Athavale, Satish D.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Athavale, Satish D..The latest application filed is for "method for forming a (111) oriented bsto thin film layer for high dielectric constant capacitors".

Company Profile

0.5.5

Athavale, Satish D. - Fishkill NY

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for forming a (111) oriented BSTO thin film layer for high dielectric constant capacitors App 20050196917 - Lian, Jingyu ; et al.	2005-09-08
Methods of patterning a multi-layer film stack and forming a lower electrode of a capacitor Grant 6,670,233 - Athavale , et al. December 30, 2	2003-12-30
Methods of patterning a multi-layer film stack and forming a lower electrode of a capacitor App 20030143803 - Athavale, Satish D. ; et al.	2003-07-31
Methods of patterning a multi-layer film stack and forming a lower electrode of a capacitor Grant 6,559,001 - Athavale , et al. May 6, 2	2003-05-06
Methods of patterning a multi-layer film stack and forming a lower electrode of a capacitor App 20020192900 - Athavale, Satish D. ; et al.	2002-12-19
Structure and process for buried bitline and single sided buried conductor formation App 20020130346 - Athavale, Satish D. ; et al.	2002-09-19
Method for removal of hard mask used to define noble metal electrode Grant 6,420,272 - Shen , et al. July 16, 2	2002-07-16
Process for 4F2 STC cell having vertical MOSFET and buried-bitline conductor structure Grant 6,348,374 - Athavale , et al. February 19, 2	2002-02-19
Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing Grant 6,346,428 - Athavale , et al. February 12, 2	2002-02-12
Method Of Plasma Etching Thin Films Of Difficult To Dry Etch Materials App 20010053610 - ATHAVALE, SATISH D. ; et al.	2001-12-20

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