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Patent applications and USPTO patent grants for Atarashi; Takuji.The latest application filed is for "polishing end point detection method utilizing torque change and device thereof".
Patent | Date |
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Polishing end point detection method utilizing torque change and device thereof Grant 8,065,031 - Fujita , et al. November 22, 2 | 2011-11-22 |
Polishing end point detection method utilizing torque change and device thereof App 20080071414 - Fujita; Takashi ;   et al. | 2008-03-20 |
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