ASM Lithography
Patent Applications and Registrations
Patent applications and USPTO patent grants for ASM Lithography.The latest application filed is for "method of and device for repetitively imaging a mask pattern on a substrate using five measuring axes".
- ASM Lithography - Veldhoven NL
- ASM Lithography - La Veldhoven NL
- ASM Lithography - New York NY
| Patent | Date |
|---|---|
| Method of and device for repetitively imaging a mask pattern on a substrate using five measuring axes Grant 5,801,832 - Van Den Brink September 1, 1 | 1998-09-01 |
| Lens system with lens elements arranged in a gas-filled holder and photolithographic apparatus including such a system Grant 5,602,683 - Straaijer , et al. February 11, 1 | 1997-02-11 |
| Apparatus for projecting a mask pattern on a substrate Grant 5,481,362 - Van Den Brink , et al. January 2, 1 | 1996-01-02 |
| Apparatus for projecting a mask pattern on a substrate Grant 5,100,237 - Wittekoek , et al. March 31, 1 | 1992-03-31 |
| Method of aligning a mask and a substrate relative to each other and arrangement for carrying out the method Grant 4,778,275 - van den Brink , et al. October 18, 1 | 1988-10-18 |
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