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Patent applications and USPTO patent grants for Atsumi; Niichi.The latest application filed is for "light source unit and wavelength stabilizing control method, exposure apparatus and exposure method, method of making exposure apparatus, and device manufacturing method and device".
Patent | Date |
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Light source unit and wavelength stabilizing control method, exposure apparatus and exposure method, method of making exposure apparatus, and device manufacturing method and device Grant 7,098,992 - Ohtsuki , et al. August 29, 2 | 2006-08-29 |
Light source unit and wavelength stabilizing control method, exposure apparatus and exposure method, method of making exposure apparatus, and device manufacturing method and device App 20040012844 - Ohtsuki, Tomoko ;   et al. | 2004-01-22 |
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