Patent | Date |
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High-power radio-frequency spiral-coil filter Grant 10,812,033 - O'Brien , et al. October 20, 2 | 2020-10-20 |
High-power Radio-frequency Spiral-coil Filter App 20190207579 - O'Brien; Sean Kelly ;   et al. | 2019-07-04 |
Hollow RF feed with coaxial DC power feed Grant 10,153,136 - Augustino , et al. Dec | 2018-12-11 |
Hollow Rf Feed With Coaxial Dc Power Feed App 20170040148 - Augustino; Jason ;   et al. | 2017-02-09 |
Processing chamber with features from side wall Grant 9,484,243 - Larson , et al. November 1, 2 | 2016-11-01 |
Lower electrode assembly of plasma processing chamber Grant 9,412,555 - Augustino , et al. August 9, 2 | 2016-08-09 |
Processing Chamber With Features From Side Wall App 20150303085 - LARSON; Dean J. ;   et al. | 2015-10-22 |
Showerhead electrode assembly with gas flow modification for extended electrode life Grant 9,093,483 - Augustino , et al. July 28, 2 | 2015-07-28 |
Annular Baffle For Pumping From Above A Plane Of The Semiconductor Wafer Support App 20150155187 - Shareef; Iqbal ;   et al. | 2015-06-04 |
Showerhead Electrode Assembly With Gas Flow Modification For Extended Electrode Life App 20140187049 - Augustino; Jason ;   et al. | 2014-07-03 |
Upper electrode backing member with particle reducing features Grant 8,709,202 - De La Llera , et al. April 29, 2 | 2014-04-29 |
Showerhead electrode assembly with gas flow modification for extended electrode life Grant 8,702,866 - Augustino , et al. April 22, 2 | 2014-04-22 |
Quartz window for a degas chamber Grant 8,603,292 - Augustino , et al. December 10, 2 | 2013-12-10 |
Ozone Plenum As Uv Shutter Or Tunable Uv Filter For Cleaning Semiconductor Substrates App 20130288488 - Wang; Yen-Kun Victor ;   et al. | 2013-10-31 |
Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates Grant 8,492,736 - Wang , et al. July 23, 2 | 2013-07-23 |
Peripherally engaging electrode carriers and assemblies incorporating the same Grant 8,276,604 - Augustino , et al. October 2, 2 | 2012-10-02 |
Cleaning of bonded silicon electrodes Grant 8,221,552 - Outka , et al. July 17, 2 | 2012-07-17 |
Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses Grant 8,215,321 - Shih , et al. July 10, 2 | 2012-07-10 |
Backside mounted electrode carriers and assemblies incorporating the same Grant 8,171,877 - Augustino , et al. May 8, 2 | 2012-05-08 |
Backside Mounted Electrode Carriers And Assemblies Incorporating The Same App 20120013242 - Augustino; Jason ;   et al. | 2012-01-19 |
Ozone Plenum As Uv Shutter Or Tunable Uv Filter For Cleaning Semiconductor Substrates App 20110306213 - Wang; Yen-Kun Victor ;   et al. | 2011-12-15 |
Methods And Apparatus For Wet Cleaning Electrode Assemblies For Plasma Processing Apparatuses App 20110180117 - Shih; Hong ;   et al. | 2011-07-28 |
Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses Grant 7,942,973 - Shih , et al. May 17, 2 | 2011-05-17 |
Quartz Window For A Degas Chamber App 20110097900 - Augustino; Jason ;   et al. | 2011-04-28 |
Upper Electrode Backing Member With Particle Reducing Features App 20110086513 - De La Llera; Anthony ;   et al. | 2011-04-14 |
Upper electrode backing member with particle reducing features Grant 7,854,820 - De La Llera , et al. December 21, 2 | 2010-12-21 |
Cleaning hardware kit for composite showerhead electrode assemblies for plasma processing apparatuses Grant 7,767,028 - Augustino , et al. August 3, 2 | 2010-08-03 |
Lower Electrode Assembly Of Plasma Processing Chamber App 20100108261 - Augustino; Jason ;   et al. | 2010-05-06 |
Peripherally Engaging Electrode Carriers And Assemblies Incorporating The Same App 20090321018 - Augustino; Jason ;   et al. | 2009-12-31 |
Backside Mounted Electrode Carriers And Assemblies Incorporating The Same App 20090322199 - Augustino; Jason ;   et al. | 2009-12-31 |
Cleaning of bonded silicon electrodes App 20080236618 - Outka; Duane ;   et al. | 2008-10-02 |
Cleaning hardware kit for composite showerhead electrode assemblies for plasma processing apparatuses App 20080223401 - Augustino; Jason ;   et al. | 2008-09-18 |
Showerhead electrode assembly with gas flow modification for extended electrode life App 20080141941 - Augustino; Jason ;   et al. | 2008-06-19 |
Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses App 20080092920 - Shih; Hong ;   et al. | 2008-04-24 |
Upper electrode backing member with particle reducing features App 20080090417 - De La Llera; Anthony ;   et al. | 2008-04-17 |