Patent | Date |
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Metal clamp Grant D903,477 - Goratela , et al. December 1, 2 | 2020-12-01 |
Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures Grant 10,770,286 - Woodruff , et al. Sep | 2020-09-08 |
Plasma film forming method Grant 10,734,219 - Shoji | 2020-08-04 |
Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures Grant 10,720,331 - Raisanen , et al. | 2020-07-21 |
Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures Grant 10,714,350 - Chen , et al. | 2020-07-14 |
Semiconductor reaction chamber showerhead Grant 10,714,315 - White , et al. | 2020-07-14 |
Radiation shield Grant 10,692,741 - Verbaas | 2020-06-23 |
Methods for forming a silicon germanium tin layer and related semiconductor device structures Grant 10,685,834 - Bhargava , et al. | 2020-06-16 |
Source/drain performance through conformal solid state doping Grant 10,665,452 - Xie , et al. | 2020-05-26 |
Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber Grant 10,658,205 - Sharma | 2020-05-19 |
Methods for thermally calibrating reaction chambers Grant 10,643,826 - Kim , et al. | 2020-05-05 |
Methods for forming a semiconductor device and related semiconductor device structures Grant 10,643,904 - Xie , et al. | 2020-05-05 |
Organic reactants for atomic layer deposition Grant 10,612,137 - Niskanen , et al. | 2020-04-07 |
Method for forming a semiconductor device structure comprising a gate fill metal Grant 10,607,895 - Xie , et al. | 2020-03-31 |
Chemical treatment, deposition and/or infiltration apparatus and method for using the same Grant 10,590,535 - Huggare | 2020-03-17 |
Variable conductance gas distribution apparatus and method Grant 10,561,975 - Shugrue Feb | 2020-02-18 |
Systems and methods for dynamic semiconductor process scheduling Grant 10,566,223 - Lawson , et al. Feb | 2020-02-18 |
Method for depositing a semiconductor structure on a surface of a substrate and related semiconductor structures Grant 10,535,516 - Kohen , et al. Ja | 2020-01-14 |
Cross-flow reactor and method Grant 10,529,542 - White , et al. J | 2020-01-07 |
Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures Grant 10,529,563 - Blomberg , et al. J | 2020-01-07 |
Reactor system for sublimation of pre-clean byproducts and method thereof Grant 10,519,541 - Tolle , et al. Dec | 2019-12-31 |
Plasma atomic layer deposition Grant 10,480,078 - Knoops , et al. Nov | 2019-11-19 |
Process gas management for an inductively-coupled plasma deposition reactor Grant 10,023,960 - Alokozai , et al. July 17, 2 | 2018-07-17 |
Photoactive devices and materials Grant 9,941,425 - Blomberg , et al. April 10, 2 | 2018-04-10 |
Film forming apparatus Grant 9,885,112 - Tsuji , et al. February 6, 2 | 2018-02-06 |
Substrate Processing Apparatus App 20170040204 - KIM; Soo Hyun ;   et al. | 2017-02-09 |
Process for deposition of titanium oxynitride for use in integrated circuit fabrication Grant 9,523,148 - Pore , et al. December 20, 2 | 2016-12-20 |
Deposition apparatus and deposition method Grant 9,399,819 - Cho July 26, 2 | 2016-07-26 |
Apparatus and method for pre-baking substrate upstream of process chamber Grant 9,349,620 - Kamata , et al. May 24, 2 | 2016-05-24 |
Semiconductor device dielectric interface layer Grant 9,177,784 - Raisanen , et al. November 3, 2 | 2015-11-03 |
Deposition apparatus Grant 9,120,114 - Jeong September 1, 2 | 2015-09-01 |
Silane or borane treatment of metal thin films Grant 9,111,749 - Shero , et al. August 18, 2 | 2015-08-18 |
Process gas management for an inductively-coupled plasma deposition reactor Grant 9,021,985 - Alokozai , et al. May 5, 2 | 2015-05-05 |
Metal oxide protective layer for a semiconductor device Grant 8,946,830 - Jung February 3, 2 | 2015-02-03 |
Method for stabilizing plasma ignition Grant 8,742,668 - Nakano , et al. June 3, 2 | 2014-06-03 |
Semiconductor device dielectric interface layer Grant 8,728,832 - Raisanen , et al. May 20, 2 | 2014-05-20 |
Process Gas Management for an Inductively-Coupled Plasma Deposition Reactor App 20140073143 - Alokozai; Fred ;   et al. | 2014-03-13 |
Semiconductor Device Dielectric Interface Layer App 20130292807 - Raisanen; Petri ;   et al. | 2013-11-07 |
Metal Oxide Protective Layer for a Semiconductor Device App 20130264659 - Jung; Sung-Hoon | 2013-10-10 |