ASML Masktooks B.V.
Patent Applications and Registrations
Patent applications and USPTO patent grants for ASML Masktooks B.V..The latest application filed is for "method, program product and apparatus for performing double exposure lithography".
- ASML Masktooks B.V. - Ah Veldhoven NL
- ASML Masktooks B.V. - Veldhoven NL
| Patent | Date |
|---|---|
| Method, program product and apparatus for performing double exposure lithography Grant 7,681,171 - Chen , et al. March 16, 2 | 2010-03-16 |
| Eigen decomposition based OPC model Grant 7,398,508 - Shi , et al. July 8, 2 | 2008-07-08 |
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