| Patent | Date |
|---|
Method For Determining Curvilinear Patterns For Patterning Device
App 20220121804 - Zhang; Quan ; et al. | 2022-04-21 |
Methods For Generating Characteristic Pattern And Training Machine Learning Model
App 20210357566 - SIMMONS; Mark Christopher ; et al. | 2021-11-18 |
Apparatus For Positioning And Clamped Curing
App 20210271159 - PETERS; Martin Dieter Nico ; et al. | 2021-09-02 |
Inspection Method And System
App 20200302587 - FANG; Wei ; et al. | 2020-09-24 |
Lithographic apparatus and associated method
Grant 10,599,040 - Weidman , et al. | 2020-03-24 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method
App 20190056216 - PELLEMANS; Henricus Petrus Maria ; et al. | 2019-02-21 |
Methods For Identifying A Process Window Boundary
App 20180329311 - CHEONG; Lin Lee ; et al. | 2018-11-15 |
A Method For Manufacturing A Membrane Assembly
App 20180321603 - OOSTERHOFF; Sicco ; et al. | 2018-11-08 |
Lithographic Apparatus
App 20180224755 - BUTLER; Hans | 2018-08-09 |
Lithographic Apparatus, Object Positioning System And Device Manufacturing Method
App 20180149986 - DE WIT; Paul Corne Henri ; et al. | 2018-05-31 |
Radiation source
Grant 9,835,950 - Eurlings , et al. December 5, 2 | 2017-12-05 |
Radiation Conditioning System, Illumination System And Metrology Apparatus, Device Manufacturing Method
App 20170329232 - GOORDEN; Sebastianus Adrianus ; et al. | 2017-11-16 |
Stage system and a lithographic apparatus
Grant 9,726,985 - Van De Ven , et al. August 8, 2 | 2017-08-08 |
Lithographic apparatus and device manufacturing method
Grant 9,477,160 - Streefkerk , et al. October 25, 2 | 2016-10-25 |
Methodology To Generate A Guiding Template For Directed Self-assembly
App 20160266486 - WUISTER; Sander Frederik ; et al. | 2016-09-15 |
Radiation Source And Lithographic Apparatus
App 20160195819 - NOORDMAN; Oscar Franciscus Jozephus ; et al. | 2016-07-07 |
Metrology Method and Apparatus, Substrate, Lithographic System and Device Manufacturing Method
App 20150138523 - Jak; Martin Jacobus Johan ; et al. | 2015-05-21 |
Methods For Providing Spaced Lithography Features On A Substrate By Self-assembly Of Block Copolymers
App 20150064915 - Wuister; Sander Frederik | 2015-03-05 |
Radiation Source and Lithographic Apparatus
App 20150015863 - Kempen; Antonius Theodorus Wilhelmus ; et al. | 2015-01-15 |
Radiation Source
App 20140253894 - Van Schoot; Jan Bernard Plechelmus ; et al. | 2014-09-11 |
Cooling arrangement and lithographic apparatus comprising a resilient wall creating a gap between a detector module housing and a heat sink of the cooling arrangement
Grant 8,817,228 - Knarren , et al. August 26, 2 | 2014-08-26 |
Lithographic Apparatus And Device Manufacturing Method
App 20140152969 - Bleeker; Arno Jan ; et al. | 2014-06-05 |
Lithographic Apparatus And Device Manufacturing Method
App 20140098357 - STREEFKERK; Bob ; et al. | 2014-04-10 |
Lithographic Apparatus And Device Manufacturing Method
App 20130287968 - Ivanov; Vladimir Vitalevich ; et al. | 2013-10-31 |
System For Removing Contaminant Particles, Lithographic Apparatus, Method For Removing Contaminant Particles And Method For Manufacturing A Device
App 20130070218 - Ivanov; Vladimir Vitalevich ; et al. | 2013-03-21 |
Multilayer Mirror
App 20130057840 - Timoshkov; Vadim Iourievich ; et al. | 2013-03-07 |
Lithographic Apparatus And Method
App 20120281193 - Loopstra; Erik Roelof ; et al. | 2012-11-08 |
Object Inspection Systems and Methods
App 20120127467 - Ivanov; Vitalii ; et al. | 2012-05-24 |
Lithographic apparatus and device manufacturing method
Grant 7,965,380 - Bleeker , et al. June 21, 2 | 2011-06-21 |
Lithographic method
Grant 7,894,063 - Van Bilsen , et al. February 22, 2 | 2011-02-22 |
Method of Assessing a Model of a Substrate, an Inspection Apparatus and a Lithographic Apparatus
App 20110026032 - Den Boef; Arie Jeffrey ; et al. | 2011-02-03 |
Imprint lithography
Grant 7,862,756 - Wuister , et al. January 4, 2 | 2011-01-04 |
Imprint Lithography Apparatus And Method
App 20100252960 - Iosad; Nikolay ; et al. | 2010-10-07 |
Integrated circuit manufacturing methods with patterning device position determination
Grant 7,804,584 - Bartray , et al. September 28, 2 | 2010-09-28 |
Lithographic Apparatus And A Method Of Operating The Apparatus
App 20090284715 - Watso; Robert Douglas ; et al. | 2009-11-19 |
Lithographic apparatus having parts with a coated film adhered thereto
App 20080316441 - Liebregts; Paulus Martinus Maria ; et al. | 2008-12-25 |
Illumination system for illuminating a pattering device and method for manufacturing an illumination system
App 20080246940 - Van Schoot; Jan Bernard Plechelmus ; et al. | 2008-10-09 |
Humidifying apparatus, lithographic apparatus and humidifying method
App 20080179765 - Van Der Net; Antonius Johannus | 2008-07-31 |
Lithographic apparatus and lithographic apparatus cleaning method
App 20070285631 - Stavenga; Marco Koert ; et al. | 2007-12-13 |
Lithographic apparatus and device manufacturing method
App 20060256309 - Gui; Cheng-Qun ; et al. | 2006-11-16 |
Lithographic apparatus and device manufacturing method
App 20060215134 - Buurman; Erik Petrus ; et al. | 2006-09-28 |
Lithographic apparatus and device manufacturing method
App 20060132742 - Van Der Mast; Karel Diederick ; et al. | 2006-06-22 |
Lithographic apparatus and device manufacturing method
App 20060017894 - Van Empel; Tjarko Adriaan Rudolf ; et al. | 2006-01-26 |
Lithographic apparatus, article support member, and method
App 20050248746 - Zaal, Koen Jacobus Johannes Maria ; et al. | 2005-11-10 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 6,819,425 - Kwan November 16, 2 | 2004-11-16 |
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