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Method of forming semiconductor patterns
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Plasma processing member, deposition apparatus including the same, and depositing method using the same
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Lateral flow atomic layer deposition apparatus and atomic layer deposition method using the same
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Plasma Processing Member, Deposition Apparatus Including The Same, And Depositing Method Using The Same
App 20160258062 - KIM; Ki Jong ; et al. | 2016-09-08 |
Plasma processing member, deposition apparatus including the same, and depositing method using the same
Grant 9,371,583 - Kim , et al. June 21, 2 | 2016-06-21 |
Lateral flow atomic layer deposition device
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Lateral Flow Atomic Layer Deposition Apparatus And Atomic Layer Deposition Method Using The Same
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Lateral flow atomic layer deposition apparatus and atomic layer deposition method using the same
Grant 9,062,375 - Kim , et al. June 23, 2 | 2015-06-23 |
Lateral-flow deposition apparatus and method of depositing film by using the apparatus
Grant 8,778,083 - Kim , et al. July 15, 2 | 2014-07-15 |
Deposition apparatus
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Atomic layer deposition apparatus
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Atomic Layer Deposition Apparatus
App 20130052348 - Choi; Seung Woo ; et al. | 2013-02-28 |
Lateral Flow Atomic Layer Deposition Apparatus And Atomic Layer Deposition Method Using The Same
App 20130045331 - KIM; Woo Chan ; et al. | 2013-02-21 |
Thin film deposition apparatus and method thereof
Grant 8,347,813 - Kim , et al. January 8, 2 | 2013-01-08 |
Lateral Flow Atomic Layer Deposition Device
App 20120272900 - CHOI; Young-Seok ; et al. | 2012-11-01 |
Atomic layer deposition apparatus
Grant 8,282,735 - Choi , et al. October 9, 2 | 2012-10-09 |
Thin film deposition apparatus and method of maintaining the same
Grant 8,273,178 - Kim , et al. September 25, 2 | 2012-09-25 |
Methods of depositing a ruthenium film
Grant 8,273,408 - Kim , et al. September 25, 2 | 2012-09-25 |
Method of forming semiconductor patterns
Grant 8,252,691 - Beynet , et al. August 28, 2 | 2012-08-28 |
Atomic layer deposition apparatus
Grant 8,215,264 - Hong , et al. July 10, 2 | 2012-07-10 |
Deposition Apparatus
App 20120114856 - Park; Hyung Sang ; et al. | 2012-05-10 |
Deposition apparatus
Grant 8,092,606 - Park , et al. January 10, 2 | 2012-01-10 |
Atomic Layer Deposition Apparatus
App 20110308460 - Hong; Kyung Il ; et al. | 2011-12-22 |
Methods of forming an amorphous silicon thin film
Grant 8,076,242 - Kim , et al. December 13, 2 | 2011-12-13 |
Method Of Forming Semiconductor Patterns
App 20110256727 - Beynet; Julien ; et al. | 2011-10-20 |
Atomic layer deposition apparatus
Grant 7,976,898 - Hong , et al. July 12, 2 | 2011-07-12 |
Lateral-flow Deposition Apparatus And Method Of Depositing Film By Using The Apparatus
App 20110020545 - Kim; Ki Jong ; et al. | 2011-01-27 |
Deposition Apparatus
App 20100275844 - Kim; Jeon-Ho ; et al. | 2010-11-04 |
Substrate support for a semiconductor deposition apparatus
Grant D614,593 - Lee , et al. April 27, 2 | 2010-04-27 |
Substrate transfer device for semiconductor deposition apparatus
Grant D614,152 - Lee , et al. April 20, 2 | 2010-04-20 |
Plasma Processing Member, Deposition Apparatus Including The Same, And Depositing Method Using The Same
App 20100089320 - KIM; Ki Jong ; et al. | 2010-04-15 |
Plasma inducing plate for semiconductor deposition apparatus
Grant D606,952 - Lee , et al. December 29, 2 | 2009-12-29 |
Methods Of Forming An Amorphous Silicon Thin Film
App 20090278224 - Kim; Jong Su ; et al. | 2009-11-12 |
Thin Film Deposition Apparatus And Method Of Maintaining The Same
App 20090217871 - Kim; Se Yong ; et al. | 2009-09-03 |
Methods Of Depositing A Ruthenium Film
App 20090163024 - Kim; Jeon Ho ; et al. | 2009-06-25 |
Methods Of Depositing A Silicon Nitride Film
App 20090155606 - Yoon; Tae Ho ; et al. | 2009-06-18 |
Thin Film Deposition Apparatus And Method Thereof
App 20090155452 - Kim; Ki Jong ; et al. | 2009-06-18 |
Deposition Apparatus
App 20090156015 - Park; Hyung Sang ; et al. | 2009-06-18 |
Method of depositing Ru films having high density
Grant 7,541,284 - Park June 2, 2 | 2009-06-02 |
Atomic Layer Deposition Apparatus
App 20090136665 - Choi; Seung Woo ; et al. | 2009-05-28 |
Methods Of Depositing A Ruthenium Film
App 20090104777 - Kim; Jong Su ; et al. | 2009-04-23 |
Deposition Apparatus
App 20090047426 - PARK; Hyung Sang ; et al. | 2009-02-19 |
Method Of Depositing Silicon Oxide Films
App 20090041952 - Yoon; Tae Ho ; et al. | 2009-02-12 |
Thin film forming method
Grant 7,485,349 - Koh , et al. February 3, 2 | 2009-02-03 |
Lateral Flow Deposition Apparatus And Method Of Depositing Film By Using The Apparatus
App 20080241384 - Jeong; Sang Jin ; et al. | 2008-10-02 |
Methods Of Depositing A Ruthenium Film
App 20080171436 - Koh; Wonyong ; et al. | 2008-07-17 |
Atomic Layer Deposition Apparatus
App 20080110399 - Park; Hyung-Sang ; et al. | 2008-05-15 |
Ald Apparatus And Method For Depositing Multiple Layers Using The Same
App 20080075858 - Koh; Wonyong | 2008-03-27 |
Atomic Layer Deposition Apparatus
App 20080069955 - Hong; Kyung Il ; et al. | 2008-03-20 |
Thin Film Forming Method
App 20070048455 - Koh; Won-yong ; et al. | 2007-03-01 |
Thin film forming method
Grant 7,141,278 - Koh , et al. November 28, 2 | 2006-11-28 |
Plasma enhanced atomic layer deposition (PEALD) equipment and method of forming a conducting thin film using the same thereof
Grant 7,138,336 - Lee , et al. November 21, 2 | 2006-11-21 |
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