| Patent | Date |
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Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium
Grant 11,170,996 - Ashihara , et al. November 9, 2 | 2021-11-09 |
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
Grant 11,152,215 - Degai , et al. October 19, 2 | 2021-10-19 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Non-transitory Computer-readable Recording Medium
App 20210249256 - ASHIHARA; Hiroshi ; et al. | 2021-08-12 |
Polyester Film And Method For Producing Same
App 20210179843 - Okuzu; Takayoshi ; et al. | 2021-06-17 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20210166948 - DEGAI; Motomu ; et al. | 2021-06-03 |
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
App 20210143001 - ASHIHARA; Hiroshi ; et al. | 2021-05-13 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20210098258 - DEGAI; Motomu ; et al. | 2021-04-01 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Non-transitory Computer-readable Recording Medium
App 20200294788 - ASHIHARA; Hiroshi ; et al. | 2020-09-17 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 10,720,324 - Nakatani , et al. | 2020-07-21 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20200219727 - DEGAI; Motomu ; et al. | 2020-07-09 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20200135455 - NAKATANI; Kimihiko ; et al. | 2020-04-30 |
Substrate Processing Apparatus
App 20190393057 - SHIMAMOTO; Satoshi ; et al. | 2019-12-26 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Non-transitory Computer-readable Recording Medi
App 20190371609 - DEGAI; Motomu ; et al. | 2019-12-05 |
Method of manufacturing semiconductor device and substrate processing apparatus
Grant 10,388,530 - Ogawa , et al. A | 2019-08-20 |
Method of manufacturing semiconductor device
Grant 10,388,762 - Kitamura , et al. A | 2019-08-20 |
Method of manufacturing semiconductor device, substrate processing apparatus, recording medium, and supply system
Grant 10,361,084 - Ashihara , et al. | 2019-07-23 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20190157089 - OGAWA; Arito ; et al. | 2019-05-23 |
Method of manufacturing semiconductor device
Grant 10,297,440 - Yamazaki , et al. | 2019-05-21 |
Method of manufacturing semiconductor device having air gap between wirings for low dielectric constant
Grant 10,128,128 - Takeda , et al. November 13, 2 | 2018-11-13 |
Method of manufacturing semiconductor device
Grant 10,115,583 - Shimamoto , et al. October 30, 2 | 2018-10-30 |
Substrate Processing Apparatus
App 20180277405 - SHIMAMOTO; Satoshi ; et al. | 2018-09-27 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20180247819 - OGAWA; Arito ; et al. | 2018-08-30 |
Method Of Manufacturing Semiconductor Device
App 20180233348 - SHIMAMOTO; Satoshi ; et al. | 2018-08-16 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Recording Medium, And Supply System
App 20180190496 - ASHIHARA; Hiroshi ; et al. | 2018-07-05 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,916,976 - Ushida , et al. March 13, 2 | 2018-03-13 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20180033607 - NAKATANI; Kimihiko ; et al. | 2018-02-01 |
Method Of Manufacturing Semiconductor Device
App 20170352745 - KITAMURA; Masahito ; et al. | 2017-12-07 |
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
Grant 9,831,083 - Yamaguchi , et al. November 28, 2 | 2017-11-28 |
Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium
Grant 9,831,082 - Shimamoto , et al. November 28, 2 | 2017-11-28 |
Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium
Grant 9,824,883 - Ashihara , et al. November 21, 2 | 2017-11-21 |
Substrate processing apparatus
Grant 9,816,183 - Ashihara , et al. November 14, 2 | 2017-11-14 |
Substrate processing apparatus, method for manufacturing semiconductor device, and recording medium
Grant 9,816,182 - Tateno , et al. November 14, 2 | 2017-11-14 |
Method of manufacturing semiconductor device
Grant 9,812,355 - Nakatani , et al. November 7, 2 | 2017-11-07 |
Method Of Manufacturing Semiconductor Device
App 20170287731 - TAKEDA; Tsuyoshi ; et al. | 2017-10-05 |
Method of manufacturing semiconductor device
Grant 9,728,409 - Harada , et al. August 8, 2 | 2017-08-08 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,728,400 - Hanashima , et al. August 8, 2 | 2017-08-08 |
Substrate Processing Apparatus
App 20170198391 - ASHIHARA; Hiroshi | 2017-07-13 |
Method of manufacturing semiconductor device
Grant 9,698,050 - Ashihara , et al. July 4, 2 | 2017-07-04 |
Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and recording medium
Grant 9,673,043 - Noda , et al. June 6, 2 | 2017-06-06 |
