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Patent applications and USPTO patent grants for Athreya; Shankarram A..The latest application filed is for "ald metal oxide deposition process using direct oxidation".
Patent | Date |
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ALD metal oxide deposition process using direct oxidation Grant 7,569,501 - Metzner , et al. August 4, 2 | 2009-08-04 |
ALD metal oxide deposition process using direct oxidation Grant 7,569,500 - Metzner , et al. August 4, 2 | 2009-08-04 |
Ald Metal Oxide Deposition Process Using Direct Oxidation App 20070059948 - Metzner; Craig R. ;   et al. | 2007-03-15 |
Ald Metal Oxide Deposition Process Using Direct Oxidation App 20060223339 - Metzner; Craig R. ;   et al. | 2006-10-05 |
ALD metal oxide deposition process using direct oxidation Grant 7,067,439 - Metzner , et al. June 27, 2 | 2006-06-27 |
ALD metal oxide deposition process using direct oxidation App 20030232511 - Metzner, Craig R. ;   et al. | 2003-12-18 |
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