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Patent applications and USPTO patent grants for Augustyn; Walter.The latest application filed is for "advanced illumination system for use in microlithography".
Patent | Date |
---|---|
Advanced Illumination System for Use in Microlithography App 20070146674 - Oskotsky; Mark ;   et al. | 2007-06-28 |
Advanced illumination system for use in microlithography Grant 7,187,430 - Oskotsky , et al. March 6, 2 | 2007-03-06 |
System and method for laser beam expansion Grant 7,006,198 - Augustyn , et al. February 28, 2 | 2006-02-28 |
System and method for laser beam expansion App 20050083505 - Augustyn, Walter ;   et al. | 2005-04-21 |
Advanced illumination system for use in microlithography App 20040263821 - Oskotsky, Mark ;   et al. | 2004-12-30 |
System and method for laser beam expansion Grant 6,819,402 - Augustyn , et al. November 16, 2 | 2004-11-16 |
Advanced illumination system for use in microlithography Grant 6,813,003 - Oskotsky , et al. November 2, 2 | 2004-11-02 |
Advanced illumination system for use in microlithography Grant 6,775,069 - Oskotsky , et al. August 10, 2 | 2004-08-10 |
Advanced illumination system for use in microlithography App 20030227609 - Oskotsky, Mark ;   et al. | 2003-12-11 |
System and method for laser beam expansion App 20030117606 - Augustyn, Walter ;   et al. | 2003-06-26 |
Advanced illumination system for use in microlithography App 20030076679 - Oskotsky, Mark ;   et al. | 2003-04-24 |
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