. ;   et al. | 2005-11-10 |
Diffuser plate and method of making same App 20040136075 - Augustyn, Walter H. ;   et al. | 2004-07-15 |
Optical phase decoder for interferometers Grant 4,702,603 - Augustyn October 27, 1 | 1987-10-27 |
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