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Patent applications and USPTO patent grants for Aschner; Helmut.The latest application filed is for "method and device for the thermal treatment of substrates and holding unit for substrates".
Patent | Date |
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Method And Device For The Thermal Treatment Of Substrates And Holding Unit For Substrates App 20180366352 - Muller; Steffem ;   et al. | 2018-12-20 |
Device and method for the reduction of particles in the thermal treatment of rotating substrates App 20070098904 - Aschner; Helmut ;   et al. | 2007-05-03 |
Method and apparatus device for the heat treatment of substrates Grant 6,752,625 - Aschner , et al. June 22, 2 | 2004-06-22 |
Gas Driven Rotating Susceptor For Rapid Thermal Processing (rtp) System App 20010002948 - ASCHNER, HELMUT ;   et al. | 2001-06-07 |
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