Substrate processing apparatus and method of manufacturing semiconductor device
Grant 9,659,767 - Yanai , et al. May 23, 2 | 2017-05-23 |
Method Of Manufacturing Semiconductor Device
App 20170092490 - YAMAZAKI; Hirohisa ; et al. | 2017-03-30 |
Substrate Processing Apparatus
App 20170067157 - ASHIHARA; Hiroshi ; et al. | 2017-03-09 |
Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium
Grant 9,587,313 - Wada , et al. March 7, 2 | 2017-03-07 |
Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium
Grant 9,558,937 - Nakatani , et al. January 31, 2 | 2017-01-31 |
Method Of Manufacturing Semiconductor Device
App 20170011926 - HARADA; Kazuhiro ; et al. | 2017-01-12 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20170004961 - USHIDA; Takuro ; et al. | 2017-01-05 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
Grant 9,536,734 - Hanashima , et al. January 3, 2 | 2017-01-03 |
Method of manufacturing semiconductor device
Grant 9,508,546 - Toyoda , et al. November 29, 2 | 2016-11-29 |
Method Of Manufacturing Semiconductor Device And Recording Medium
App 20160293421 - HARADA; Kazuhiro ; et al. | 2016-10-06 |
Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium
Grant 9,418,855 - Nakatani , et al. August 16, 2 | 2016-08-16 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Non-transitory Computer-readable Recording Medium
App 20160233085 - YAMAGUCHI; Daigo ; et al. | 2016-08-11 |
Method Of Forming Fine Pattern, Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Recording Medium
App 20160218012 - SHIMAMOTO; Satoshi ; et al. | 2016-07-28 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Substrate Processing System And Recording Medium
App 20160211135 - NODA; Takaaki ; et al. | 2016-07-21 |
Method of manufacturing a semiconductor device
Grant 9,368,358 - Harada , et al. June 14, 2 | 2016-06-14 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20160155627 - HANASHIMA; Takeo ; et al. | 2016-06-02 |
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Substrate Processing System and Non-Transitory Computer-Readable Recording Medium
App 20160155634 - SHIMAMOTO; Satoshi ; et al. | 2016-06-02 |
Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium
Grant 9,349,586 - Shimamoto , et al. May 24, 2 | 2016-05-24 |
Substrate Processing Apparatus
App 20160090651 - ASHIHARA; Hiroshi ; et al. | 2016-03-31 |
Method Of Manufacturing A Semiconductor Device
App 20160056044 - HARADA; Kazuhiro ; et al. | 2016-02-25 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Non-transitory Computer-readable Recording Medium
App 20160042940 - NAKATANI; Kimihiko ; et al. | 2016-02-11 |
Substrate Processing Apparatus
App 20160024650 - TOYODA; Kazuyuki ; et al. | 2016-01-28 |
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
App 20160013053 - ASHIHARA; Hiroshi ; et al. | 2016-01-14 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Non-transitory Computer-readable Recording Medium
App 20150340226 - ASHIHARA; Hiroshi ; et al. | 2015-11-26 |
Apparatus for manufacturing semiconductor device, method of manufacturing semiconductor device, and recording medium
Grant 9,190,299 - Wada , et al. November 17, 2 | 2015-11-17 |
Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium
Grant 9,187,826 - Nakatani , et al. November 17, 2 | 2015-11-17 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus
App 20150325447 - OGAWA; Arito ; et al. | 2015-11-12 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Non-transitory Computer-readable Recording Medium
App 20150279682 - NAKATANI; Kimihiko ; et al. | 2015-10-01 |
Method Of Manufacturing Semiconductor Device
App 20150243507 - HARADA; Kazuhiro ; et al. | 2015-08-27 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium
App 20150228474 - HANASHIMA; Takeo ; et al. | 2015-08-13 |
Method Of Manufacturing Semiconductor Device
App 20150221503 - TOYODA; Kazuyuki ; et al. | 2015-08-06 |
Method Of Manufacturing Semiconductor Device
App 20150214044 - YANAI; Hidehiro ; et al. | 2015-07-30 |
Substrate processing apparatus and method of manufacturing semiconductor device
Grant 9,082,797 - Aburatani , et al. July 14, 2 | 2015-07-14 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Non-transitory Computer-readable Recording Medium
App 20150187567 - ASHIHARA; Hiroshi ; et al. | 2015-07-02 |
Method of manufacturing semiconductor device
Grant 9,059,089 - Harada , et al. June 16, 2 | 2015-06-16 |
Substrate Processing Apparatus, Method For Manufacturing Semiconductor Device, And Recording Medium
App 20150140835 - TATENO; Hideto ; et al. | 2015-05-21 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Non-transitory Computer-readable Recording Medium
