| Patent | Date |
|---|
Non-dripping nozzle apparatus
Grant 7,306,114 - Nguyen December 11, 2 | 2007-12-11 |
Optical cube
App 20040179260 - Edlou, Samad M. ; et al. | 2004-09-16 |
Method, system, and computer program product for improved trajectory planning and execution
App 20040098160 - Galburt, Daniel ; et al. | 2004-05-20 |
Modular fluid delivery apparatus
Grant 6,729,353 - Nguyen May 4, 2 | 2004-05-04 |
Method and apparatus for cooling a reticle during lithographic exposure
App 20040079518 - del Puerto, Santiago ; et al. | 2004-04-29 |
Cube and method of making same
App 20040061116 - Edlou, Samad M. ; et al. | 2004-04-01 |
Method for protection of adhesives used to secure optics from ultra-violet light
App 20040058061 - Lipson, Matthew ; et al. | 2004-03-25 |
Reticle focus measurement method using multiple interferometric beams
App 20040048400 - Roux, Stephen ; et al. | 2004-03-11 |
Method and system for correction of intrinsic birefringence in UV microlithography
App 20040021943 - Sewell, Harry | 2004-02-05 |
System and method for laser beam expansion without expanding spatial coherence
App 20040021842 - Kremer, Alexander ; et al. | 2004-02-05 |
Lithography tool having a vacuum reticle library coupled to a vacuum chamber
App 20040019408 - del Puerto, Santiago ; et al. | 2004-01-29 |
Chemical mechanical polishing of copper-oxide damascene structures
Grant 6,667,239 - Saka , et al. December 23, 2 | 2003-12-23 |
Method and apparatus for managing actinic intensity transients in a lithography mirror
App 20030231415 - Puerto, Santiago del | 2003-12-18 |
Advanced illumination system for use in microlithography
App 20030227609 - Oskotsky, Mark ; et al. | 2003-12-11 |
Low .kappa. dielectric inorganic/organic hybrid films and method of making
Grant 6,660,391 - Rose , et al. December 9, 2 | 2003-12-09 |
Catadioptric lithography system and method with reticle stage orthogonal to wafer stage
App 20030223125 - Sewell, Harry ; et al. | 2003-12-04 |
System and method for improving linewidth control in a lithography device by varying the angular distribution of light in an illuminator as a function of field position
App 20030197842 - Tsacoyeanes, James G. ; et al. | 2003-10-23 |
System and method for improving line width control in a lithography device using an illumination system having pre-numerical aperture control
App 20030197846 - Coston, Scott D. ; et al. | 2003-10-23 |
Method, system, and apparatus for management of reaction loads in a lithography system
App 20030174304 - Galburt, Daniel N. | 2003-09-18 |
Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system
Grant 6,610,150 - Savage , et al. August 26, 2 | 2003-08-26 |
Method and apparatus for transferring and loading a reticle with a robotic reticle end-effector
App 20030129051 - Friedman, Glenn M. ; et al. | 2003-07-10 |
System and method for laser beam expansion
App 20030117606 - Augustyn, Walter ; et al. | 2003-06-26 |
Hot wall rapid thermal processor
App 20030089698 - Ratliff, Christopher T. ; et al. | 2003-05-15 |
Chemical mechanical polishing of copper-oxide damascene structures
App 20030082904 - Saka, Nanaji ; et al. | 2003-05-01 |
Flexible piezoelectric chuck and method of using the same
Grant 6,556,281 - Govil , et al. April 29, 2 | 2003-04-29 |
Advanced illumination system for use in microlithography
App 20030076679 - Oskotsky, Mark ; et al. | 2003-04-24 |
Method and system for in-situ cleaning of semiconductor manufacturing equipment using combination chemistries
Grant 6,544,345 - Mayer , et al. April 8, 2 | 2003-04-08 |
Protective shield and system for gas distribution
App 20030061991 - Mattson, Colby ; et al. | 2003-04-03 |
Device for handling wafers in microelectronic manufacturing
Grant 6,533,531 - Nguyen , et al. March 18, 2 | 2003-03-18 |
Hot wall rapid thermal processor
App 20030024920 - Ratliff, Christopher T. ; et al. | 2003-02-06 |
Systems and methods for exposing substrate periphery
Grant 6,509,577 - Babikian , et al. January 21, 2 | 2003-01-21 |
Method and apparatus for a reticle with purged pellicle-to-reticle gap
Grant 6,507,390 - Ivaldi January 14, 2 | 2003-01-14 |
Method, system, and computer program product for determining refractive index distribution
App 20020191193 - Smirnov, Stanislav ; et al. | 2002-12-19 |
In-situ method and apparatus for end point detection in chemical mechanical polishing
Grant 6,476,921 - Saka , et al. November 5, 2 | 2002-11-05 |
Apparatus for optical beam shaping and diffusing and associated methods
App 20020159152 - Hansen, Matthew E. | 2002-10-31 |
Inertial temperature control system and method
App 20020143426 - Starner, Alan L. | 2002-10-03 |
Method and system for dual reticle image exposure
App 20020123012 - Sewell, Harry | 2002-09-05 |
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