Atwell; David R.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Atwell; David R..The latest application filed is for "chemical vaporizer for material deposition systems and associated methods".

Company Profile

0.12.6

Atwell; David R. - Boise ID
Atwell, David R. - Gales Ferry CT

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Chemical Vaporizer For Material Deposition Systems And Associated Methods App 20140026925 - Marsh; Eugene P. ; et al.	2014-01-30
Chemical vaporizer for material deposition systems and associated methods Grant 8,551,564 - Marsh , et al. October 8, 2	2013-10-08
Chemical Vaporizer For Material Deposition Systems And Associated Methods App 20120289059 - Marsh; Eugene P. ; et al.	2012-11-15
Chemical vaporizer for material deposition systems and associated methods Grant 8,225,745 - Marsh , et al. July 24, 2	2012-07-24
Chemical Vaporizer For Material Deposition Systems And Associated Methods App 20110124201 - Marsh; Eugene P. ; et al.	2011-05-26
Chemical vaporizer for material deposition systems and associated methods Grant 7,883,745 - Marsh , et al. February 8, 2	2011-02-08
System and method for recirculating fluid supply for an injector for a semiconductor fabrication chamber Grant 7,789,319 - Marsh , et al. September 7, 2	2010-09-07
Chemical Vaporizer For Material Deposition Systems And Associated Methods App 20090035465 - Marsh; Eugene P. ; et al.	2009-02-05
System And Method For Recirculating Fluid Supply For An Injector For A Semiconductor Fabrication Chamber App 20070266941 - Marsh; Eugene P. ; et al.	2007-11-22
Rolling element bearing arrangement App 20020186911 - Van Dine, Pieter ; et al.	2002-12-12
Electrostatic method and apparatus for vaporizing precursors and system for using same Grant 6,280,793 - Atwell , et al. August 28, 2	2001-08-28
Semiconductor wafer processor, semiconductor processor gas filtering system and semiconductor processing methods Grant 6,206,970 - Atwell March 27, 2	2001-03-27
Solid precursor injector apparatus Grant 6,072,939 - Atwell June 6, 2	2000-06-06
Method of reducing carbon incorporation into films produced by chemical vapor deposition involving titanium organometallic and metal-organic precursor compounds Grant 5,902,651 - Westmoreland , et al. May 11, 1	1999-05-11
Solid precursor injector apparatus and method Grant 5,764,849 - Atwell June 9, 1	1998-06-09
Method of reducing carbon incorporation into films produced by chemical vapor deposition involving titanium organometallic and metal-organic precursor compounds Grant 5,693,377 - Westmoreland , et al. December 2, 1	1997-12-02
Vapor delivery system for solid precursors and method regarding same Grant 5,674,574 - Atwell , et al. October 7, 1	1997-10-07

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