Atkins; Phillip
Patent Applications and Registrations
Patent applications and USPTO patent grants for Atkins; Phillip.The latest application filed is for "scatterometry modeling in the presence of undesired diffraction orders".
- Atkins; Phillip - San Jose CA
| Patent | Date |
|---|---|
| Scatterometry modeling in the presence of undesired diffraction orders Grant 11,422,095 - Atkins , et al. August 23, 2 | 2022-08-23 |
| Measurement methodology of advanced nanostructures Grant 11,156,548 - Nguyen , et al. October 26, 2 | 2021-10-26 |
| Scatterometry Modeling in the Presence of Undesired Diffraction Orders App 20200232909 - Atkins; Phillip ; et al. | 2020-07-23 |
| Measurement Methodology of Advanced Nanostructures App 20190178788 - Nguyen; Manh ; et al. | 2019-06-13 |
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