Augason; Calvin R.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Augason; Calvin R..The latest application filed is for "load lock chamber designs for high-throughput processing system".
- Augason; Calvin R. - Los Altos CA
| Patent | Date |
|---|---|
| Load lock chamber designs for high-throughput processing system Grant 9,022,715 - Polyak , et al. May 5, 2 | 2015-05-05 |
| Load Lock Chamber Designs For High-throughput Processing System App 20140079514 - POLYAK; Alexander S. ; et al. | 2014-03-20 |
| Apparatus for improved remote microwave plasma source for use with substrate processing systems App 20010042513 - Kao, Chien-Teh ; et al. | 2001-11-22 |
| Method for improved remote microwave plasma source for use with substrate processing system Grant 6,271,148 - Kao , et al. August 7, 2 | 2001-08-07 |
| Apparatus for improved remote microwave plasma source for use with substrate processing systems Grant 6,026,762 - Kao , et al. February 22, 2 | 2000-02-22 |
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