| Patent | Date |
|---|
Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects
App 20030095240 - Van Schaik, Willem ; et al. | 2003-05-22 |
Method of operating an optical imaging system, lithographic projection apparatus, device manufacturing method, and device manufactured thereby
Grant 6,563,564 - de Mol , et al. May 13, 2 | 2003-05-13 |
Method and apparatus for generating masks utilized in conjunction with dipole illumination techniques
Grant 6,553,562 - Capodieci , et al. April 22, 2 | 2003-04-22 |
Multilayer extreme ultraviolet mirrors with enhanced reflectivity
App 20030043456 - Singh, Mandeep | 2003-03-06 |
Movable support in a vacuum chamber and its application in lithographic projection apparatuses
App 20020163630 - Bisschops, Theodorus H.J. ; et al. | 2002-11-07 |
Illumination device for projection system and method for fabricating
Grant 6,466,304 - Smith October 15, 2 | 2002-10-15 |
Illumination device for projection system and method for fabricating
App 20020145720 - Smith, Bruce W. | 2002-10-10 |
Illumination device for projection system and method for fabricating
App 20020126267 - Smith, Bruce W. | 2002-09-12 |
Optical correction plate, and its application in a lithographic projection apparatus
App 20020126266 - Braat, Josephus J.M. ; et al. | 2002-09-12 |
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby
App 20020096647 - Moors, Johannes Hubertus Josephina ; et al. | 2002-07-25 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
App 20020097385 - Van Elp, Jan ; et al. | 2002-07-25 |
Lithographic apparatus, device manufacturing mehtod, and device manufactured thereby
App 20020079464 - Driessen, Johannes Cornelis ; et al. | 2002-06-27 |
Lithographic apparatus, integrated circuit device manufacturing method, and integrated circuit device manufactured thereby
App 20020060296 - Van Der Veen, Paul | 2002-05-23 |
Imaging method using phase boundary masking with modified illumination
Grant 6,388,736 - Smith , et al. May 14, 2 | 2002-05-14 |
Lithographic projection apparatus
Grant 6,384,899 - den Boef May 7, 2 | 2002-05-07 |
Lithographic projection apparatus
Grant 6,373,072 - Butler , et al. April 16, 2 | 2002-04-16 |
Optical correction plate, and its application in a lithographic projection apparatus
Grant 6,373,552 - Braat , et al. April 16, 2 | 2002-04-16 |
Method of detecting aberrations of an optical imaging system
Grant 6,368,763 - Dirksen , et al. April 9, 2 | 2002-04-09 |
Positioning device and lithographic projection apparatus comprising such a device
Grant 6,337,484 - Loopstra , et al. January 8, 2 | 2002-01-08 |
Lithographic projection apparatus with an alignment system for aligning substrate on mask
Grant 6,297,876 - Bornebroek October 2, 2 | 2001-10-02 |
Gas bearing and lithographic apparatus including such a bearing
Grant 6,296,990 - Kwan October 2, 2 | 2001-10-02 |
Positioning device having two object holders
Grant 6,262,796 - Loopstra , et al. July 17, 2 | 2001-07-17 |
Lithographic projection apparatus with improved substrate holder
Grant 6,232,615 - Van Empel May 15, 2 | 2001-05-15 |
Method and apparatus for repetitively projecting a mask pattern on a substrate, using a time-saving height measurement
Grant 6,208,407 - Loopstra March 27, 2 | 2001-03-27 |
Alignment device and lithographic apparatus comprising such a device
Grant 6,160,622 - Dirksen , et al. December 12, 2 | 2000-12-12 |
Pneumatic support device with a controlled gas supply, and lithographic device provided with such a support device
Grant 6,144,442 - 'T Mannetje , et al. November 7, 2 | 2000-11-07 |
Interferometer system with two wavelengths, and lithographic apparatus provided with such a system
Grant 6,122,058 - Van Der Werf , et al. September 19, 2 | 2000-09-19 |
Lithographic apparatus for step-and-scan imaging of mask pattern with interferometer mirrors on the mask and wafer holders
Grant 6,084,673 - Van Den Brink , et al. July 4, 2 | 2000-07-04 |
Positioning device having three coil systems mutually enclosing angles of 120.degree. and lithographic device comprising such a positioning device
Grant 6,054,784 - Sperling , et al. April 25, 2 | 2000-04-25 |
Illumination unit for an optical apparatus
Grant 6,028,660 - Van Der Laan , et al. February 22, 2 | 2000-02-22 |
Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device
Grant 5,969,441 - Loopstra , et al. October 19, 1 | 1999-10-19 |
Illumination unit having a facility for preventing contamination of optical components, and photolithographic apparatus including such an illumination unit
Grant 5,508,528 - Mulkens , et al. April 16, 1 | 1996-04-16 |
Apparatus for and method of projecting a mask pattern on a substrate
Grant 5,144,363 - Wittekoek , et al. September 1, 1 | 1992-09-01 |
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