Aubele; Karl-Eugen

Patent Applications and Registrations

Patent applications and USPTO patent grants for Aubele; Karl-Eugen.The latest application filed is for "method for moving an optical element of a projection exposure apparatus for microlithography".

Company Profile

0.18.13

Aubele; Karl-Eugen - Geislingen/Steige DE
Aubele; Karl-Eugen - Geislingen DE
Aubele; Karl-Eugen - D-73312 Geislingen DE
Aubele; Karl-Eugen - Gussenstadt DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for moving an optical element of a projection exposure apparatus for microlithography Grant 8,879,046 - Aubele , et al. November 4, 2	2014-11-04
Positioning method for an optical arrangement of a projection illumination system Grant 8,810,934 - Aubele , et al. August 19, 2	2014-08-19
Method For Moving An Optical Element Of A Projection Exposure Apparatus For Microlithography App 20140078487 - Aubele; Karl-Eugen ; et al.	2014-03-20
Optical assembly Grant 8,570,676 - Bieg , et al. October 29, 2	2013-10-29
Imaging device in a projection exposure facility Grant 8,514,371 - Hummel , et al. August 20, 2	2013-08-20
Positioning Method For An Optical Arrangement Of A Projection Illumination System App 20110235005 - Aubele; Karl-Eugen ; et al.	2011-09-29
Imaging Device In A Projection Exposure Facility App 20110199597 - Hummel; Wolfgang ; et al.	2011-08-18
Optical Assembly App 20110181857 - Bieg; Hermann ; et al.	2011-07-28
Imaging device in a projection exposure facility Grant 7,961,294 - Hummel , et al. June 14, 2	2011-06-14
Optical assembly Grant 7,929,227 - Bieg , et al. April 19, 2	2011-04-19
Optical Assembly App 20100271607 - Bieg; Hermann ; et al.	2010-10-28
Optical assembly Grant 7,791,826 - Bieg , et al. September 7, 2	2010-09-07
Imaging device in a projection exposure machine Grant 7,710,542 - Hummel , et al. May 4, 2	2010-05-04
Method and a device for positioning an element in an optical system Grant 7,684,131 - Aubele March 23, 2	2010-03-23
Imaging Device in a Projection Exposure Machine App 20090141258 - Back; Stephan ; et al.	2009-06-04
Imaging Device In A Projection Exposure Facility App 20090040487 - Hummel; Wolfgang ; et al.	2009-02-12
Imaging device in a projection exposure machine Grant 7,486,382 - Back , et al. February 3, 2	2009-02-03
Imaging Device In A Projection Exposure Machine App 20080174757 - Hummel; Wolfgang ; et al.	2008-07-24
Optical Assembly App 20080170303 - Bieg; Hermann ; et al.	2008-07-17
Method And A Device For Positioning An Element In An Optical System App 20080080070 - Aubele; Karl-Eugen	2008-04-03
Imaging device in a projection exposure facility Grant 7,304,717 - Hummel , et al. December 4, 2	2007-12-04
Imaging device in a projection exposure machine App 20060164619 - Back; Stephan ; et al.	2006-07-27
Imaging device in a projection exposure facility App 20040263812 - Hummel, Wolfgang ; et al.	2004-12-30
Method for dynamic manipulation of a position of a module in an optical system Grant 6,759,670 - Aubele July 6, 2	2004-07-06
Method for dynamic manipulation of a position of a module in an optical system App 20020074529 - Aubele, Karl-Eugen	2002-06-20
Coordinate measurement machine having a probe head and an electronic system for processing probe signals Grant 5,526,576 - Fuchs , et al. June 18, 1	1996-06-18
Control for coordinate measuring instruments Grant 4,769,763 - Trieb , et al. September 6, 1	1988-09-06
Method and means for measuring guidance errors at one or more points along the length of a displacement-measuring system Grant 4,758,720 - Aubele , et al. July 19, 1	1988-07-19

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