App 20150132972 - WADA; Yuichi ; et al. | 2015-05-14 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Non-transitory Computer-readable Recording Medium
App 20150093911 - NAKATANI; Kimihiko ; et al. | 2015-04-02 |
Substrate processing apparatus and method of manufacturing semiconductor device
Grant 8,986,450 - Yanai , et al. March 24, 2 | 2015-03-24 |
Substrate processing apparatus and method of manufacturing semiconductor device
Grant 8,925,562 - Toyoda , et al. January 6, 2 | 2015-01-06 |
Substrate Processing Device, Method for Manufacturing Semiconductor Device, and Vaporizer
App 20140302687 - ASHIHARA; Hiroshi ; et al. | 2014-10-09 |
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Substrate Processing System and Non-Transitory Computer-Readable Recording Medium
App 20140287595 - Shimamoto; Satoshi ; et al. | 2014-09-25 |
Apparatus for Manufacturing Semiconductor Device, Method of Manufacturing Semiconductor Device, and Recording Medium
App 20140256160 - Wada; Yuichi ; et al. | 2014-09-11 |
Method Of Manufacturing Semiconductor Device
App 20140242790 - HARADA; Kazuhiro ; et al. | 2014-08-28 |
Method Of Manufacturing Semiconductor Device, Apparatus For Manufacturing Semiconductor Device, And Non-transitory Computer-readable Recording Medium
App 20140235068 - ASHIHARA; Hiroshi ; et al. | 2014-08-21 |
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
App 20130012035 - Aburatani; Yukinori ; et al. | 2013-01-10 |
Method of manufacturing semiconductor device having MIM capacitor
Grant 7,981,761 - Imai , et al. July 19, 2 | 2011-07-19 |
Semiconductor integrated circuit device and a method of manufacturing the same
Grant 7,777,346 - Ishikawa , et al. August 17, 2 | 2010-08-17 |
Semiconductor Device And Manufacturing Method Thereof
App 20100181647 - IMAI; Toshinori ; et al. | 2010-07-22 |
Semiconductor integrated circuit device and a method of manufacturing the same
Grant 7,569,476 - Ishikawa , et al. August 4, 2 | 2009-08-04 |
Semiconductor Integrated Circuit Device And A Method Of Manufacturing The Same
App 20090115063 - Ishikawa; Kensuke ; et al. | 2009-05-07 |
METHOD FOR NON-INVASIVE EXAMINATION OF NON-ALCOHOLIC STEATOHEPATITIS BY QUANTIFICATION OF CYTOCHROME-c, AND TEST KIT
App 20090111122 - Sasaki; Yutaka ; et al. | 2009-04-30 |
Semiconductor Device And Manufacturing Method Thereof
App 20080203531 - Imai; Toshinori ; et al. | 2008-08-28 |
Semiconductor integrated circuit device and a method of manufacturing the same
App 20060216925 - Ishikawa; Kensuke ; et al. | 2006-09-28 |
Semiconductor integrated circuit device with a connective portion for multilevel interconnection
Grant 7,095,120 - Ishikawa , et al. August 22, 2 | 2006-08-22 |
Semiconductor integrated circuit device with a metallization structure
Grant 7,088,001 - Ashihara , et al. August 8, 2 | 2006-08-08 |
Method of manufacturing a semiconductor integrated circuit device including a hole formed in an insulating film and a first conductive film formed over a bottom region and sidewalls of the hole
Grant 7,018,919 - Ishikawa , et al. March 28, 2 | 2006-03-28 |
Camellia Sinensis Gene Encoding A Caffeine Synthesis Associated N-methyl Transferase With 7-methylxanthine N3 Methyl Transferase, Theobromine N1 Methyl Transferase, And Paraxanthine N3 Methyl Transferase Activities And Use Thereof
Grant 6,930,227 - Mizuno , et al. August 16, 2 | 2005-08-16 |
Semiconductor device
Grant 6,838,772 - Saitoh , et al. January 4, 2 | 2005-01-04 |
Semiconductor integrated circuit device with a metallization structure
App 20040207095 - Ashihara, Hiroshi ; et al. | 2004-10-21 |
Method of manufacturing a multilayer metallization structure with non-directional sputtering method
Grant 6,764,945 - Ashihara , et al. July 20, 2 | 2004-07-20 |
Method for manufacturing semiconductor integrated circuit devices using a conductive layer to prevent peeling between a bonding pad and an underlying insulating film
Grant 6,696,357 - Imai , et al. February 24, 2 | 2004-02-24 |
Semiconductor device
App 20030214043 - Saitoh, Toshio ; et al. | 2003-11-20 |
Semiconductor integrated circuit device and a method of manufacturing the same
App 20030102565 - Ishikawa, Kensuke ; et al. | 2003-06-05 |
Semiconductor integrated circuit device and a method of manufacturing the same
App 20030067079 - Ishikawa, Kensuke ; et al. | 2003-04-10 |
Method for manufacturing semiconductor integrated circuit device
App 20030045088 - Imai, Toshinori ; et al. | 2003-03-06 |
Semiconductor integrated circuit device and fabrication method for semiconductor integrated circuit device
App 20020098670 - Ashihara, Hiroshi ; et al. | 2002-07-25 |
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